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EP-4736214-A1 - PULSE-SHAPING USING A SUB-REGION TUNING APPARATUS AND METHOD

EP4736214A1EP 4736214 A1EP4736214 A1EP 4736214A1EP-4736214-A1

Abstract

A controller for a generator includes a feedforward control module. The feedforward control module is configured to generate an adjustment profile to control a parameter of a generator in accordance with a desired output signal. The feedforward control module generates a plurality of adjustment values in accordance with sub-regions of the output signal. Each sub-region includes a portion of the desired output signal.

Inventors

  • BURRY, AARON
  • NELSON, NICHOLAS

Assignees

  • MKS Instruments, Inc.

Dates

Publication Date
20260506
Application Date
20240621

Claims (20)

  1. 1 . A controller for a generator comprising: a feedforward control module, the feedforward control module configured to generate an adjustment profile to control a parameter of a generator in accordance with a desired output signal, wherein the feedforward control module generates a plurality of adjustment values in accordance with sub-regions of the output signal, wherein each sub-region includes a portion of the desired output signal.
  2. 2. The controller of claim 1 , wherein the feedforward control module receives a synchronization signal, wherein the synchronization signal indicates a relative position of the desired output signal.
  3. 3. The controller of claim 1 , wherein the desired output signal is a multistate pulse signal having a period.
  4. 4. The controller of claim 1 , wherein a sub-region may be one of a state of a multistate pulse of the desired output signal, a transition of the desired output signal, or an area of interest of the desired output signal.
  5. 5. The controller of claim 1 , wherein the feedforward control module includes a plurality of tuners, wherein each tuner provides feedforward control for a respective sub-region, or wherein the feedforward control module includes a single tuner, wherein the single tuner provides feedforward control over each sub-region and does not provide feedforward control for other than each sub-region.
  6. 6. The controller of claim 1 , wherein the feedforward control module further comprises: first memory for storing at least one actuator profile, wherein the at least one actuator profile varies in accordance with at least one prior actuator profile; second memory for storing at least one output profile, wherein the at least one output profile varies in accordance with at least one parameter of the output signal; and a learning module configured to receive the at least one actuator profile and the at least one output profile and generating the adjustment profile in accordance with at least one of a prior adjustment profile, the at least one actuator profile, or the at least one output profile.
  7. 7. The controller of claim 1 , wherein the generator is one of a voltage, current, power, or RF generator.
  8. 8. The controller of claim 1 , wherein the feedforward control module allocates samples to each sub-region in accordance with at least one of a number of available samples or a number of sub-regions, wherein one of an equal number of samples are allocated to each sub-region or a different number of samples are allocated to a pair of sub-regions.
  9. 9. The controller of claim 8, wherein the different number of samples are allocated dynamically in accordance with at least one of smooth feedforward actuator content or magnitude of error.
  10. 10. The controller of claim 8, wherein one of: if a pair of sub-regions are arranged so that allocated samples of each sub-region partially overlap, the feedforward control module combines the pair of sub-regions to define a combined sub-region, or if a pair of sub-regions are arranged at an end of the desired output signal and at a beginning of a next the desired output signal and the allocated samples of each sub-region partially overlap, the feedforward control module combines the pair of sub-regions to define a combined sub-region.
  11. 11 . The controller of claim 1 , further comprising: at least one of a feedback control module or an open loop control module, wherein in each sub-region, both feedback and feedforward control are used to control a parameter of the generator, and wherein for other than the sub-regions, one of feedforward or open loop control adjusts the parameter of the generator.
  12. 12. A non-transitory computer-readable medium storing processor-executable instructions, the instructions comprising: generating by a feedforward control module an adjustment profile to control a parameter of a generator in accordance with a desired output signal; and generates a plurality of adjustment values in accordance with sub-regions of the output signal, wherein each sub-region includes a portion of the desired output signal, wherein a sub-region may be one of a state of a multistate pulse of the desired output signal, a transition of the desired output signal, or an area of interest of the desired output signal.
  13. 13. The non-transitory computer-readable medium storing processorexecutable instructions of claim 1 , further comprising receiving a synchronization signal, wherein the synchronization signal indicates a relative position of the desired output signal.
  14. 14. The non-transitory computer-readable medium storing processorexecutable instructions of claim 12, wherein the feedforward control module includes a plurality of tuners, wherein each tuner provides feedforward control for a respective sub-region, or wherein the feedforward control module includes a single tuner, wherein the single tuner provides feedforward control over each sub-region and does not provide feedforward control for other than each sub-region.
  15. 15. The non-transitory computer-readable medium storing processorexecutable instructions of claim 12, further comprising: storing at least one actuator profile in first memory, wherein the at least one actuator profile varies in accordance with at least one prior actuator profile; storing at least one output profile in second memory, wherein the at least one output profile varies in accordance with at least one parameter of the output signal; and receiving the at least one actuator profile and the at least one output profile and generating the adjustment profile in accordance with at least one of at least one adjustment profile, the at least one actuator profile, or the at least one output profile.
  16. 16. The non-transitory computer-readable medium storing processorexecutable instructions of claim 12, further comprising allocating samples to each sub-region in accordance with at least one of a number of available samples or a number of sub-regions, wherein one of an equal number of samples are allocated to each sub-region or a different number of samples are allocated to a pair of sub-regions, wherein the different number of samples are allocated dynamically in accordance with at least one of smooth feedforward actuator content or magnitude of error.
  17. 17. The non-transitory computer-readable medium storing processorexecutable instructions of claim 16, wherein one of: if a pair of sub-regions are arranged so that the allocated samples of each sub-region partially overlap, combining the pair of sub-regions to define a combined sub-region, or if a pair of sub-regions are arranged at an end of the desired output signal and at a beginning of a next the desired output signal and the allocated samples of each sub-region partially overlap, combining the pair of sub-regions to define a combined sub-region.
  18. 18. A power supply system comprising: a RF generator configured to output a desired output signal to a load; and a controller for a generator including a feedforward control module, the feedforward control module configured to generate an adjustment profile to control a parameter of a generator in accordance with a desired output signal, wherein the feedforward control module generates a plurality of adjustment values in accordance with sub-regions of the output signal, wherein each sub-region includes a portion of the desired output signal.
  19. 19. The power supply system of claim 18, wherein the feedforward control module includes a plurality of tuners, wherein each tuner provides feedforward control for a respective sub-region, or wherein the feedforward control module includes a single tuner, wherein the single tuner provides feedforward control over each sub-region and does not provide feedforward control for other than each sub-region.
  20. 20. The power supply system of claim 18, wherein the feedforward control module allocates samples to each sub-region in accordance with at least one of a number of available samples or a number of sub-regions, wherein one of an equal number of samples are allocated to each sub-region or a different number of samples are allocated to a pair of sub-regions.

