APPARATUS FOR ION ENERGY ANALYSIS OF PLASMA PROCESSES

Abstract

An apparatus for obtaining ion energy distribution, IED, measurements in a plasma processing system comprising a substrate for placement in the plasma processing system and exposed to the plasma, an ion energy analyser disposed in the substrate for measuring the ion energy distribution at the substrate surface during plasma processing, the analyser comprising a first conductive grid, G 0 , a second conductive grid, G 1 , a third conductive grid, G 2 , a fourth conductive grid G 3 , and a collection electrode, C, each grid separated by an insulation layer, a battery power supply and control circuitry, integrated in the substrate, for supplying and controlling voltage to each of the grids and the collector of the ion energy analyser; wherein at least one insulation layer includes a peripheral portion which is of reduced thickness with respect to the remaining portion of the insulation layer.

Inventors

SCULLIN, PAUL
DOYLE, JAMES
LENNON, JJ
GAHAN, DAVID
POGHOSYAN, Tigran

Assignees

Applied Materials, Inc.

Dates

Publication Date: 20260513
Application Date: 20210830