JP-1825862-S - Shower head for semiconductor substrate processing
JP1825862SJP 1825862 SJP1825862 SJP 1825862SJP-1825862-S
Abstract
The article relating to this application (hereinafter referred to as "the Article") is, for example, a shower head for releasing processing gases used in the manufacturing process of semiconductors.
Dates
- Publication Date
- 20260501
- Application Date
- 20251212
- Priority Date
- 20250613