JP-2026074756-A - Bottle storage device and bottle storage method

JP2026074756AJP 2026074756 AJP2026074756 AJP 2026074756AJP-2026074756-A

Abstract

[Problem] To reduce the burden on the worker when transferring bottles to a bottle holder on which bottles containing processing liquid are placed. [Solution] The device comprises a bottle holder on which bottles containing processing liquid for manufacturing semiconductor devices are placed, and a switching mechanism that switches between a first state in which the space around the bottle holder is closed and a second state in which the space is opened to transfer the bottles to the bottle holder. Since the first state and the second state are switched by the switching mechanism, the burden on the worker when transferring bottles to the bottle holder in the second state can be reduced. [Selection Diagram] Figure 8

Inventors

小金澤尚良
大薗啓
土山正志
▲高▼木慎介
西山雄太
永本龍人
服部凌大

Assignees

東京エレクトロン株式会社

Dates

Publication Date: 20260507
Application Date: 20241021

Claims (12)

A bottle mounting section on which a bottle containing a processing solution for manufacturing semiconductor devices is placed, A switching mechanism that switches between a first state in which the space around the bottle mounting section is closed, and a second state in which the space is opened to allow the bottle to be transferred to the bottle mounting section, A bottle storage device equipped with the following features.
In the first state, the housing surrounding the bottle mounting section, The switching mechanism is provided, and a moving mechanism moves the bottle mounting section and the housing relative to each other so that in the second state the bottle mounting section is located outside the housing, A bottle storage device according to claim 1, comprising:
The aforementioned moving mechanism moves the bottle mounting section laterally relative to the housing, The bottle storage device according to claim 2, wherein the moving mechanism is provided above or below the bottle mounting section and the bottle placement area on the bottle mounting section.
A processing block is provided which includes a liquid processing unit that receives the processing liquid and processes the substrate with liquid, The system comprises a container mounting section on which a container for storing the substrate is placed, a transport mechanism for transferring the substrate to the container on the container mounting section, and a substrate loading/unloading block provided on one side of the processing block (left or right) for transporting the substrate between the container and the processing block. The bottle storage device according to any one of claims 1 to 3, wherein the space around the bottle mounting section in the first state is the space inside the housing provided in the substrate loading/unloading block.
The aforementioned substrate loading/unloading block is, A waiting section is provided on one side of the container mounting section, and the container is kept in a waiting position. The system includes a container transport mechanism for transporting the container between the container placement section and the waiting section, The housing surrounds the standby section and the container transport mechanism, The bottle storage device according to claim 4, wherein the left and right positions of the bottle mounting section in the first state are the same as the left and right positions of the standby section.
A processing block is provided which includes a liquid processing unit that receives the processing liquid and processes the substrate with liquid, The system comprises a container mounting section on which a container for storing the substrate is placed, a transport mechanism for transferring the substrate to the container on the container mounting section, and a substrate loading/unloading block provided on one side of the processing block (left or right) for transporting the substrate between the container and the processing block. In the first state, a housing is provided that surrounds the bottle mounting section. The bottle storage device according to any one of claims 1 to 3, wherein the housing is provided facing the substrate loading/unloading block in a plan view, either in front of or behind it.
The aforementioned enclosure is A first housing is provided facing the substrate loading/unloading block in a plan view, either in front of or behind it, The substrate loading/unloading block includes a second housing, The bottle storage device according to claim 6, wherein the bottle mounting sections located within the first housing and the second housing, respectively, in the first state are located on one side relative to the first housing and the second housing in the second state.
A processing block is provided which includes a liquid processing unit that receives the processing liquid and processes the substrate with liquid, The processing block comprises a container mounting section on which a container for storing the substrate is placed, a transport mechanism for transferring the substrate to the container on the container mounting section, and a substrate loading/unloading block provided on one side of the processing block (left or right) for transporting the substrate between the container and the processing block. The system includes an intermediate block provided between the loading/unloading block and the processing block, which provides a transport area for the substrate, A bottle storage device according to any one of claims 1 to 3, wherein a first space and a second space, each equipped with a bottle mounting section, are provided in front of and behind the transport area, respectively, and the first state and the second state can be switched individually in the first space and the second space.
A movable part whose position changes depending on whether the bottle is positioned in the bottle placement area on the bottle mounting section or not, A bottle storage device according to any one of claims 1 to 3, further comprising a detection mechanism for detecting the presence or absence of a bottle in the bottle placement area according to the position of the movable part.
The aforementioned bottle mounting section is, Opposite the bottom surface of the bottle, an inclined surface that is tilted to allow the bottle to be placed on it, The device comprises a first support portion and a second support portion, which are provided at different heights on the inclined surface and each supports the bottom surface of the bottle, The bottle storage device according to claim 9, wherein of the first support portion and the second support portion, only the first support portion, which is located at a higher position than the second support portion, constitutes the moving portion whose positional change is detected by the detection mechanism.
The bottle comprises a body and a neck located above the body and having a narrower outer shape than the body, forming a step with the body. A first detection unit and a second detection unit are provided, each consisting of a light-emitting unit and a light-receiving unit. The bottle storage device according to any one of claims 1 to 3, wherein each of the light-emitting unit of the first detection unit and the light-emitting unit of the second detection unit irradiates light toward the neck of the bottle in the bottle placement area from different directions in a plan view.
A step of placing a bottle containing a processing liquid for manufacturing semiconductor devices onto a bottle mounting section, A switching mechanism enables switching between a first state in which the space around the bottle mounting section is closed, and a second state in which the space is opened to allow the bottle to be transferred to the bottle mounting section. A method of storing bottles, including the method of bottle storage.

