EP-4697076-A3 - VERTICAL MECHANICAL STOPS TO PREVENT LARGE OUT-OF-PLANE DISPLACEMENTS OF A MICRO-MIRROR AND METHODS OF MANUFACTURE
EP4697076A3EP 4697076 A3EP4697076 A3EP 4697076A3EP-4697076-A3
Abstract
A mirror array comprising a movable mirror is described. The movable mirror including a stationary frame including a cavity and a movable frame in the cavity. The movable frame is suspended from the stationary frame by a first stationary frame flexure and a second stationary frame flexure. The movable mirror further includes a central stage in the cavity. The mirror array further comprises a lid wafer covering the movable mirror and a first protrusion on the lid wafer, wherein the first protrusion extends towards the movable mirror.
Inventors
- MILLER, SCOTT, A.
Assignees
- Calient.AI Inc.
Dates
- Publication Date
- 20260506
- Application Date
- 20221018