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EP-4737036-A1 - THREE-DIMENSIONAL ADDITIVE MANUFACTURING SYSTEM, CONTROL METHOD THEREFOR, AND CONTROL PROGRAM THEREFOR

EP4737036A1EP 4737036 A1EP4737036 A1EP 4737036A1EP-4737036-A1

Abstract

This invention provides a three-dimensional additive manufacturing system that performs, in three-dimensional additive manufacturing, additive manufacturing using a forming beam in a vacuum to perform forming control according to a molten state of a formed surface, including a thermoelectron detector that detects an amount of thermoelectrons radiated from the formed surface irradiated with the forming beam, and a controller that controls an operation of the forming beam in accordance with the amount of thermoelectrons, a control method thereof, and a control program.

Inventors

  • KITAMURA SHINICHI
  • TSUTAGAWA Nari
  • AOYAGI KENTA

Assignees

  • JEOL Ltd.

Dates

Publication Date
20260506
Application Date
20240328

Claims (10)

  1. A three-dimensional additive manufacturing system that performs additive manufacturing using a forming beam in a vacuum, comprising: a thermoelectron detector that detects an amount of thermoelectrons radiated from a formed surface irradiated with the forming beam; and a controller that controls an operation of the forming beam in accordance with the amount of thermoelectrons.
  2. The three-dimensional additive manufacturing system according to claim 1, wherein said controller moves an irradiation position at a timing at which the amount of thermoelectrons at the irradiation position of the forming beam on the formed surface reaches a predetermined value.
  3. The three-dimensional additive manufacturing system according to claim 1, wherein said controller moves an irradiation position at such a speed that does not make the amount of thermoelectrons at the irradiation position of the electron beam or laser on the formed surface reach a predetermined value.
  4. The three-dimensional additive manufacturing system according to claim 1, further comprising an estimator that estimates, by a simulation, the amount of thermoelectrons radiated from the formed surface during forming, wherein said controller controls the operation of the forming beam in accordance with the estimated amount of thermoelectrons.
  5. The three-dimensional additive manufacturing system according to claim 1, further comprising an estimator that estimates, by a simulation, the amount of thermoelectrons radiated from the formed surface during forming, wherein said controller moves an irradiation position at a timing at which the amount of thermoelectrons at the irradiation position of the forming beam on the formed surface reaches a predetermined value while controlling the operation of the forming beam in accordance with the estimated amount of thermoelectrons.
  6. The three-dimensional additive manufacturing system according to claim 1, further comprising an estimator that estimates, by a simulation, the amount of thermoelectrons radiated from the formed surface during forming, wherein said controller moves an irradiation position at such a speed that does not make the amount of thermoelectrons at the irradiation position of the forming beam on the formed surface reach a predetermined value while controlling the operation of the electron beam or laser in accordance with the estimated amount of thermoelectrons.
  7. The three-dimensional additive manufacturing system according to claim 1, wherein said thermoelectron detector comprises: a positively charged metal plate; and a current detector that detects a current output from the metal plate.
  8. The three-dimensional additive manufacturing system according to claim 7, wherein said metal plate is supported on a forming table by an insulating member and arranged at a position close to the formed surface, and said insulating member is arranged at a position apart from the formed surface.
  9. A control method of a three-dimensional additive manufacturing system that performs additive manufacturing using a forming beam in a vacuum, comprising: detecting an amount of thermoelectrons radiated from a formed surface irradiated with the forming beam; and controlling an operation of the forming beam in accordance with the amount of thermoelectrons.
  10. A control program of a three-dimensional additive manufacturing system that performs additive manufacturing using a forming beam in a vacuum, for causing a computer to execute a method, comprising: detecting an amount of thermoelectrons radiated from a formed surface irradiated with the forming beam; and controlling an operation of the forming beam in accordance with the amount of thermoelectrons.