Description

This disclosure relates to a bottle storage device and a bottle storage method. In the semiconductor device manufacturing process, processing liquids such as resists, coating solutions for anti-reflective film formation, solvents, and precursor-containing solutions for insulating film formation are supplied to the substrate from a nozzle for liquid processing. Patent Document 1 proposes a resist coating apparatus as a device for supplying and processing such processing liquids. The resist coating apparatus is shown to include a tank for storing the chemical solution, to which a nozzle is connected via a supply path, and to which the chemical solution is supplied to the substrate from the nozzle. It is also described that the chemical solution is supplied to the tank from a chemical solution bottle containing the solution. Japanese Patent Publication No. 2016-189493 This is a plan view showing a first embodiment of a wafer processing system that constitutes a bottle storage device.This is a front view showing the bottle storage device.This is a diagram showing the supply system for the processing liquid.This is a longitudinal cross-sectional view showing an example of the configuration of the housing and the bottle mounting section.This is a longitudinal cross-sectional view showing an example of the configuration of the bottle mounting section.This is a schematic plan view showing the bottle and tank in the first state.This is a longitudinal cross-sectional view showing an example of the configuration of the bottle mounting section in the first state.This is a longitudinal cross-sectional view showing an example of the configuration of the bottle mounting section in the second state.This is a longitudinal cross-sectional view showing a portion of the bottle mounting section.This is a longitudinal cross-sectional view showing a portion of the bottle mounting section.This is a schematic plan view illustrating the operation of the bottle storage device.This is a longitudinal cross-sectional view showing a second embodiment of a wafer processing system that constitutes a bottle storage device.This is a side view showing the bottle storage device.This is a longitudinal cross-sectional view showing a part of the bottle storage device.This is a schematic plan view illustrating the operation of the bottle storage device.This is a plan view showing a third embodiment of a wafer processing system equipped with a bottle storage device.This is a schematic plan view showing a fourth embodiment of a wafer processing system equipped with a bottle storage device.This is a plan view showing a fifth embodiment of a wafer processing system that constitutes a bottle storage device.This is a perspective view showing an example configuration of the first space and the bottle mounting section.This is a schematic plan view illustrating an example of the configuration of the first space.This is a schematic plan view illustrating an example of the configuration of the first space.This is a schematic plan view illustrating an example of the configuration of the first space.This is a schematic plan view illustrating the operation of the bottle storage device.This is a longitudinal cross-sectional view showing an example of the configuration of the housing and the bottle mounting section.This is a perspective view showing an example configuration of the first detection unit and the second detection unit.This is a side view showing an example configuration of the first detection unit and the second detection unit. The wafer processing system as a bottle storage device according to this embodiment will be described below with reference to the drawings. In this specification, elements having substantially the same functional configuration are denoted by the same reference numerals, thus omitting redundant explanations. <Wafer Processing System> First, the configuration of the wafer processing system according to this embodiment will be described. Figures 1 and 2 are schematic plan view and front view, respectively, showing the general configuration of the wafer processing system 1. In this embodiment, the case in which the wafer processing system 1 is a photolithography processing system that performs resist film formation and development processing on a wafer W will be described as an example. The wafer processing system 1, as shown in Figure 1, comprises a cassette station 12 which forms a substrate loading/unloading block for loading and unloading cassettes C containing multiple wafers W, and a processing station 13 which forms a processing block equipped with multiple various processing devices for performing predetermined processing on the wafers W. The wafer processing system 1 has a configuration in which the cassette station 12, the processing station 13, and an interface station 14 which transfers wafers W between the processing station 13 and an adjacent exposure apparatus (not shown) on the opposite side of the processing stati