EP-4516070-A4 - CONFOCAL CHROMATIC METROLOGY FOR EUV SOURCE CONDITION MONITORING
EP4516070A4EP 4516070 A4EP4516070 A4EP 4516070A4EP-4516070-A4
Inventors
- TAE PATRICK
- SU CAIJUN
- JAGANNATH RAVICHANDRA
- AHR BRIAN
Assignees
- KLA CORP
Dates
- Publication Date
- 20260506
- Application Date
- 20230901
- Priority Date
- 20220914