EP-4737734-A1 - VACUUM PUMP AND HERMETIC CONNECTOR

Abstract

An object is to limit the manufacturing cost of a hermetic connector and achieve compactness and high performance. A vacuum pump (100) includes a hermetic connector (10), and the hermetic connector (10) includes pins (11, 12) configured to be electrically connected, a connector base portion (13) surrounding the pins (11, 12), and a sealing portion (14) providing a seal between the pins (11, 12) and the connector base portion (13). The sealing portion (14) is made of an insulating resin material.

Inventors

• TAKEDA, SHUNSUKE
• SUN, YANBIN
• SAKAGUCHI, YOSHIYUKI

Assignees

• Edwards Japan Limited

Dates

Publication Date

20260506

Application Date

20240624

Claims (6)

1. A vacuum pump comprising a hermetic connector, wherein the hermetic connector includes: a pin configured to be electrically connected; a connector base portion surrounding the pin; and a sealing portion providing a seal between the pin and the connector base portion, and the sealing portion is made of an insulating resin material.
2. The vacuum pump according to claim 1, wherein the sealing portion includes: a first sealing portion covering an outer surface of the pin; and a second sealing portion providing a seal between the first sealing portion and the connector base portion, the connector base portion is made of a metal material, the first sealing portion is made of a first resin material, and the second sealing portion is made of a second resin material.
3. The vacuum pump according to claim 2, wherein a linear expansion coefficient of the first resin material is greater than or equal to a linear expansion coefficient of the second resin material.
4. The vacuum pump according to claim 1, wherein the hermetic connector further includes a labyrinth structure that is disposed between the pin and the sealing portion to limit passage of gas.
5. The vacuum pump according to claim 4, wherein the labyrinth structure includes a projection and/or a recess disposed at an outer surface of the pin.
6. A hermetic connector to be used for a vacuum pump, the hermetic connector comprising: a pin configured to be electrically connected; a connector base portion surrounding the pin; and a sealing portion providing a seal between the pin and the connector base portion, wherein the sealing portion is made of an insulating resin material.

Description

[Technical Field] The present invention relates to a vacuum pump and a hermetic connector used for a vacuum pump. [Background Art] As conventional art in this technical field, a vacuum pump described in PTL 1 includes a laterally elongate hermetic connector. A hermetic connector applied to a vacuum pump needs to have high airtightness and high heat resistance. To this end, a glass material is typically used to provide a seal between the connector base portion and the pins of a hermetic connector. [Citation List] [Patent Literature] [PTL 1] Japanese Patent No. 6912196 [Summary of Invention] [Technical Problem] The manufacturing of the conventional hermetic connector described above involves the issue of increased cost because the step of sealing with a glass material is specialized. A hermetic connector used for a vacuum pump needs to be compact, have a large number of pins, and have a high level of leak rate performance. In particular, when used for a vacuum pump, any entry of the air into the interior through the hermetic connector would degrade the pump performance. Thus, there is a demand for manufacturing a compact, high-performance hermetic connector having a predetermined leak rate performance at a low cost. In view of the above, it is an object of the present invention to limit the manufacturing cost of a hermetic connector and achieve compactness and high performance. [Solution to Problem] To achieve the above object, a first aspect of the present invention relates to a vacuum pump including a hermetic connector, wherein the hermetic connector includes: a pin configured to be electrically connected; a connector base portion surrounding the pin; and a sealing portion providing a seal between the pin and the connector base portion, and the sealing portion is made of an insulating resin material. In the above configuration, the sealing portion includes: a first sealing portion covering an outer surface of the pin; and a second sealing portion providing a seal between the first sealing portion and the connector base portion, the connector base portion is made of a metal material, the first sealing portion is made of a first resin material, and the second sealing portion is made of a second resin material. In the above configuration, a linear expansion coefficient of the first resin material is greater than or equal to a linear expansion coefficient of the second resin material. In the above configuration, the hermetic connector further includes a labyrinth structure that is disposed between the pin and the sealing portion to limit passage of gas. In the above configuration, the labyrinth structure includes a projection and/or a recess disposed at an outer surface of the pin. To achieve the above object, a second aspect of the present invention relates to a hermetic connector to be used for a vacuum pump, the hermetic connector including: a pin configured to be electrically connected; a connector base portion surrounding the pin; and a sealing portion providing a seal between the pin and the connector base portion, and the sealing portion is made of an insulating resin material. [Advantageous Effects of Invention] According to the present invention, it is possible to limit the manufacturing cost of a hermetic connector and achieve compactness and high performance. Problems to be solved, configurations, and advantageous effects other than those described above will be recognized by the following description of embodiments. [Brief Description of Drawings] [Fig. 1] Fig. 1 is a vertical cross-sectional view of a turbomolecular pump according to an embodiment of the present invention.[Fig. 2] Fig. 2 is a circuit diagram of an amplifier circuit of the turbomolecular pump shown in Fig. 1.[Fig. 3] Fig. 3 is a time chart showing control of an amplifier control circuit performed when a current command value is greater than a detected value.[Fig. 4] Fig. 4 is a time chart showing control of an amplifier control circuit performed when a current command value is less than a detected value.[Fig. 5] Fig. 5(a) is a front view of a hermetic connector according to the embodiment, and Fig. 5(b) is a cross-sectional view taken along line Vb-Vb.[Fig. 6] Fig. 6(a) is a front view of a hermetic connector according to a first modification, and Fig. 6(b) is a cross-sectional view taken along line VIb-VIb.[Fig. 7] Fig. 7(a) is a vertical cross-sectional view of a hermetic connector according to a second modification, and Fig. 7(b) is an enlarged view of part A.[Fig. 8] Figs. 8(a) to 8(c) are diagrams showing variations of a labyrinth structure. [Description of Embodiments] Referring to the drawings, a vacuum pump according to the present invention is now described using a turbomolecular pump as an example. Fig. 1 is a longitudinal cross-sectional view of the turbomolecular pump 100. As shown in Fig. 1, the turbomolecular pump 100 has a circular outer cylinder 127, which is a casing, having an inlet port 101 at its upper end. A ro