Description

PULSE-SHAPING USING A SUB-REGION TUNING APPARATUS AND METHOD CROSS-REFERENCE TO RELATED APPLICATIONS [0001] This application claims priority to U.S. Patent Application No. 18/731 ,703, filed on June 3, 2024 and also claims the benefit of U.S. Provisional Application No. 63/523,783, filed on June 28, 2023. The entire disclosures of the above applications are incorporated herein by reference. FIELD [0002] The present disclosure relates to RF generator systems and to control of RF generators. BACKGROUND [0003] Plasma processing is frequently used in semiconductor fabrication. In plasma processing, ions are accelerated by an electric field to etch material from or deposit material onto a surface of a substrate. In one basic implementation, the electric field is generated based on Radio Frequency (RF) or Direct Current (DC) power signals generated by a respective RF or DC generator of a power delivery system. The power signals generated by the generator must be precisely controlled to effectively execute plasma etching. [0004] The background description provided here is for the purpose of generally presenting the context of the disclosure. Work of the presently named inventors, to the extent it is described in this background section, as well as aspects of the description that may not otherwise qualify as prior art at the time of filing, are neither expressly nor impliedly admitted as prior art against the present disclosure. SUMMARY [0005] A system of one or more computers can be configured to perform particular operations or actions by virtue of having software, firmware, hardware, or a combination of them installed on the system that in operation causes or cause the system to perform the actions. One or more computer programs can be configured to perform particular operations or actions by virtue of including instructions that, when executed by data processing apparatus, cause the apparatus to perform the actions. One general aspect includes a controller for a generator. The controller also includes a feedforward control module, the feedforward control module configured to generate an adjustment profile to control a parameter of a generator in accordance with a desired output signal. The feedforward control module generates a plurality of adjustment values in accordance with subregions of the output signal, where each sub-region includes a portion of the desired output signal. Other embodiments of this aspect include corresponding computer systems, apparatus, and computer programs recorded on one or more computer storage devices, each configured to perform the actions of the methods. [0006] Implementations may include one or more of the following features. The controller where the feedforward control module receives a synchronization signal and where the synchronization signal indicates a relative position of the desired output signal. The desired output signal is a multistate pulse signal having a period. A subregion may be one of a state of a multistate pulse of the desired output signal, a transition of the desired output signal, or an area of interest of the desired output signal. The feedforward control module includes a plurality of tuners, where each tuner provides feedforward control for a respective subregion. The feedforward control module includes a single tuner, where the single tuner provides feedforward control over each subregion and does not provide feedforward control for other than each subregion. The feedforward control module further may include: first memory for storing at least one prior actuator profile, wherein the prior actuator profile varies in accordance with at least one prior actuator profile; second memory for storing at least one prior output profile, where the prior output profile varies in accordance with the output of the generator; a learning module configured to receive the prior actuator profile and the prior output profile and generating the adjustment profile in accordance with at least one of at least one prior adjustment profile, the at least one prior actuator profile, and the at least one prior output profile. The generator is one of a voltage, current, or power generator. The generator is a RF generator. The feedforward control module allocates samples to each subregion in accordance with at least one of a number of available samples or a number of subregions. An equal number of samples are allocated to each sub-region. A different number of samples are allocated to a pair of sub-regions. Samples are allocated dynamically in accordance with at least one of smooth feedforward actuator content or magnitude of error. If a pair of subregions are arranged so that the allocated samples of each subregion partially overlap, the feedforward control module combines the pair of subregions to define a combined subregion. If a pair of subregions are arranged at an end of the desired output signal and at a beginning of a next the desired output signal and the allocated sampl