BEAM ALIGNMENT AND SYNCHRONIZATION IN MICROSCOPY

Abstract

A method for aligning a pulsed laser beam in microscopy may include directing a first pulsed photon beam toward a target, directing a charged particle beam towards the target, determining a diffraction pattern resulting from an interaction of the charged particle beam with the target, directing a second pulsed photon beam towards the target, and determining a deviation of the diffraction pattern based at least in part on the second pulsed photon beam. In some embodiments, the method may include controlling, based at least in part on the deviation, a direction of pulsed photon emission by a light source, directing a third pulsed photon beam toward the target, generating detector data based at least in part on charged particles that result from a second interaction with the target and the third pulsed photon beam, and determining a position of the third pulsed photon beam, relative to the charged particle beam using the detector data.

Inventors

BONGIOVANNI, GABRIELE
KIEFT, ERIK

Assignees

FEI COMPANY

Dates

Publication Date: 20260506
Application Date: 20250709