EP-4707426-A3 - HIGH-PURITY ALKYNES FOR SELECTIVE DEPOSITION
EP4707426A3EP 4707426 A3EP4707426 A3EP 4707426A3EP-4707426-A3
Abstract
The disclosed and claimed subject matter relates to high-purity alkynes substantially free of residual alkyl halides, water and/or carboxylic acids and their use ( e.g., in formulations) for enhanced passivation of metallic substrates.
Inventors
- CLOUGH, CHRISTOPHER R.
- THODE, Christopher Jay
- HOPKINS, CHRISTOPHER DAVID
- IVANOV, SERGEI V.
- DERECSKEI, AGNES
Assignees
- Merck Patent GmbH
- Sigma-Aldrich Co. LLC
- Versum Materials US, LLC
Dates
- Publication Date
- 20260506
- Application Date
- 20230223