EP-4666190-A4 - ADAPTIVE SPATIAL PATTERN RECOGNITION FOR DEFECT DETECTION
EP4666190A4EP 4666190 A4EP4666190 A4EP 4666190A4EP-4666190-A4
Inventors
- XIANG LONGJIANG
- ZHANG HONGSHUO
- SONG XIN
Assignees
- ONTO INNOVATION INC
Dates
- Publication Date
- 20260506
- Application Date
- 20240216
- Priority Date
- 20230217