EP-4534243-A4 - POLISHING HEAD, AND POLISHING TREATMENT DEVICE
EP4534243A4EP 4534243 A4EP4534243 A4EP 4534243A4EP-4534243-A4
Inventors
- KOMURA AKIO
- KUWANO TAKAFUMI
- TOMIZAWA HAJIME
Assignees
- MICRO ENG INC
Dates
- Publication Date
- 20260506
- Application Date
- 20221024
- Priority Date
- 20221024