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EP-4742880-A2 - PROTECTION DEVICE, DETECTION SYSTEM AND USE THEREOF

EP4742880A2EP 4742880 A2EP4742880 A2EP 4742880A2EP-4742880-A2

Abstract

According to various embodiments, a protective device comprises: a first housing part (102) and a second housing part (104), which are arranged to be inserted into one another to form a pressurized housing (150) in which a cavity (151) is provided for receiving an optical detection device (202); wherein the first housing part (102) has a transparent light-receiving area (112) which adjoins the cavity (151); a mounting device (110) opposite the light-receiving area (112) for mounting one or more fluid lines to the pressurized housing (150); a first fluid transfer channel (106) and a second fluid transfer channel (116), each of which fluid transfer channel either fluidly couples the cavity (151) to the mounting device or opens into the mounting device.

Inventors

  • HOFMANN, MICHAEL
  • DSAAK, TORSTEN
  • LESSMANN, STEFFEN

Assignees

  • VON ARDENNE Asset GmbH & Co. KG

Dates

Publication Date
20260513
Application Date
20251020

Claims (15)

  1. Protective device comprising: • a first housing part (102) and a second housing part (104) which are arranged to be inserted into one another to form a pressurized housing (150) in which a cavity (151) is provided for receiving an optical detection device (202); • wherein the first housing part (102) has a transparent light-receiving area (112) which adjoins the cavity (151); • a mounting device (110) opposite the light-receiving area (112) for mounting one or more than one fluid line to the overpressure housing (150); • a first fluid transfer channel (106) and a second fluid transfer channel (116), each of which fluid transfer channel couples the cavity (151) to the mounting device in a fluid-conducting manner.
  2. Protective device according to claim 1, wherein the first housing part (102) and the second housing part (104) are tubular or at least each have a tubular section.
  3. Protective device according to one of claims 1 to 2, wherein the mounting device has a hose connection into which the first fluid transfer channel (106) opens and which protrudes from the second housing part (104).
  4. Protective device according to one of claims 1 to 3, wherein the mounting device has an intermediate piece which has a flange and a second sealing device opposite the flange for fluid-tight coupling to the overpressure housing (150), the first and second fluid transfer channels open into the intermediate piece.
  5. Protective device according to one of claims 1 to 4, further comprising: a first sealing device surrounding the light-receiving area (112); and a transparent wall which rests against the first sealing device.
  6. Protective device according to one of claims 1 to 5, wherein the second housing part (104) has a holding device which is configured to hold the detection device (202) in a rotationally secured manner.
  7. Protective device according to one of claims 1 to 6, wherein the second housing part (104) has a recess into which the first fluid transfer channel (106) opens and which provides at least a region of the cavity (151). 7. Protective device according to one of claims 1 to 7, further comprising: a cover flap (122) which is movably mounted so that the light-receiving area (112) is, when the cover flap (122) is brought into a first state, is covered by the cover flap (122), and, when the cover flap is brought into a first state, is exposed.
  8. Protective device according to one of claims 1 to 7, wherein the second housing part (104) is arranged to be inserted into the first housing part (102) along a direction, and wherein the second fluid transfer channel (116) has a larger extent along the direction than the first fluid transfer channel (106).
  9. Protective device according to claim 8, wherein the second fluid transfer channel (116) extends along the direction past a section of the cavity (151) into which the first fluid transfer channel (106) opens.
  10. Protective device according to claim 9, wherein the section of the cavity (151) has an extension along the direction which is greater than a distance between the first fluid transfer channel (106) and the second fluid transfer channel (116).
  11. Protective device according to any one of claims 1 to 10, wherein the first housing part (102) and the second housing part (104) comprise or consist of a metal.
  12. Protective device according to one of claims 1 to 11, wherein the overpressure housing is configured to absorb an overpressure in the cavity of more than 0.5 bar relative to an external pressure to which the overpressure housing is exposed.
  13. Use of the protective device according to any one of claims 1 to 12 in a vacuum.
  14. Recording system, featuring: • the protective device according to any one of claims 1 to 13, • the detection device (202) which is received in the cavity (151), wherein the detection device (202) comprises a camera and/or a fiber optic cable.
  15. Using the detection system according to claim 14 in a vacuum for capturing image information by means of the detection device.

