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EP-4742283-A1 - SPIN INDUCTOR

EP4742283A1EP 4742283 A1EP4742283 A1EP 4742283A1EP-4742283-A1

Abstract

This spin inductor includes: a wiring layer; a first ferromagnetic layer which is in contact with a first surface of the wiring layer; and a second ferromagnetic layer which is in contact with a second surface of the wiring layer facing the first surface.

Inventors

  • SASAKI TOMOYUKI
  • SUZUKI EIJI

Assignees

  • TDK Corporation

Dates

Publication Date
20260513
Application Date
20230704

Claims (10)

  1. A spin inductor comprising: a wiring layer; a first ferromagnetic layer which is in contact with a first surface of the wiring layer; and a second ferromagnetic layer which is in contact with a second surface of the wiring layer facing the first surface.
  2. The spin inductor according to claim 1, wherein the magnetization of the first ferromagnetic layer is oriented in an opposite direction to the magnetization of the second ferromagnetic layer.
  3. The spin inductor according to claim 1, further comprising: a third ferromagnetic layer and a magnetic coupling layer, wherein the magnetic coupling layer is between the second ferromagnetic layer and the third ferromagnetic layer.
  4. The spin inductor according to claim 3, wherein the magnetization of the first ferromagnetic layer is oriented in the same direction as the magnetization of the third ferromagnetic layer.
  5. The spin inductor according to claim 3, wherein the third ferromagnetic layer has a film thickness thicker than a film thickness of the second ferromagnetic layer.
  6. The spin inductor according to claim 1, wherein the wiring layer includes a first layer and a second layer.
  7. The spin inductor according to claim 6, wherein a sign of a spin current generated by the first layer is different from a sign of a spin current generated by the second layer.
  8. The spin inductor according to claim 6, wherein the magnetization of the first ferromagnetic layer is oriented in the same direction as the magnetization of the second ferromagnetic layer.
  9. The spin inductor according to claim 1, further comprising: a magnetic shield layer, wherein the magnetic shield layer is separated from the first ferromagnetic layer and the second ferromagnetic layer in a laminating direction.
  10. The spin inductor according to claim 1, wherein the wiring layer is configured to inject spins into the first ferromagnetic layer and the second ferromagnetic layer, and wherein the magnetizations of the first ferromagnetic layer and the second ferromagnetic layer are configured to precess by the injected spins.

Description

[Technical Field] The present disclosure relates to a spin inductor. [Background Art] An inductor, along with a resistor and a capacitor, is a major electronic component and is used in various electronic devices. A coil is an example of the inductor. There is a trade-off relationship between the size of the coil and the magnitude of the inductance, and it is difficult to achieve a large inductance with a small coil. In recent years, attention has been focused on a new type of inductor that does not use coils. A new type of inductor that does not use coils is sometimes called an emergent inductor. For example, Patent Document 1, Non-Patent Document 1, and Non-Patent Document 2 disclose a new inductor that uses spin vibration (hereinafter, referred to as a spin inductor). Since the inductance magnitude of the spin inductor becomes larger as the element size becomes smaller, the inductor is attracting attention because both miniaturization and large inductance magnitude can be achieved. [Citation List] [Patent Document] [Patent Document 1] PCT International Publication No. WO 2022/181069 [Non-Patent Document] [Non-Patent Document 1] Yuta Yamane, Shunsuke Fukami, and Junichi Ieda, Physical Review Letters 128,147201 (202).[Non-Patent Document 2] Yasufumi Arai and Jun'ichi Ieda, Journal of the Physical Society of Japan 92, 074705 (2023). [Summary of Invention] [Technical Problem] There is a demand for small inductors with large inductance. In order to achieve both of these characteristics, there is a demand for an inductor that exhibits large inductance more efficiently. The present disclosure has been made in view of the above circumstances and an object thereof is to provide a spin inductor that efficiently exhibits large inductance. [Solution to Problem] In order to solve the above problems, the present disclosure provides the following means. (1) A spin inductor according to a first aspect includes a wiring layer, a first ferromagnetic layer which is in contact with a first surface of the wiring layer, and a second ferromagnetic layer which is in contact with a second surface of the wiring layer facing the first surface.(2) In the spin inductor according to the above-described aspect, the magnetization of the first ferromagnetic layer may be oriented in the opposite direction to the magnetization of the second ferromagnetic layer.(3) The spin inductor according to the above-described aspect may further include a third ferromagnetic layer and a magnetic coupling layer. The magnetic coupling layer is between the second ferromagnetic layer and the third ferromagnetic layer.(4) In the spin inductor according to the above-described aspect, the magnetization of the first ferromagnetic layer may be oriented in the same direction of the magnetization of the third ferromagnetic layer.(5) In the spin inductor according to the above-described aspect, the film thickness of the third ferromagnetic layer may be thicker than the film thickness of the second ferromagnetic layer.(6) In the spin inductor according to the above-described aspect, the wiring layer may have a laminated structure in which a first layer and a second layer are laminated.(7) In the spin inductor according to the above-described aspect, the sign of the spin current generated in the first layer may be different from the sign of the spin current generated in the second layer.(8) In the spin inductor according to the above-described aspect, the magnetization of the first ferromagnetic layer may be oriented in the same direction as the magnetization of the second ferromagnetic layer.(9) The spin inductor according to the above-described aspect may further include a magnetic shield layer. The magnetic shield layer is separated from the first ferromagnetic layer and the second ferromagnetic layer in the laminating direction.(10) In the spin inductor according to the above-described aspect, the wiring layer may be configured to inject spins into the first ferromagnetic layer and the second ferromagnetic layer, and the magnetizations of the first ferromagnetic layer and the second ferromagnetic layer may be configured to precess by the injected spins. [Brief Description of Drawings] FIG. 1 is a perspective view of a spin inductor according to a first embodiment.FIG. 2 is a cross-sectional view of the spin inductor according to the first embodiment.FIG. 3 is a plan view of the spin inductor according to the first embodiment.FIG. 4 is a schematic view illustrating the function of the spin inductor according to the first embodiment.FIG. 5 is a diagram illustrating a method of manufacturing the spin inductor according to the first embodiment.FIG. 6 is a diagram illustrating a method of manufacturing the spin inductor according to the first embodiment.FIG. 7 is a diagram illustrating a method of manufacturing the spin inductor according to the first embodiment.FIG. 8 is a cross-sectional view of a spin inductor according to a second embodiment.FIG. 9 is a cross-sec