Description

TECHNICAL FIELD The present invention relates to a three-dimensional additive manufacturing system, a control method thereof, and a control program. BACKGROUND ART In the above technical field, patent literature 1 discloses a technique in which an antideposition cover configured to prevent a metal vapor generated from a molten portion at the time of forming or a metal sputter caused by fireworks from being vapor-deposited on the inner wall of a vacuum container captures thermoelectrons emitted from a formed surface, and the thermoelectrons are detected as a current by a voltage superimposed current amplifier, thereby calculating a formed surface temperature. CITATION LIST PATENT LITERATURE Patent literature 1: Japanese Patent Laid-Open No. 2022-050034 SUMMARY OF THE INVENTION TECHNICAL PROBLEM However, in the technique described in the above literature, it is impossible to perform forming control according to the molten state of the whole formed surface. The present invention enables to provide a technique of solving the above-described problem. SOLUTION TO PROBLEM One example aspect of the present invention provides a three-dimensional additive manufacturing system that performs additive manufacturing using an electron beam or laser for forming in a vacuum, comprising: a thermoelectron detector that detects an amount of thermoelectrons radiated from a formed surface irradiated with the electron beam or laser; anda controller that controls an operation of the electron beam or laser in accordance with the amount of thermoelectrons. Another example aspect of the present invention provides a control method of a three-dimensional additive manufacturing system that performs additive manufacturing using a forming beam in a vacuum, comprising: detecting an amount of thermoelectrons radiated from a formed surface irradiated with the forming beam; andcontrolling an operation of the forming beam in accordance with the amount of thermoelectrons. Still other example aspect of the present invention provides a control program of a three-dimensional additive manufacturing system that performs additive manufacturing using a forming beam in a vacuum, for causing a computer to execute a method, comprising: detecting an amount of thermoelectrons radiated from a formed surface irradiated with the forming beam; andcontrolling an operation of the forming beam in accordance with the amount of thermoelectrons. ADVANTAGEOUS EFFECTS OF INVENTION According to the present invention, it is possible to perform forming control according to the molten state of a whole formed surface. BRIEF DESCRIPTION OF DRAWINGS Fig. 1 is a block diagram showing the configuration of a three-dimensional additive manufacturing system according to the first example embodiment;Fig. 2 is a block diagram showing the configuration of a three-dimensional additive manufacturing system according to the second example embodiment;Fig. 3 is a graph showing the relationship between a melting temperature and a thermoelectron amount at an irradiation position according to the second example embodiment;Fig. 4 is a flowchart showing the processing procedure of the three-dimensional additive manufacturing system according to the second example embodiment;Fig. 5 is a view showing the configuration of a conversion table according to the second example embodiment;Fig. 6 is a view for explaining the outline of a three-dimensional additive manufacturing system according to the third example embodiment;Fig. 7 is a block diagram showing the configuration of a three-dimensional additive manufacturing apparatus according to the third example embodiment;Fig. 8 is a block diagram showing the configuration of a three-dimensional additive manufacturing apparatus according to the fourth example embodiment; andFig. 9 is a block diagram showing the configuration of a three-dimensional additive manufacturing apparatus according to the fifth example embodiment. DESCRIPTION OF EXAMPLE EMBODIMENTS Example embodiments of the present invention will now be described in detail with reference to the drawings. It should be noted that the relative arrangement of the components, the numerical expressions and numerical values set forth in these example embodiments do not limit the scope of the present invention unless it is specifically stated otherwise. [First Example Embodiment] A three-dimensional additive manufacturing system 100 according to the first example embodiment of the present invention will be described with reference to Fig. 1. The three-dimensional additive manufacturing system 100 is a system that performs additive manufacturing using a forming beam in a vacuum. As shown in Fig. 1, the three-dimensional additive manufacturing system 100 includes a thermoelectron detector 101 and a controller 102. The thermoelectron detector 101 detects the amount of thermoelectrons 113 emitted from a formed surface 112 when the formed surface 112 is irradiated with a forming beam 111 (an electron beam