JP-2026074552-A - Vibrating pieces, vibrating devices, and oscillators

Abstract

[Problem] To provide a vibrating piece made of a quartz SC-cut substrate with reduced G sensitivity. [Solution] The vibrating piece 1 is made of an SC-cut quartz plate and comprises a substrate 2 having a first outer edge 21 that intersects with respect to a first direction. The substrate 2 has a first slit 31 between the main region 28 and the first fixing part 4a, and a second slit 32 provided in either the main region 28 or the second fixing part 4b, which opens to the front and back surfaces of the substrate 2 and the first outer edge 21. When the length of the substrate including the excitation electrode is Lx, the length of the first slit 31 is L1, and the length of the second slit 32 is L2, L1/Lx and L2/Lx are set to a predetermined range. [Selection Diagram] Figure 5

Inventors

• 松川 典仁

Assignees

• セイコーエプソン株式会社

Dates

Publication Date

20260507

Application Date

20241021

Claims (5)

1. A substrate made of an SC-cut quartz plate, having a first outer edge and a second outer edge that intersect with a first direction, and a third outer edge and a fourth outer edge that are aligned with the first direction, The device comprises an excitation electrode located in the center of the substrate in a plan view, The aforementioned substrate is When the region where the excitation electrode is located and the region located between the excitation electrode and the first outer edge are defined as the main region, there is a first slit between the main region and the third outer edge, and a second slit between the main region and the fourth outer edge, The first slit and the second slit open on the front and back surfaces and the first outer edge of the substrate, Let Lx be the length in the first direction from the first outer edge to the second outer edge. When the length in the first direction from the first outer edge to the end of the first slit on the second outer edge side is L1, and the length in the first direction from the first outer edge to the end of the second slit on the second outer edge side is L2, A vibrating piece characterized in that L1/Lx and L2/Lx satisfy any of the following equations (1) to (5). 0.00 < L1/Lx < 0.20 and 0.110 ≤ L2/Lx ≤ 0.550 × L1/Lx + 0.860 ... (1) 0.20 ≤ L1/Lx < 0.60 and 0.110 ≤ L2/Lx ≤ 0.970 ... (2) 0.60 ≤ L1/Lx < 0.77 and -0.297 × L1/Lx + 0.288 ≤ L2/Lx ≤ 0.970 ... (3) 0.77 ≤ L1/Lx < 0.97 and -0.297 × L1/Lx + 0.288 ≤ L2/Lx ≤ -0.300 × L1/Lx + 0.451 ... (4) 0.77 ≤ L1/Lx < 0.97 and 0.250 × L1/Lx + 0.128 ≤ L2/Lx ≤ -0.400 × L1/Lx + 0.988 ... (5)
2. A substrate made of an SC-cut quartz plate, having a first outer edge and a second outer edge that intersect with respect to a first direction, and a third outer edge and a fourth outer edge that are aligned with the first direction, The device comprises an excitation electrode located in the center of the substrate in a plan view, The aforementioned substrate is When the region located between the excitation electrode and the first outer edge is defined as the main region, a first slit is provided between the main region and the third outer edge, and a second slit is provided between the main region and the fourth outer edge. The first slit and the second slit open on the front and back surfaces and the first outer edge of the substrate, Let Lx be the length in the first direction from the first outer edge to the second outer edge. When the length in the first direction from the first outer edge to the end of the first slit on the second outer edge side is L1, and the length in the first direction from the first outer edge to the end of the second slit on the second outer edge side is L2, A vibrating piece characterized in that L1/Lx and L2/Lx satisfy any of the following equations (6) to (14). 0.06 ≤ L1/Lx < 0.11 and -2.000 × L1/Lx + 0.700 ≤ L2/Lx ≤ 1.800 × L1/Lx + 0.472 ... (6) 0.11 ≤ L1/Lx ≤ 0.16 and 2.000 × L1/Lx + 0.260 ≤ L2/Lx ≤ -1.800 × L1/Lx + 0.868 ... (7) 0.43 ≤ L1/Lx < 0.46 and -1.556 × L1/Lx + 1.259 ≤ L2/Lx ≤ 9.000 × L1/Lx - 3.280 ... (8) 0.46 ≤ L1/Lx < 0.52 and -1.556 × L1/Lx + 1.259 ≤ L2/Lx ≤ 1.833 × L1/Lx + 0.017 ... (9) 0.52 ≤ L1/Lx < 0.60 and -0.375 × L1/Lx + 0.645 ≤ L2/Lx ≤ 0.970 ... (10) 0.60 ≤ L1/Lx < 0.69 and 0.071 × L1/Lx + 0.377 ≤ L2/Lx ≤ 0.970 ... (11) 0.69 ≤ L1/Lx < 0.74 and 0.071 × L1/Lx + 0.377 ≤ L2/Lx ≤ -0.800 × L1/Lx + 1.212 ... (12) 0.69 ≤ L1/Lx < 0.74 and 2.600 × L1/Lx - 0.954 ≤ L2/Lx ≤ 0.970 ... (13) 0.74 ≤ L1/Lx ≤ 0.84 and 1.100 × L1/Lx - 0.384 ≤ L2/Lx ≤ -0.800 × L1/Lx + 1.212 ... (14)
3. The vibrating piece according to claim 1 or 2, wherein at least one of the end of the third outer edge on the first outer edge side and the end of the fourth outer edge on the first outer edge side is located on the second outer edge side of the first outer edge in the first direction.
4. A vibrating piece according to claim 1 or 2, A vibrating device comprising a base that supports the vibrating piece.
5. A vibrating piece according to claim 1 or 2, An oscillator circuit electrically connected to the vibrating element, An oscillator comprising: a base housing the vibrating element and the oscillation circuit.