Description

Various embodiments relate to a protective device, a detection system and its use. In general, a substrate can be treated (processed) in a vacuum, for example, coated, so that its chemical and/or physical properties can be modified. Various coating processes can be used to coat a substrate, with physical vapor deposition (PVD) being a well-established example. For instance, a vacuum coating system can be used to deposit one or more layers onto a substrate or multiple substrates using chemical and/or physical vapor deposition. Various areas within a vacuum can be difficult to access and/or exposed to harsh environmental conditions. If such an area needs to be visually monitored, for example, to obtain image data, the camera used often fails, is expensive, requires too much installation space, and/or cannot adequately capture the area. An example of this is the hard-to-reach maintenance valve, for which it may be important to know whether a substrate is present in the substrate transfer opening (also known as the passage slot). This applies analogously to other areas of a machine that are not necessarily exposed to a vacuum. Several embodiments provided herein address this dilemma. According to these embodiments, a protective device, a detection system, and a method for its use are provided, which facilitate optical detection in difficult-to-access areas and/or harsh environmental conditions. For this purpose, reference is made to an area where a vacuum is present, but the description can apply analogously to any other area, such as difficult-to-access areas and/or harsh environmental conditions, for which examples include: a corrosive atmosphere, overpressure, dust (e.g., abrasion), or a coating material from a coating process. According to various embodiments, the protective device has a compact design and requires little space, while also providing protection against harsh environmental conditions. Among other things, this allows an optical detection device to be positioned closer to the area to be detected, for example, in a vacuum and/or during a coating process. This improves access compared to a conventional chamber window located in the wall of a vacuum chamber. Compared to a chamber window, for example, the viewing area and perspective (viewing angle) are increased. Furthermore, the detection device is effectively protected from environmental conditions, meaning it does not necessarily need to be vacuum-compatible, can be cooled more effectively, and can be positioned closer to the source of harmful environmental conditions. In particular, the service life of the detection device is increased and requirements (e.g., for temperature resistance and/or dust tightness) are reduced, making it more cost-effective. The following are various examples that relate to what is described herein and depicted in the figures. Example 1 is configured according to one of the appended claims and/or is a protective device, preferably (e.g. configured as a camera protective device) for an optical (e.g. optoelectronic) component (e.g. a detection device, in particular a camera), comprising: a first housing part and a second housing part, which are configured to be inserted into one another to form a pressurized housing in which a cavity (also referred to as a receiving chamber) is provided for receiving the component (e.g. the detection device); wherein the first housing part has a transparent light receiving area (also referred to as a viewing area) which adjoins the cavity (along a detection direction); a mounting device (also referred to as a fluid mounting device) opposite the light receiving area for mounting (e.g. coupling device for connecting) one or more than one fluid line (e.g. to the pressurized housing); one or more than one fluid transfer channel (e.g. having a first fluid transfer channel, a second fluid transfer channel and/or a third fluid transfer channel), each of which fluid-conductingly couples the cavity to the mounting device (e.g. an opening thereof) or opens into the mounting device. Example 2 (e.g. a protective device) is set up according to Example 1, wherein the first housing part and/or the second housing part are tubular and/or penetrated by a through-opening. Example 3 (e.g. a protective device) is set up according to Example 1 or 2, wherein the second housing part is set up to be inserted into the first housing part (e.g. a through-opening thereof), e.g. towards the light-receiving area. Example 4 (e.g. a protective device) is set up according to one of Examples 1 to 3, a first sealing device which surrounds and/or seals the light-receiving area. Example 5 (e.g. a protective device) is set up according to one of Examples 1 to 4, wherein the mounting device has a hose connection (e.g. hose nozzle) into which the first fluid transfer channel opens (or which provides at least a section of the first fluid transfer channel) and/or which protrudes from the second housing part. Example 6 (e.g., a