JP-2026074656-A - X-ray inspection equipment

Abstract

[Problem] To provide an X-ray inspection device that can perform good inspections while increasing the speed of item transport and reducing the power output of the X-ray generator. [Solution] An X-ray inspection apparatus comprising an X-ray generator 21 that irradiates an object P under inspection with X-rays, an X-ray detector 22 that outputs detection data for each of the multiple stages of detection element arrays 22a and 22b arranged linearly in the transport direction in the main scanning direction Y, and an inspection processing unit 35 that generates an inspection image Dpx consisting of multiple pixels (xi, yj) having respective density values based on the detection data, and inspects the quality of the object P under inspection based on the image, wherein the X-ray detector 22 has a scintillator 22s with good afterglow characteristics and CMOS type photoelectric sensors 22a and 22b that receive light emitted in response to the X-rays detected by it and output detection data Lxa and Lxb, and generates an inspection image Dpx from received light data Lx obtained by integrating the detection data of detection element arrays 22a and 22b in the TDI method. [Selection Diagram] Figure 1

Inventors

• 金井 貴志
• 斎藤 直也

Assignees

• アンリツ株式会社

Dates

Publication Date

20260507

Application Date

20241021

Claims (5)

1. An X-ray generator (21) irradiates an object (P) to be inspected as it passes through a transport path (11a) with X-rays, An X-ray detector (22) has multiple rows of detection element arrays in the transport direction, each consisting of multiple detection elements ( e1 to eN ) arranged linearly in the main scanning direction (Y) perpendicular to the transport direction (X) of the object to be inspected, and outputs detection data obtained from each detection element for each row of the multiple rows of detection element arrays, An X-ray inspection apparatus comprising: an inspection processing unit (35) that generates an inspection image (Dpx) consisting of a plurality of pixels (xi, yj) having respective density values based on detection data output by the X-ray detector, and inspects the quality of the object to be inspected based on the inspection image, The X-ray detector comprises a scintillator (22s) with good afterglow characteristics for detecting X-rays, and CMOS-type photoelectric sensors (22a, 22b; 22a, 22b, 22c, 22d) that receive light emitted in response to the X-rays detected by the scintillator and output detection data (Lxa, Lxb). The X-ray inspection apparatus is characterized in that it generates the inspection image using light-receiving data (Lx) obtained by integrating the detection data of the multiple stages of detection element arrays using the TDI method.
2. An inspection condition detection means (37) for detecting when specific inspection conditions that degrade the image quality of the aforementioned inspection image are met, When the inspection condition detection means detects that the specific inspection condition has been met, the system includes an image data adjustment means (32) that adjusts the detected data output from the X-ray detector to improve the image quality of the inspection image. The X-ray inspection apparatus according to claim 1, characterized in that it generates an inspection image with an expanded range of density values based on the adjusted detection data adjusted by the image data adjustment means, and the inspection processing unit performs the inspection process based on the data of the inspection image with an expanded range of density values.
3. The X-ray inspection apparatus according to claim 2, characterized in that the specified inspection conditions include the condition that the transport speed of the object to be inspected passing through a predetermined section on the transport path reaches a predetermined speed or higher, or that the irradiation intensity of the X-rays irradiated onto the object to be inspected from the X-ray generator has decreased to below a predetermined intensity.
4. Height setting means (38, 40) for setting a reference height from the conveying surface of the conveying path, The X-ray inspection apparatus according to claim 1 or 2, characterized by comprising scanning condition setting means (38, 40) for setting the scan period (t2) in the main scanning direction and the delay time (t1) in the transport direction of the X-ray detector so that the aspect ratio on the transmitted image at a reference height is 1.
5. The X-ray inspection apparatus according to claim 4, characterized by comprising a storage means (38a) for storing the reference height set by the height setting means for each variety.

Description

This invention relates to an X-ray inspection apparatus, and more particularly to an X-ray inspection apparatus that inspects the quality of objects to be inspected, such as food and pharmaceuticals, based on X-ray image data. In X-ray inspection equipment used to inspect the quality of orally ingested items such as food and medicine—for example, checking for foreign matter contamination, missing parts, and defects in the shape of essential parts such as contents and seals—a system is known that irradiates the item with X-rays while it is being transported, detects the transmitted X-rays using the periodic detection operation of a line sensor to acquire two-dimensional image data, and then inspects the quality of the item being inspected based on the results of predetermined image processing on that image data. In such X-ray inspection systems, the X-ray output (tube voltage and tube current) from the X-ray generator is set for each type of object being inspected, so that the density distribution and contrast of the X-ray image are appropriate according to the thickness and transport speed of the object being inspected. Conventional X-ray inspection devices of this type store, for example, a compressed image of the X-ray image generated at the time of setup, associated with the variety information of the object being inspected, in memory. This facilitates the accurate and easy determination of inspection conditions for the selected variety when selecting a variety. In this device, the operating conditions of the X-ray detection means and the X-ray image generation unit are set for each variety to be inspected, and the X-ray image generated by the X-ray image generation unit is associated with the setting information for each variety and stored as the aforementioned X-ray image information generated at the time of setup (see, for example, Patent Document 1). Furthermore, to address the problem that reducing the X-ray output of the X-ray generator lowers the detection output of the X-ray detector, making it difficult to detect foreign objects with high sensitivity and thus hindering high-sensitivity X-ray inspection, a system is known that improves X-ray detection sensitivity and reduces X-ray output by synthesizing the detection data from the X-ray detector using the TDI (Time Delay Integration) method (see, for example, Patent Document 2). Japanese Patent Publication No. 2007-232586Japanese Patent Publication No. 2011-242374 This is a schematic diagram showing an X-ray inspection apparatus according to one embodiment of the present invention.This diagram shows the configuration of the X-ray detection unit in an X-ray inspection apparatus according to one embodiment of the present invention, where (a) is an explanatory diagram of the arrangement of an X-ray generator and an X-ray detector spaced apart above and below the transport surface, (b) is a front view of the main part of the X-ray generator as seen in the Y direction (main scanning direction) in (a), and (c) is a front view of the main part showing another embodiment of the X-ray generator.This is an explanatory diagram of the TDI method for image data processing in an X-ray detector having a CMOS type photoelectric sensor in an X-ray inspection apparatus according to one embodiment of the present invention.This is an explanatory diagram of the binning process of X-ray image data performed according to the transport speed of the object to be inspected in an X-ray inspection apparatus according to one embodiment of the present invention. The embodiments for carrying out the present invention will be described below with reference to the drawings. [One embodiment] Figures 1 to 4 show an X-ray inspection apparatus according to one embodiment of the present invention. First, let me explain the structure. As shown in Figure 1, the X-ray inspection apparatus 1 according to one embodiment of the present invention comprises an article transport unit 10, an X-ray inspection unit 20, a control unit 30, and a display operation unit 40, and constitutes part of an inspection system that includes a sorting device (not shown) located downstream of the article transport unit 10. This X-ray inspection device 1 is a device that inspects an object P under inspection using X-rays, which are classified as electromagnetic waves that can penetrate the object. For example, it has a foreign object detection function that can determine whether or not foreign objects are present in the object P under inspection using X-rays. However, it may also have functions other than foreign object detection, such as missing item inspection, mass inspection, inspection of the shape of the object under inspection (e.g., thickness and length), and detection of packaging defects such as contents being caught in the seal. Furthermore, this invention utilizes a scintillator, as described later, and naturally includes inspection of items using other types of radiation, not just X-rays, which are