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JP-2026074779-A - Apparatus for producing fine particles, method for producing fine particles, cell for producing fine particles, and method for producing a cell for producing fine particles

JP2026074779AJP 2026074779 AJP2026074779 AJP 2026074779AJP-2026074779-A

Abstract

[Problem] To provide a microparticle manufacturing apparatus, a method for manufacturing microparticles, a microparticle generation cell, and a method for manufacturing a microparticle generation cell that improve the mass production capacity and stability of microparticle generation efficiency. [Solution] The microparticle manufacturing apparatus 1 is an apparatus for manufacturing microparticles by irradiating a solution 7 (precursor solution 71) containing metal atoms with a femtosecond pulse laser 30a, and is characterized by comprising a microparticle generation cell 2 extended in the flow direction f of the solution 7, and an irradiation unit 3 that irradiates the solution 7 flowing inside the microparticle generation cell 2 with a femtosecond pulse laser 30a along the flow direction f. The microparticle generation cell 2 may have a first containment section, a partition wall with an outflow hole drilled therein that allows the solution 7 to flow out from the first containment section and from which the femtosecond pulse laser 30a is focused by the irradiation unit 3, and a second containment section that contains the solution 7 that has flowed out from the first containment section through the outflow hole. [Selection Diagram] Figure 1

Inventors

  • 中村 貴宏
  • 柴田 秀平
  • 黒田 陸斗
  • 稲 秀樹

Assignees

  • 株式会社illuminus

Dates

Publication Date
20260507
Application Date
20241021

Claims (12)

  1. A microparticle manufacturing apparatus that produces microparticles by irradiating a solution containing metal atoms with a femtosecond pulsed laser, A cell for generating fine particles, extended in the direction of flow of the aforementioned solution, An irradiation unit that irradiates the solution flowing within the fine particle generation cell with the femtosecond pulse laser along the flow direction, A microparticle manufacturing apparatus characterized by being equipped with [a specific feature].
  2. The aforementioned cell for generating fine particles is A first storage section for storing the aforementioned solution, A partition wall adjacent to the downstream end of the first containment in the flow direction, having an outflow hole drilled therein that allows the solution to flow out of the first containment and from which the femtosecond pulse laser is focused by the irradiation unit, A second containment section adjacent to the downstream end of the partition wall in the flow direction, which contains the solution that has flowed out from the first containment section through the outflow hole, The fine particle manufacturing apparatus according to claim 1, characterized by having
  3. The fine particle manufacturing apparatus according to claim 2, characterized in that the inner circumferential surface of the first housing portion of the fine particle generation cell is reduced in diameter as it approaches the partition wall.
  4. The microparticle manufacturing apparatus according to claim 1, characterized in that the microparticle generation cell has a pair of reflectors at both ends in the flow direction that reflect the femtosecond pulse laser irradiated in the flow direction by the irradiation unit.
  5. The microparticle manufacturing apparatus according to claim 1, further comprising an analysis unit for analyzing the components of the microparticles generated in the microparticle generation cell by laser-induced breakdown spectroscopy.
  6. The microparticle manufacturing apparatus according to claim 5, characterized in that the analysis unit uses a laser branched from the femtosecond pulse laser irradiated by the irradiation unit as its excitation source.
  7. The microparticle manufacturing apparatus according to claim 5, characterized in that the analysis unit performs component analysis of the microparticles in the microparticle manufacturing cell using the femtosecond pulse laser irradiated into the microparticle manufacturing cell by the irradiation unit as an excitation source.
  8. The microparticle manufacturing apparatus according to any one of claims 1 to 7, further comprising a surface modification unit that brings the microparticles generated in the microparticle generation cell into contact with a surface modifier and separates the surface-modified microparticles from the precursor.
  9. A method for producing fine particles by irradiating a solution containing metal atoms with a femtosecond pulsed laser, A method for producing fine particles, characterized by comprising an irradiation step of irradiating the solution flowing within a cell for generating fine particles, which is extended in the direction of the flow of the solution, with the femtosecond pulse laser along the direction of the flow.
  10. A microparticle manufacturing apparatus for producing microparticles by irradiating a solution containing a precursor with metal atoms with a femtosecond pulsed laser, wherein the microparticle generation cell extends in the direction of the flow of the solution and irradiates the solution flowing inside the cell with the femtosecond pulsed laser along the direction of the flow, A first storage section for storing the aforementioned solution, A partition wall adjacent to the flow direction of the first containment section, having an outflow hole drilled therein that allows the solution to flow out of the first containment section and from which the femtosecond pulse laser is focused, A second containment section adjacent to the partition wall in the flow direction, which contains the solution that has flowed out from the first containment section through the outflow hole, A cell for generating microparticles, characterized by having [a certain feature].
  11. A microparticle manufacturing apparatus for producing microparticles by irradiating a solution containing a precursor with metal atoms with a femtosecond pulsed laser, wherein the microparticle generation cell extends in the direction of the flow of the solution and irradiates the solution flowing inside the cell with the femtosecond pulsed laser along the direction of the flow, A cell for generating microparticles, characterized in that it has a pair of reflectors at both ends in the flow direction that reflect the femtosecond pulse laser irradiated in the flow direction by the irradiation unit.
  12. A method for manufacturing a microparticle cell used in a microparticle manufacturing apparatus that produces microparticles by irradiating a solution containing a precursor with a metal atom with a femtosecond pulse laser, wherein the cell extends in the direction of the flow of the solution and the femtosecond pulse laser is irradiated along the direction of the flow of the solution flowing inside the cell, A method for manufacturing a cell for generating fine particles, characterized by irradiating a partition wall separating a first storage section and a second storage section, which contain the aforementioned solution and are adjacent to each other in the flow direction, with the femtosecond pulse laser, thereby causing the solution to flow out of the first storage section and creating an outflow hole into which the femtosecond pulse laser is focused.

