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JP-2026074553-A - Vibrating pieces, vibrating devices, and oscillators

JP2026074553AJP 2026074553 AJP2026074553 AJP 2026074553AJP-2026074553-A

Abstract

[Problem] To provide a vibrating piece made of a quartz SC-cut substrate with reduced G sensitivity. [Solution] The vibrating piece 1 comprises a substrate 2 made of an SC-cut quartz plate and having a first outer edge 21 intersecting a first direction, the substrate 2 having a first fixing part 4a and a second fixing part 4b fixed to a base, and a slit 31 provided in either the area between the main region 28 and the first fixing part 4a, or between the main region 28 and the second fixing part 4b, when the area where the excitation electrode 3 is located and the area located between the excitation electrode 3 and the first outer edge 21 are defined as the main region 28, and the main region 28 and the area between the main region 28 and the second fixing part 4b, and opening to the front and back surfaces of the substrate 2 and the first outer edge 21. [Selection Diagram] Figure 5

Inventors

  • 松川 典仁

Assignees

  • セイコーエプソン株式会社

Dates

Publication Date
20260507
Application Date
20241021

Claims (8)

  1. A substrate made of an SC-cut quartz plate, having a first outer edge and a second outer edge that intersect with a first direction, and a third outer edge and a fourth outer edge that are aligned with the first direction, The device comprises an excitation electrode located in the center of the substrate in a plan view, The aforementioned substrate is A first fixing part is provided at the first corner where the imaginary line along the first outer edge intersects with the third outer edge, and is fixed to the base, A second fixing portion is provided at the second corner where the dashed line and the fourth outer edge intersect, and is fixed to the base. When the region where the excitation electrode is located and the region located between the excitation electrode and the first outer edge are defined as the main region, a slit is provided in either the space between the main region and the first fixing portion, or the space between the main region and the second fixing portion, and opens to the front and back surfaces of the substrate and the first outer edge, A vibrating piece characterized by having the following features.
  2. The slit is provided between the main region and the first fixing portion, Let Lx be the length in the first direction from the first outer edge to the second outer edge. When L1 is the length in the first direction from the first outer edge to the end of the slit on the second outer edge side, 0.91 ≤ L1/Lx ≤ 0.97 A vibrating piece according to claim 1 that satisfies the relationship.
  3. The slit is provided between the main region and the second fixing portion, Let Lx be the length in the first direction from the first outer edge to the second outer edge. When L2 is the length in the first direction from the first outer edge to the end of the slit on the second outer edge side, 0.11 ≤ L²/Lx ≤ 0.86 A vibrating piece according to claim 1 that satisfies the relationship.
  4. 0.48 ≤ L²/Lx ≤ 0.75 A vibrating piece according to claim 3 that satisfies the relationship.
  5. The slit is provided between the main region and the first fixing portion, The vibrating piece according to claim 1 or 2, wherein the first fixing portion is provided on the second outer edge side of the second fixing portion.
  6. The slit is provided between the main region and the second fixing portion, The vibrating piece according to claim 1 or 3, wherein the second fixing portion is provided on the second outer edge side of the first fixing portion.
  7. The vibrating piece according to claim 1, A vibrating device comprising: a base that supports the vibrating piece;
  8. The vibrating piece according to claim 1, An oscillator circuit electrically connected to the vibrating element, An oscillator comprising the vibrating element and the base in which the oscillation circuit is housed.

Description

This invention relates to a vibrating element, a vibrating device, and an oscillator. For example, Patent Document 1 discloses a quartz crystal resonator in which one end of a quartz crystal in the longitudinal direction is fixed to the inner bottom surface of a container body with a conductive adhesive, and the other end of the quartz crystal in the longitudinal direction is fixed with adhesive. The quartz crystal has an auxiliary frame separated from the vibration region by a slit on one side in the longitudinal direction. The quartz crystal resonator described in Patent Document 1 maintains vibration characteristics by reducing stress caused by the difference in thermal expansion coefficients between the container body and the quartz crystal through adhesive fixation. On the other hand, there is a market demand for vibration devices with low G sensitivity. Japanese Patent Publication No. 2010-136174 This is a schematic plan view showing the configuration of the vibration device according to the first embodiment.This is a schematic cross-sectional view of the line A1-A1 in Figure 1.This diagram illustrates the cutting angle of the vibrating piece.This diagram illustrates the cutting angle of the vibrating piece.This is a plan view illustrating the in-plane rotation angle of the vibrating element.This is a plan view showing the configuration of the vibrating element according to the first embodiment.This is a cross-sectional view illustrating the forces acting on the vibrating piece.This is a cross-sectional view illustrating the forces acting on the vibrating piece.This figure shows the G sensitivity of the vibrating element with respect to L1/Lx.This is a plan view showing the configuration of the vibrating element according to the second embodiment.This figure shows the G sensitivity of the vibrating element with respect to L2/Lx.This is a plan view showing the configuration of the vibrating element according to the third embodiment.This is a plan view showing the configuration of a vibrating piece according to a modified example of the third embodiment.This is a schematic plan view showing the configuration of the oscillator according to the fourth embodiment.This is a schematic cross-sectional view of the line A2-A2 in Figure 13. The embodiments of the present invention will be described below with reference to the drawings. Note that in the following drawings, the scale of each layer and component has been altered from the actual scale in order to make them recognizable. For the sake of explanation, Figures 1, 2, 13, and 14 illustrate three mutually orthogonal axes: the x-axis, y-axis, and z-axis. The direction along the x-axis is referred to as the "x-axis direction," the direction along the y-axis as the "y-axis direction," and the direction along the z-axis as the "z-axis direction." The tip of the arrow in each axis direction is also called the "+ side," and the base end is called the "- side." The plane parallel to the x-axis and y-axis is also called the "xy-plane." Furthermore, the plan view from the +z direction is simply called the "plan view." Furthermore, for the sake of clarity, Figures 3B, 4-7, 9, 11, and 12 illustrate the X', Y'', and Z' axes as three mutually orthogonal axes. The tip of the arrow is referred to as the "+" side, and the base as the "-" side. In the following explanation, the direction parallel to the X' axis is referred to as the "X'-axis direction," the direction parallel to the Y'' axis as the "Y''-axis direction," and the direction parallel to the Z' axis as the "Z'-axis direction." Additionally, the plane facing the Y''-axis will be described as the principal plane. The X' axis corresponds to the x-axis, and the +X' direction is the -x direction. The Z' axis corresponds to the y-axis, and the +Z' direction is the +y direction. The Y'' axis corresponds to the z-axis, and the +Y'' direction is the +z direction. Therefore, the plan view from the +Y'' direction is simply called the "plan view." <First Embodiment> A vibration device 100 according to the first embodiment of the present invention will be described with reference to Figures 1 and 2. Figure 1 is a schematic plan view showing the configuration of the vibration device 100 according to the first embodiment. Figure 2 is a schematic cross-sectional view taken along line A1-A1 in Figure 1. Note that Figure 1 shows the device with the cover 90 removed. The vibration device 100 is a surface-mount component in which a vibrating element 1 is packaged. The vibration device 100 comprises a base 80, a vibrating element 1, and a cover 90. The base 80 is a flat plate-shaped member that supports the vibrating element 1, and the cover 90 is a box-shaped member with a recess 91 formed therein. The base 80 and the cover 90 are joined together to form a package 70. The vibrating element 1 is housed in the internal space S of the package 70. The base 80 has two faces 81 and 82 that are in a front-back relationship in the z-axis