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EP-4738424-A1 - WORK ASSISTANCE METHOD AND WORK ASSISTANCE SYSTEM

EP4738424A1EP 4738424 A1EP4738424 A1EP 4738424A1EP-4738424-A1

Abstract

Information regarding an apparatus state of a substrate processing apparatus is collected, and whether an operation with respect to a portion in the apparatus is possible is determined based on the state information. When it is dangerous to perform an operation with respect to the portion, it is determined that the portion cannot be operated. A display unit of smart glasses performs coloring display based on the determination result with respect to a portion (visually recognizable portion) that can be seen by the operator among the determined portions. On the other hand, coloring display is not performed with respect to the portion that cannot be seen by the operator. The operator can easily and clearly recognize whether the portion to be worked can be operated regardless of the situation of the portion that cannot be seen.

Inventors

  • SHIMIZU SHINJI
  • TAKAHASHI MITSUKAZU

Assignees

  • SCREEN Holdings Co., Ltd.

Dates

Publication Date
20260506
Application Date
20240604

Claims (12)

  1. A work assistance method used when predetermined work is performed on industrial equipment, the work assistance method comprising: an information acquisition step of collecting state information regarding an apparatus state of said industrial equipment; a determination step of determining whether operation with respect to a visually recognizable portion of said industrial equipment is possible based on said state information; and a display step of performing annotation display with respect to said visually recognizable portion based on a determination result in said determination step with a mobile terminal including a display unit and a communication unit.
  2. The work assistance method according to claim 1, wherein in said display step, said mobile terminal performs coloring display in a first display color with respect to said visually recognizable portion determined to be inoperable in said determination step.
  3. The work assistance method according to claim 2, wherein in said display step, said mobile terminal performs coloring display in a second display color with respect to said visually recognizable portion determined to be operable in said determination step.
  4. The work assistance method according to claim 3, wherein said industrial equipment is a substrate processing apparatus that performs predetermined processing on a substrate, a processing chamber included in said substrate processing apparatus is provided with an inner cover and an outer cover, and in said display step, when an inside of said processing chamber is in a dangerous state, coloring display is performed in said second display color with respect to said outer cover when said inner cover and said outer cover are closed, and coloring display is performed in said first display color with respect to said inner cover when said outer cover is opened.
  5. The work assistance method according to claim 4, wherein said substrate processing apparatus is a substrate cleaning apparatus that uses a processing gas and a processing liquid in said processing chamber.
  6. The work assistance method according to any one of claims 1 to 5, wherein said mobile terminal is smart glasses.
  7. A work assistance system used when predetermined work is performed on industrial equipment, the work assistance system comprising: a mobile terminal including a display unit and a communication unit; and a determination unit that determines whether an operation with respect to a visually recognizable portion of said industrial equipment is possible based on state information regarding an apparatus state of said industrial equipment, wherein said display unit performs annotation display with respect to said visually recognizable portion based on a determination result determined by said determination unit.
  8. The work assistance system according to claim 7, wherein said display unit performs coloring display in a first display color with respect to said visually recognizable portion determined to be inoperable by said determination unit.
  9. The work assistance system according to claim 8, wherein said display unit performs coloring display in a second display color with respect to said visually recognizable portion determined to be operable by said determination unit.
  10. The work assistance system according to claim 9, wherein said industrial equipment is a substrate processing apparatus that performs predetermined processing on a substrate, a processing chamber included in said substrate processing apparatus is provided with an inner cover and an outer cover, and when an inside of said processing chamber is in a dangerous state, said display unit performs coloring display in said second display color with respect to said outer cover when said inner cover and said outer cover are closed, and performs coloring display in said first display color with respect to said inner cover when said outer cover is opened.
  11. The work assistance system according to claim 10, wherein said substrate processing apparatus is a substrate cleaning apparatus that uses a processing gas and a processing liquid in said processing chamber.
  12. The work assistance system according to any one of claims 7 to 11, wherein said mobile terminal is smart glasses.

Description

TECHNICAL FIELD The present invention relates to a work assistance method and a work assistance system used when predetermined work such as maintenance work is performed on industrial equipment such as a substrate processing apparatus that performs predetermined processing on a substrate. Substrates to be processed by the substrate processing apparatus include, for example, a semiconductor substrate, a substrate for a liquid crystal display apparatus, a substrate for a flat panel display (FPD), a substrate for an optical disk, a substrate for a magnetic disk, or a substrate for a solar cell. BACKGROUND ART Conventionally, in a semiconductor device manufacturing process, a substrate processing apparatus that performs various types of processing on a substrate such as a semiconductor substrate is used. As the substrate processing apparatus, for example, a substrate cleaning apparatus, a heat treatment apparatus, an inspection apparatus, and the like are used. Typically, a large number of substrate processing apparatuses are disposed orderly in a wide clean room in many cases. Maintenance is performed on these substrate processing apparatuses at an appropriate timing. Patent Document 1 describes that a large number of substrate processing apparatuses are arranged at a relatively high density in a clean room and maintenance of the substrate processing apparatuses is performed. PRIOR ART DOCUMENT PATENT DOCUMENT Patent Document 1: Japanese Patent Application Laid-Open No. 2020-4866 SUMMARY PROBLEM TO BE SOLVED BY THE INVENTION When maintenance of the substrate processing apparatus is performed, an operator may open a cover of a chamber or perform construction on a pipe. However, the inside of the chamber may be in a dangerous state. For example, when the inside of the chamber is purged with nitrogen gas, the inside of the chamber is in a dangerous state in which oxygen is hardly present. In addition, immediately after a chemical liquid such as hydrofluoric acid is used, there is a possibility that the chamber is filled with vapor of the chemical liquid, or droplets of the chemical liquid are attached. Further, the residual pressure in the pipe routed to the chamber may be high. When the inside of the chamber is in a dangerous state as described above, the operator opening the cover may lead to an accident. Thus, when the inside of the chamber is in a dangerous state, the cover should not be opened. However, the dangerous state as described above is not visible to human eyes, and it is difficult for the operator to determine whether to open the cover. The present invention has been made in view of the above-described problem, and an object of the present invention is to provide a work assistance method and a work assistance system that allow an operator to easily recognize whether a portion to be worked can be operated. MEANS TO SOLVE THE PROBLEM To solve the above-described problem, a first aspect of the present invention is a work assistance method used when predetermined work is performed on industrial equipment, the work assistance method including an information acquisition step of collecting state information regarding an apparatus state of the industrial equipment, a determination step of determining whether operation with respect to a visually recognizable portion of the industrial equipment is possible based on the state information, and a display step of performing annotation display with respect to the visually recognizable portion based on a determination result in the determination step with a mobile terminal including a display unit and a communication unit. In a second aspect, in the work assistance method according to the first aspect, in the display step, the mobile terminal performs coloring display in a first display color with respect to the visually recognizable portion determined to be inoperable in the determination step. In a third aspect, in the work assistance method according to the second aspect, in the display step, the mobile terminal performs coloring display in a second display color with respect to the visually recognizable portion determined to be operable in the determination step. In a fourth aspect, in the work assistance method according to the third aspect, the industrial equipment is a substrate processing apparatus that performs predetermined processing on a substrate, a processing chamber included in the substrate processing apparatus is provided with an inner cover and an outer cover, and in the display step, when an inside of the processing chamber is in a dangerous state, coloring display is performed in the second display color with respect to the outer cover when the inner cover and the outer cover are closed, and coloring display is performed in the first display color with respect to the inner cover when the outer cover is opened. In a fifth aspect, in the work assistance method according to the fourth aspect, the substrate processing apparatus is a substrate clean