JP-1825861-S - Shower head for semiconductor substrate processing
JP1825861SJP 1825861 SJP1825861 SJP 1825861SJP-1825861-S
Abstract
The article relating to this application (hereinafter referred to as "the Article") is, for example, a shower head for releasing processing gases used in the manufacturing process of semiconductors.
Dates
- Publication Date
- 20260501
- Application Date
- 20251212
- Priority Date
- 20250613