EP-4736602-A1 - BARRIER ENCAPSULATION FOR ORGANIC LIGHT-EMITTING DIODES

Abstract

Sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display, such as an organic light-emitting diode (OLED) display, are provided. In one example, a sub-pixel includes a substrate, adjacent overhang structures, an anode, an OLED material, a cathode, an encapsulation layer stack. The encapsulation layer stack includes a first layer, a second layer disposed over the first layer, and a third layer. The first layer and the second layer have a first portion disposed over the cathode, a second portion disposed over a sidewall of each overhang structure, and a third portion disposed under an underside surface of an extension of each overhang structure. A gap is defined by contact of the first portion of the second layer and the third portion of the second layer. The third layer is disposed over the second layer outside of the gap.

Inventors

• WU, Zongkai
• ZHAO, Lai
• CHOI, SOO YOUNG
• CHEN, PEI-CHIA
• WU, Wen-hao
• LEE, JUNGMIN
• CHEN, CHUNG-CHIA
• LIN, YU-HSIN
• CHEN, KEVIN
• LI, WENHUI
• WANG, YU-MIN

Assignees

• Applied Materials, Inc.

Dates

Publication Date

20260506

Application Date

20240228

Claims (20)

1. 1. A sub-pixel, comprising: a substrate; adjacent overhang structures defining the sub-pixel; an anode; an organic light-emitting diode (OLED) material disposed over the anode; a cathode disposed over the OLED material; and an encapsulation layer stack, the encapsulation layer stack having a first layer, a second layer disposed over the first layer, and a third layer, wherein: the first layer and the second layer have a first portion disposed over the cathode, a second portion disposed over a sidewall of each overhang structure, and a third portion disposed under an underside surface of an extension of each overhang structure; a gap is defined by contact of the first portion of the second layer and the third portion of the second layer; and the third layer is disposed over the second layer outside of the gap.
2. 2. The sub-pixel of claim 1 , wherein the first layer comprises a silicon nitride (SisN4) material, a silicon oxynitride (Si 2 N 2 O) material, or a combination thereof.
3. 3. The sub-pixel of claim 1 , wherein the second layer comprises a hexamethyldisiloxane (HMDSO) material.
4. 4. The sub-pixel of claim 1 , wherein the third layer comprises a silicon nitride (SisN4) material, a silicon oxynitride (Si 2 N 2 O) material, or a combination thereof.
5. 5. The sub-pixel of claim 1 , wherein the OLED material is further disposed under the overhang structures.
6. 6. The sub-pixel of claim 1 , wherein one of the overhang structures comprises a first structure and a second structure on the first structure, wherein the second structure has an extension extending laterally past the first structure.
7. 7. The sub-pixel of claim 6, wherein the first structure comprises an inorganic material or a metal-containing material.
8. 8. The sub-pixel of claim 6, wherein the second structure comprises an inorganic material, a non-conductive material, or a metal-containing material.
9. 9. A device, comprising: a substrate; and overhang structures defining a plurality of sub-pixels, each sub-pixel comprising: an anode; an organic light-emitting diode (OLED) material disposed over the anode; a cathode disposed over the OLED material; and an encapsulation layer stack, the encapsulation layer stack having a first layer, a second layer disposed over the first layer, and a third layer, wherein: the first layer and the second layer have a first portion disposed over the cathode, a second portion disposed over a sidewall of each overhang structure, and a third portion disposed under an underside surface of an extension of each overhang structure; a gap is defined by contact of the first portion of the second layer and the third portion of the second layer; and the third layer is disposed over the second layer outside of the gap.
10. 10. The device of claim 9, wherein the first layer comprises a silicon nitride (SisN4) material, a silicon oxynitride (Si 2 N 2 O) material, or a combination thereof.
11. 11. The device of claim 9, wherein the second layer comprises a hexamethyldisiloxane (HMDSO) material.
12. 12. The device of claim 9, wherein the third layer comprises a silicon nitride (SisN4) material, a silicon oxynitride (Si 2 N 2 O) material, or a combination thereof.
13. 13. The device of claim 9, wherein one of the overhang structures comprises a first structure and a second structure on the first structure, wherein the second structure has an extension extending laterally past the first structure.
14. 14. The device of claim 9, wherein the OLED material is further disposed under the overhang structures.
15. 15. The device of claim 9, further comprising one or more pixel-defining layer (PDL) structures disposed over the substrate, wherein the PDL structures define sub-pixels of the device.
16. 16. The device of claim 9, further comprising one or more anode separation structures disposed over the substrate, wherein the anode separation structures define the anode.
17. 17. A method of forming a sub-pixel circuit, the method comprising: depositing, using a plasma-enhanced chemical vapor deposition (PECVD) process, a first layer of a first material over a first organic light-emitting diode (OLED) material of the sub-pixel circuit; depositing a second layer of a second material over the first layer; depositing a resist material over the sub-pixel circuit; patterning and removing a portion of the resist material; removing a first portion of the first layer and a first portion of the second layer exposed by the resist material in a well of a sub-pixel of the sub-pixel circuit; depositing a second OLED material in the well; depositing, using the PECVD process, a third layer of the first material over the second OLED material in the well; depositing a fourth layer of the second material over the third layer; and depositing a fifth layer of a third material over a second portion of the first layer and over a second portion of the second layer.
18. 18. The method of claim 17, wherein the sub-pixel is a first sub-pixel and the subpixel circuit further comprises a second sub-pixel, and the method further comprising: depositing the first OLED material in the well of the first sub-pixel and in a second well of the second sub-pixel prior to depositing the first layer of the first material; removing a first portion of the first OLED material exposed by the resist material from the second well subsequent to patterning the resist material and prior to depositing the third layer of the third material; and depositing a second OLED material in the second well subsequent to removing the first portion of the first OLED material and prior to depositing the third layer of the third material.
19. 19. The method of claim 18, wherein the sub-pixel circuit further comprises a third sub-pixel, and the method further comprising: depositing the first OLED material in a third well of the third sub-pixel prior to depositing the first layer of the first material; removing a third portion of the first OLED material exposed by the resist material from the third well subsequent to patterning the resist material and prior to depositing the third layer of the third material; depositing another resist material over the sub-pixel circuit subsequent to removing the third portion of the first OLED material; patterning the other resist material prior to depositing the third layer of the third material; removing a first portion of the second OLED material exposed by the resist material from the third well subsequent to patterning the other resist material and prior to depositing the third layer of the third material; and depositing a third OLED material in the third well subsequent to removing the first portion of the second OLED material and prior to depositing the third layer of the third material.
20. 20. The method of claim 17, wherein: the first material comprises a silicon nitride (SisN4) material, a silicon oxynitride (Si 2 N 2 O) material, or a combination thereof; the second material comprises a hexamethyldisiloxane (HMDSO) material; and the third material comprises the Si3N4 material, the Si 2 N 2 O material, or the combination thereof.

