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EP-4736469-A1 - MEMS-BASED IMAGING DEVICES

EP4736469A1EP 4736469 A1EP4736469 A1EP 4736469A1EP-4736469-A1

Abstract

This document relates to devices employing imaging devices, such as cameras and improved camera performance. In one example the device includes an optical element and a sensing element configured to sense light passing through the optical element. This example includes a set of MEMS actuators configured to be individually selectively controlled to create six degrees of freedom (6DoF) movement between the sensing element and the optical element.

Inventors

  • PEREZ NOGUERA, Gritsko

Assignees

  • Microsoft Technology Licensing, LLC

Dates

Publication Date
20260506
Application Date
20240530

Claims (20)

  1. 1. A device (102), comprising: an optical element (302); a sensing element (118) configured to sense light passing through the optical element; a processor (2806) configured to receive data from the sensing element; and, a set of micro electromechanical systems (MEMS) actuators (116) supporting the sensing element and configured to be individually selectively controlled to create movement of the sensing element relative to the optical element and to convey the data between the sensing element and the processor.
  2. 2. The device of claim 1, wherein the set of MEMS actuators comprises six MEMS actuators arranged in a hexagonal shape that contains a moveable area that includes the sensing element or wherein the set of MEMS actuators comprises four MEMS actuators arranged in a square shape that contains a moveable area that includes the sensing element.
  3. 3. The device of claim 2, wherein the six MEMS actuators extend from a fixed area to the moveable area.
  4. 4. The device of claim 3, wherein the fixed area, the six MEMS actuators, and the moveable area share a common semiconductor substrate.
  5. 5. The device of claim 4, wherein conductive traces extend from the fixed area through individual MEMS actuators to the moveable area to convey the data between the sensing element and the processor.
  6. 6. The device of claim 5, wherein the conductive traces carry the data between the sensing element and the processor positioned on the fixed area.
  7. 7. The device of claim 6, wherein the fixed area, the set of MEMS actuators, and the moveable area lie in a common plane unless the individual MEMS actuators are actuated.
  8. 8. The device of claim 7, wherein individual MEMS actuators appear to generally approximate a rectangle as viewed in the common plane, and wherein actuation of an individual MEMS actuator can change dimensions of the rectangle or cause the rectangle to rotate out of the common plane.
  9. 9. The device of claim 8, wherein individual MEMS actuators include an actuator element.
  10. 10. The device of claim 9, wherein the actuator element functions cooperatively with another actuator element positioned in the fixed area proximate to the individual MEMS actuators.
  11. 11. The device of claim 10, wherein the actuator element compnses an electrical coil and the another actuator element comprises a fixed magnet or wherein the another actuator element comprises another electrical coil.
  12. 12. The device of claim 9, wherein the actuator element functions cooperatively with another actuator element positioned on a semiconductor substrate positioned on an opposite side of the common semiconductor substrate from the optical element.
  13. 13. The device of claim 1, wherein the movement comprises six degrees of freedom (6DoF) movement or the movement comprises less than 6DoF movement.
  14. 14. A system (2800), comprising: an optical element (302); a sensing element (118) configured to sense light passing through the optical element; and, a set of MEMS actuators (116) configured to be individually selectively controlled to create six degrees of freedom (6DoF) movement between the sensing element and the optical element.
  15. 15. The system of claim 14, wherein the set of MEMS actuators are positioned around the optical element, or wherein the set of MEMS actuators are positioned around the sensing element.
  16. 16. The system of claim 14, wherein the set of MEMS actuators are positioned around the optical element and wherein another set of MEMS actuators are positioned around the sensing element.
  17. 17. A device (102), comprising: a semiconductor substrate (1506) processed to include a set of multiple independently controllable MEMS actuators (116) extending from a fixed area (110) to a central moveable area (112); and, individual MEMS actuators comprising a planar ribbon structure that includes a first elongate portion (904) coupled to the fixed area, a second elongate portion (904) that is generally parallel to the first elongate portion, a first switchback-shaped transition portion (906) that extends between the first elongate portion and the second elongate portion, and a third elongate portion that is coupled to the central moveable area (112) and is generally parallel to the second elongate portion and is coupled to the second elongate portion by a second switchback-shaped transition portion (906) that extends between the second elongate portion and the third elongate portion.
  18. 18. The device of claim 17, wherein the MEMS actuators further comprise conductive traces extending from the fixed area to the central moveable area.
  19. 19. The device of claim 18, wherein a periphery of the first elongate portion, the second elongate portion, the third elongate portion, the first switchback-shaped transition portion and the second switchback-shaped transition portion approximates a rectangle.
  20. 20. The device of claim 19, wherein the individual MEMS actuators can be controlled to change dimensions of the rectangle and/or to tilt the rectangle out of a plane of the fixed area and the central moveable area.