Description

This invention relates to a vibrating element, a vibrating device, and an oscillator. For example, Patent Document 1 discloses a piezoelectric vibrator having a piezoelectric plate with an excitation electrode film on its upper surface. The piezoelectric vibrator has a connection portion connected to a container by a conductive adhesive. The connection portion is located at the furthest point from the excitation electrode film. The connection portion is formed by providing a slit in the piezoelectric plate. Generally, deformation stress and strain occur due to the difference in thermal expansion coefficients between the container and the piezoelectric plate, and the shrinkage that occurs when the conductive adhesive hardens. The piezoelectric vibrator described in Patent Document 1 prevents deformation stress and strain from affecting the excitation electrode film. On the other hand, there is a market demand for vibration devices with low G sensitivity. Japanese Unexamined Patent Publication No. 4-061413 This is a schematic plan view showing the configuration of the vibration device according to the first embodiment.This is a schematic cross-sectional view of the line A1-A1 in Figure 1.This diagram illustrates the cutting angle of the vibrating piece.This diagram illustrates the cutting angle of the vibrating piece.This is a plan view illustrating the in-plane rotation angle of the vibrating element.This is a plan view showing the configuration of the vibrating element according to the first embodiment.This figure shows the G sensitivity of the vibrating element for L1/Lx and L2/Lx.This is a diagram illustrating region C in Figure 6.This is a diagram illustrating region B in Figure 6.This is a cross-sectional view illustrating the forces acting on the vibrating piece.This is a cross-sectional view illustrating the forces acting on the vibrating piece.This is a plan view showing the configuration of the vibrating element according to the second embodiment.This is a plan view showing the configuration of the oscillator according to the third embodiment.This is a schematic cross-sectional view of the line A2-A2 in Figure 12. The embodiments of the present invention will be described below with reference to the drawings. Note that in the following drawings, the scale of each layer and component has been altered from the actual scale in order to make them recognizable. For the sake of explanation, Figures 1, 2, 12, and 13 illustrate three mutually orthogonal axes: the x-axis, y-axis, and z-axis. The direction along the x-axis is referred to as the "x-axis direction," the direction along the y-axis as the "y-axis direction," and the direction along the z-axis as the "z-axis direction." The tip of the arrow in each axis direction is also called the "+ side," and the base end is called the "- side." The plane parallel to the x-axis and y-axis is also called the "xy-plane." Furthermore, the plan view from the +z direction is simply called the "plan view." Furthermore, for the sake of clarity, Figures 3B, 4, 5, and 9-11 illustrate three mutually orthogonal axes: the X' axis, the Y'' axis, and the Z' axis. The tip of the arrow is referred to as the "+ side," and the base as the "- side." In the following explanation, the direction parallel to the X' axis is referred to as the "X' axis direction," the direction parallel to the Y'' axis as the "Y'' axis direction," and the direction parallel to the Z' axis as the "Z' axis direction." Additionally, the plane facing the Y'' axis will be described as the principal plane. The X' axis corresponds to the x-axis, and the +X' direction is the -x direction. The Z' axis corresponds to the y-axis, and the +Z' direction is the +y direction. The Y'' axis corresponds to the z-axis, and the +Y'' direction is the +z direction. Therefore, the plan view from the +Y'' direction is simply called the "plan view." <First Embodiment> A vibration device 100 according to the first embodiment of the present invention will be described with reference to Figures 1 and 2. Figure 1 is a schematic plan view showing the configuration of the vibration device 100 according to the first embodiment. Figure 2 is a schematic cross-sectional view taken along line A1-A1 in Figure 1. Note that Figure 1 shows the device with the cover 90 removed. The vibration device 100 is a surface-mount component in which a vibrating element 1 is packaged. The vibration device 100 comprises a base 80, a vibrating element 1, and a cover 90. The base 80 is a flat plate-shaped member that supports the vibrating element 1, and the cover 90 is a box-shaped member with a recess 91 formed therein. The base 80 and the cover 90 are joined together to form a package 70. The vibrating element 1 is housed in the internal space S of the package 70. The base 80 has two faces 81 and 82 that are in a front-back relationship in the z-axis direction and parallel to the xy-plane. The base 80 is approximately rectangular in plan view. The base