Description

BARRIER ENCAPSULATION FOR ORGANIC LIGHT-EMITTING DIODES BACKGROUND Field [0001] Embodiments described herein generally relate to a display. More specifically, embodiments described herein relate to sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic lightemitting diode (OLED) display. Description of the Related Art [0002] Input devices including display devices may be used in a variety of electronic systems. An organic light-emitting diode (OLED) is a light-emitting diode (LED) in which the emissive electroluminescent layer is a film of an organic compound that emits light in response to an electric current. OLED devices are classified as bottom emission devices if light emitted passes through the transparent or semitransparent bottom electrode and substrate on which the panel was manufactured. OLED devices are classified as top emission devices if light emitted passes through a lid that is added following the fabrication of the device. OLEDs are used to create display devices in many electronics today. It is desirable for display devices to shrink in size while providing higher resolution. [0003] OLED pixel patterning is currently based on a process that restricts panel size, pixel resolution, and substrate size. Rather than utilizing a fine metal mask, it may be desirable for photolithography to be used to pattern pixels. Currently, OLED pixel patterning requires lifting off organic material after the patterning process. When lifted off, the organic material may leave behind particles that can disrupt OLED performance. Accordingly, what is needed in the art are sub-pixel circuits and methods of forming sub-pixel circuits that may be utilized in a display such as an organic OLED display. SUMMARY [0004] In an embodiment, a sub-pixel is provided. The sub-pixel includes a substrate, adjacent overhang structures, an anode, an organic light-emitting diode (OLED) material, a cathode disposed over the OLED material, and an encapsulation layer stack. The adjacent overhang structures define the sub-pixel. The OLED material is disposed over the anode. The cathode is disposed over the OLED material. The encapsulation layer stack has a first layer, a second layer disposed over the first layer, and a third layer. The first layer and the second layer have a first portion disposed over the cathode, a second portion disposed over a sidewall of each overhang structure, and a third portion disposed under an underside surface of an extension of each overhang structure. A gap is defined by contact of the first portion of the second layer and the third portion of the second layer. The third layer is disposed over the second layer outside of the gap. [0005] In an embodiment, a device is provided. The device includes a substrate, adjacent overhang structures, an anode, an organic light-emitting diode (OLED) material, a cathode, and an encapsulation layer stack. The OLED material is disposed over the anode. The cathode is disposed over the OLED material. The encapsulation layer stack has a first layer, a second layer disposed over the first layer, and a third layer. The first layer and the second layer have a first portion disposed over the cathode, a second portion disposed over a sidewall of each overhang structure, and a third portion disposed under an underside surface of an extension of each overhang structure. A gap is defined by contact of the first portion of the second layer and the third portion of the second layer. The third layer is disposed over the second layer outside of the gap. [0006] In an embodiment, a method of forming a sub-pixel circuit is provided. The method includes depositing a first layer of a first material over a first organic lightemitting diode (OLED) material of the sub-pixel circuit, depositing a second layer of a second material over the first layer, depositing a resist material over the sub-pixel circuit, patterning and removing a portion of the resist material, removing a first portion of the first layer and a first portion of the second layer exposed by the resist material in a well of a sub-pixel of the sub-pixel circuit, depositing a second OLED material in the well, depositing a third layer of the first material over the second OLED material in the well, depositing a fourth layer of the second material over the third layer, and depositing a fifth layer of a third material over a second portion of the first layer and over a second portion of the second layer. The first layer and the third layer of the first material may be deposited using a plasma-enhanced chemical vapor deposition (PECVD) process. BRIEF DESCRIPTION OF THE DRAWINGS [0007] So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments, some of which are illustrated in the appended drawings. It is to be