HIGH-RESOLUTION, OPTICAL MAGNIFYING DEVICE FOR MEASURING CHANGE IN POLARISATION USING NON-COLLIMATED LIGHT BEAMS (POLARIMETER, ELLIPSOMETER)

Abstract

The subject matter of the invention is a device using a non-collimated, illuminating light beam without lens for measuring the change in polarisation of light reflected from or passing through various materials with very small surface area or volume (polarimeter, ellipsometer). The resolution is in the micrometre scale; thus, making it possible to simultaneously and quickly map materials in high-resolution.

Inventors

DR MAJOR CSABA FERENC
DR FRIED MIKLÓS
DR PETRIK PÉTER
DR HORVÁTH ZOLTÁN GYÖRGY
Juhász György

Assignees

HUN REN ENERGIATUDOMANYI KUTATOKOEZPONT

Dates

Publication Date: 20260228
Application Date: 20240731
Priority Date: 20240731