EP-4738425-A1 - WORK ASSISTANCE METHOD AND WORK ASSISTANCE SYSTEM

EP4738425A1EP 4738425 A1EP4738425 A1EP 4738425A1EP-4738425-A1

Abstract

Information on an apparatus condition of a substrate processing apparatus is collected, and a determination as to whether a target region in the substrate processing apparatus is dangerous is made based on the condition information. Smart glasses display a color in a manner superimposed over a space including the target region determined to be dangerous. The smart glasses display a color on the space including the target region, using a display color corresponding to the danger level to which the target region corresponds. When the danger level drops, as a result of a measure taken by a worker, the display color is updated. Because the smart glasses visualize the danger not directly perceivable with human eyes by coloring, the worker can reliably recognize an invisible dangerous condition.

Inventors

SHIMIZU SHINJI

Assignees

SCREEN Holdings Co., Ltd.

Dates

Publication Date: 20260506
Application Date: 20240604

Claims (20)

A work assistance method for predetermined work to be carried out on industrial equipment, the work assistance method comprising: an information acquisition step of collecting condition information related to an apparatus condition of the industrial equipment; a determination step of determining whether a target region of the industrial equipment is dangerous based on the condition information; and a display step of causing a mobile terminal including a display unit and a communication unit to display an annotation on the target region determined to be dangerous in the determination step.
The work assistance method according to claim 1, wherein, in the display step, the mobile terminal is caused to display a color in a manner superimposed over a space including the target region.
The work assistance method according to claim 2, wherein the determination step includes determining which of a plurality of danger levels the target region corresponds to, and the display step includes displaying a display color corresponding to a danger level to which the target region corresponds, on the space including the target region.
The work assistance method according to claim 3, wherein, when the danger level of the target region changes, as a result of an operation performed on the target region, the display color is changed in accordance with a danger level after change.
The work assistance method according to claim 1, further comprising a registration step of registering a pertinent region with a chance of occurrence of a danger, in association with each type of work to be performed on the industrial equipment, wherein the determination step includes determining, when a work type is input from the mobile terminal, whether the pertinent region registered in association with the work type is dangerous, and the display step includes displaying an annotation on the pertinent region determined to be dangerous.
The work assistance method according to claim 5, wherein the display step includes displaying a first display color on the space including the pertinent region determined to be dangerous, and displaying a second display color on the space including the pertinent region determined not to be dangerous.
The work assistance method according to claim 6, wherein, when the pertinent region determined to be dangerous becomes no longer dangerous, as a result of an operation performed on the pertinent region, the color displayed on the space including the pertinent region is changed from the first display color to the second display color.
The work assistance method according to any one of claims 1 to 7, wherein the industrial equipment is a substrate processing apparatus that performs a predetermined process on a substrate.
The work assistance method according to claim 8, wherein the substrate processing apparatus is a substrate cleaning apparatus that uses a treatment gas and a treatment liquid.
The work assistance method according to any one of claims 1 to 7, wherein the mobile terminal is a pair of smart glasses.
A work assistance system for predetermined work to be carried out on industrial equipment, the work assistance system comprising: a mobile terminal including a display unit and a communication unit; and a determination unit that determines whether a target region in the industrial equipment is dangerous based on condition information related to an apparatus condition of the industrial equipment, wherein the display unit displays an annotation on the target region determined to be dangerous by the determination unit.
The work assistance system according to claim 11, wherein the display unit displays a color in a manner superimposed over a space including the target region.
The work assistance system according to claim 12, wherein the determination unit determines which of a plurality of danger levels the target region corresponds to, and the display unit displays a display color corresponding to the danger level to which the target region corresponds, on the space including the target region.
The work assistance system according to claim 13, wherein, when the danger level of the target region changes as a result of an operation performed on the target region, the display unit changes the display color in accordance with the danger level after change.
The work assistance system according to claim 11, further comprising a storage unit that stores a table in which a pertinent region with a chance of occurrence of a danger is registered, in association with each type of work on the industrial equipment, wherein when a work type is input from the mobile terminal, the determination unit determines whether the pertinent region registered in association with the work type is dangerous, and the display unit displays an annotation on the pertinent region determined to be dangerous.
The work assistance system according to claim 15, wherein the display unit displays a first display color on a space including the pertinent region determined to be dangerous, and displays a second display color on a space including the pertinent region determined not to be dangerous.
The work assistance system according to claim 16, wherein, when the pertinent region becomes no longer dangerous as a result of an operation performed on the pertinent region determined to be dangerous, the display unit changes the color of the space including the pertinent region from the first display color to the second display color.
The work assistance system according to any one of claims 11 to 17, wherein the industrial equipment is a substrate processing apparatus that performs a predetermined process on a substrate.
The work assistance system according to claim 18, wherein the substrate processing apparatus is a substrate cleaning apparatus that uses a treatment gas and a treatment liquid.
The work assistance system according to any one of claims 11 to 17, wherein the mobile terminal is a pair of smart glasses.

