EP-4686771-A3 - METHODS FOR DEPOSITING CONDUCTIVE CARBON FILMS
EP4686771A3EP 4686771 A3EP4686771 A3EP 4686771A3EP-4686771-A3
Abstract
Methods, systems, and devices for depositing carbon conducting films are described. The method may include reacting a first precursor with a base material to form a carbon compound on a material. The first precursor may include at least one of germanium, silicon, or tin. The method may further include reacting a second, carbon-containing precursor with the carbon compound to form a layer on the base material. In such cases, a layer of carbon on a plurality of stacks of materials may be formed by exposing the plurality of stacks of materials to the first precursor and the second, carbon-containing precursor.
Inventors
- LEHN, JEAN-SEBASTIEN MATERNE
Assignees
- Micron Technology, Inc.
Dates
- Publication Date
- 20260513
- Application Date
- 20250730