Description

MEMS-BASED IMAGING DEVICES BACKGROUND [0001] Imaging devices include an optical element and a sensing element. Improved fabrication techniques have allowed imaging devices to be reduced in size and cost while in many cases offering enhanced performance. This has allowed imaging devices to be included in more devices. For instance, smart phones, tablets, and notebook computers include multiple imaging devices. Imaging devices are now employed on many other types of devices such as vehicles, drones, etc. SUMMARY [0002] This patent relates to devices employing imaging devices, such as cameras and to improved camera performance. In one example the device includes an optical element and a sensing element configured to sense image forming light passing through the optical element. This example includes a set of MEMS actuators configured to be individually selectively controlled to create six degrees of freedom (6DoF) movement between the sensing element and the optical element. [0003] This Summary is intended to provide a quick introduction to some of the inventive concepts and is not intended to be inclusive or limiting. BRIEF DESCRIPTION OF THE DRAWINGS [0004] The Detailed Description is described with reference to the accompanying figures. In the figures, the left-most digit(s) of a reference number identifies the figure in which the reference number first appears. The use of similar reference numbers in different instances in the description and the figures may indicate similar or identical items. Where space permits element names and element numerical designators are both shown on the drawing page for the reader’s convenience. Otherwise, only the element numerical designators are shown. [0005] FIGS. 1, 3-15A, 16A, 17A-18A, 19A, 19B, 21-24, and 27B show elevational views of example devices in accordance with some implementations of the present concepts. [0006] FIGS. 2A, 2B, and 20 show perspective views of example devices in accordance with some implementations of the present concepts. [0007] FIGS. 15B, 15C, 16B, 16C, 18B, and 27A show sectional views of example devices in accordance with some implementations of the present concepts. [0008] FIGS. 25 and 26 show example use-case scenarios in accordance with some implementations of the present concepts. [0009] FIG. 28 shows an example system in accordance with some implementations of the present concepts. DETAILED DESCRIPTION OVERVIEW [0010] Imaging devices, such as cameras, have benefited from technological advances so that current imaging devices are relatively highly performing, relatively small, and relatively inexpensive. Imaging devices include an optical element and a sensing element. The majority of the advances have related to miniaturizing optical elements and sensing elements that are (spatially) fixed relative to one another. This fixed configuration is economical but greatly limits the performance capabilities of the imaging devices. To address this issue, many devices, such as smart phones, employ a cluster of fixed imaging devices together on the device. Individual imaging devices can be specialized for specific scenarios, such as one for long distances and one for wide angles, etc. Attempts have been made to provide limited relative movement between the optical element and the sensing element. However, the attempts have provided only limited relative movement and performance gains have been minimal. [0011] The present concepts include a technical solution that involves a microelectromechanical systems (MEMS)-based imaging device that provides full relative movement in the form of translational and rotational movement (e.g., six degrees of freedom (6DoF)) between the optical element and the sensing element. The 6DoF movement can be applied to the optical element, the sensing element, or both the optical element and the sensing element. The 6DoF movement is accomplished with a set of individually controllable MEMS actuators. This technical solution provided by this 6DoF configuration can provide greatly enhanced performance compared to existing imaging devices. For instance, the technical solution can provide higher resolution images than can be obtained with a fixed lens and sensor of a given resolution. This aspect is described in more detail below. Note that the present concepts can provide 6DoF, however, some implementations may provide desired performance with less degrees of freedom. The present concepts are equally applicable to those implementations. [0012] Introductory FIG. 1 shows a device 102 in the form of a smart phone 104 that includes an example 6DoF imaging device 106 in the form of a camera 108. The 6DoF imaging device 106 includes a fixed area 110 and a moveable area 112 separated by a 6DoF actuator assembly 114. The 6DoF actuator assembly 114 includes six or more individually controllable actuators 116. In this case, a sensing element or sensor 118 occupies some or all of the moveable area 112. As discussed below relative to