Description

TECHNICAL FIELD The present invention relates to a work assistance method and a work assistance system at the time when predetermined work, such as maintenance, is performed on industrial equipment such as a substrate processing apparatus that performs a predetermined process on a substrate. Examples of a substrate to be processed by the substrate processing apparatus include a semiconductor substrate, a substrate for a liquid crystal display, a substrate for a flat panel display (FPD), a substrate for an optical disc, a substrate for a magnetic disk, or a substrate for a solar cell. BACKGROUND ART Conventionally, in a manufacturing process of a semiconductor device, a substrate processing apparatus that performs various types of processing on a substrate such as a semiconductor substrate is used. As a substrate processing apparatus, for example, a substrate cleaning apparatus, a thermal treatment apparatus, and an inspection apparatus are used. Typically, the substrate processing apparatuses are often arranged in a large number, in an orderly manner, in a wide clean room. Maintenance is performed on these substrate processing apparatuses at an appropriate timing. Patent Document 1 describes arranging a large number of substrate processing apparatuses at a relatively high density in a clean room, and performing maintenance of the substrate processing apparatuses. PRIOR ART DOCUMENT PATENT DOCUMENT Patent Document 1: Japanese Patent Application Laid-Open No. 2020-4866 SUMMARY PROBLEM TO BE SOLVED BY THE INVENTION At the time of carrying out maintenance on the substrate processing apparatus, a worker may open the cover of a chamber, or work on a pipe. However, the inside of the chamber may be in a dangerous condition. For example, when the inside of the chamber is purged with nitrogen gas, the inside of the chamber is in a dangerous condition, with almost no oxygen. Furthermore, immediately after the use of a chemical liquid such as hydrofluoric acid, the chamber may be filled with vapor of the chemical liquid, or the chemical liquid may be attached as droplets. Moreover, inside a pipe connected to the chamber, there may be a high residual pressure. Because these dangerous conditions are invisible to human eyes, it is impossible for workers to directly confirm these dangers, visually. If the worker carries out the maintenance work without recognizing the dangerous condition, an accident may occur. The present invention has been made in view of the problem described above, and an object of the present invention is to provide a work assistance method and a work assistance system that enable a worker to recognize invisible dangerous conditions, reliably. MEANS TO SOLVE THE PROBLEM In order to solve the problem described above, a first aspect of the present invention provides a work assistance method for predetermined work to be carried out on industrial equipment, the work assistance method including: an information acquisition step of collecting condition information related to an apparatus condition of the industrial equipment; a determination step of determining whether a target region of the industrial equipment is dangerous based on the condition information; and a display step of causing a mobile terminal including a display unit and a communication unit to display an annotation on the target region determined to be dangerous in the determination step. According to a second aspect, in the work assistance method according to the first aspect, in the display step, the mobile terminal is caused to display a color in a manner superimposed over a space including the target region. According to a third aspect, in the work assistance method according to the second aspect, the determination step includes determining which of a plurality of danger levels the target region corresponds to, and the display step includes displaying a display color corresponding to a danger level to which the target region corresponds, on the space including the target region. According to a fourth aspect, in the work assistance method according to the third aspect, when the danger level of the target region changes, as a result of an operation performed on the target region, the display color is changed in accordance with a danger level after change. According to a fifth aspect, in the work assistance method according to the first aspect, the work assistance method further includes a registration step of registering a pertinent region with a chance of occurrence of a danger, in association with each type of work to be performed on the industrial equipment, in which, the determination step includes determining, when a work type is input from the mobile terminal, whether the pertinent region registered in association with the work type is dangerous, and the display step includes displaying an annotation on the pertinent region determined to be dangerous. According to a sixth aspect, in the work assistance method according to the fifth as