JP-2022537038-A5 -

Dates

Publication Date

20230531

Application Date

20200615

Description

A carrier ring according to a particular embodiment of this disclosure has a reduced outer diameter relative to the outer frame of the substrate support. By having a reduced diameter (e.g., 11.0 inches or 279.4 mm) for the carrier ring according to the principle of this disclosure, desired plasma properties are obtained and material accumulation is prevented. In some embodiments of this disclosure, the shoulder of the substrate support may be inclined downward from the outer diameter of the reduced-diameter carrier ring toward the outer diameter of the substrate support. Therefore, if material accumulation occurs, it accumulates on this inclined shoulder, minimizing the impact on the process performed on the substrate. In some examples, the electric field sensitivity at the bottom edge is reduced by increasing the radius of the bottom edge of the showerhead (e.g., from 0.15 inches ( 3.81 mm) to 0.19 inches (4.826 mm)). The outer diameter 228 of the substrate support base 204 (e.g., ceramic layer 216) may be approximately 15.0 inches (e.g., 381 mm ± 5 mm). The carrier ring 208 has an outer diameter 232 that is reduced from the outer diameter 228 of the ceramic layer 216. For example, the outer diameter 232 of the carrier ring 208 may be approximately 11.0 inches (e.g., 279.4 mm ± 5 mm). In other examples, the outer diameter 232 may be 10.0 inches to 13.0 inches (e.g., 254.0 mm to 330.2 mm). The inner diameter 236 of the carrier ring 208 may be smaller than the diameter of the substrate 220. For example, the difference between the inner diameter 236 of the carrier ring 208 and the diameter of the substrate 220 may be 0.025 inches to 0.150 inches (e.g., 0.635 mm to 3.81 mm). In other words, the inner diameter 236 may be 7.72 inches to 7.85 inches (e.g., 196.19 mm to 199.365 mm). In some examples, the carrier ring 208 has a thickness of about 0.167 inches (e.g., 4.25 mm ± 0.5 mm). In other examples, the thickness of the carrier ring 208 is about 0.101 inches (e.g., 2.57 mm ± 0.5 mm). In some examples, the shower head 224 may have a diameter of about 9.0 inches (e.g., 228.6 mm ± 5 mm). In certain embodiments, the diameter of the shower head 224 may be greater than the diameter of the substrate 220 and the inner diameter 236 of the carrier ring 208, and less than the outer diameter 232 of the carrier ring 208. In some embodiments, the shoulder portion 240 of the ceramic layer 216 is inclined downward from the outer diameter 232 of the carrier ring 208 to the outer diameter 228 of the substrate support base 204. In some embodiments, the shoulder portion 240 is inclined downward at an angle between 10 and 45 degrees. This angle may depend on the difference between the outer diameters 228 and 232. In some examples, the ceramic layer 216 may include a downward step 244 below and near (e.g., within 4 mm) the outer diameter 232 of the carrier ring 208, as shown in Figure 2 , and the shoulder portion 240 is inclined downward from this step 244.