Description

This invention relates to a microparticle manufacturing apparatus, a method for manufacturing microparticles, a microparticle generation cell, and a method for manufacturing a microparticle generation cell. Conventionally, a continuous manufacturing process has been proposed as an efficient method for producing metal nanoparticles, involving the transportation of metal nanoparticles generated using pulsed lasers from the generation area. Patent Document 1 discloses a method for generating metal nanoparticles by irradiating the surface of a precursor (target) in water with a pulsed laser while creating a water flow in a generation container. Japanese Patent Publication No. 2016-188428 Figure 1(a) is a schematic diagram showing an example of a microparticle manufacturing apparatus according to the first embodiment, and Figure 1(b) is a schematic diagram showing an example of a microparticle generation cell that constitutes the microparticle manufacturing apparatus.Figure 2 is a schematic diagram showing an example of a detailed configuration of a microparticle manufacturing apparatus according to the first embodiment.Figure 3 is a schematic diagram showing an example of the operation method of a microparticle generation cell that constitutes the microparticle manufacturing apparatus according to the first embodiment.Figures 4(a) to 4(b) are schematic diagrams showing a first modified example of the operation method of the microparticle generation cell constituting the microparticle manufacturing apparatus according to the first embodiment.Figure 5 is a schematic diagram showing a second modified example of the operation method of the microparticle generation cell constituting the microparticle manufacturing apparatus according to the first embodiment.Figures 6(a) to 6(b) are schematic diagrams showing a third modified example of the operation method of the microparticle generation cell constituting the microparticle manufacturing apparatus according to the first embodiment.Figure 7 is a schematic diagram showing an example of a microparticle manufacturing apparatus according to the second embodiment.Figures 8(a) to 8(c) are schematic diagrams showing an example of a method for manufacturing the microparticle generation cell shown in Figure 4(b). The following describes in detail, with reference to the drawings, an embodiment of the present invention: a microparticle manufacturing apparatus 1, a method for manufacturing microparticles, a microparticle generation cell 2, and an example of a method for manufacturing the microparticle generation cell 2. In each figure, the first direction is denoted as X, the second direction as Y (one direction perpendicular to the first direction X), and the third direction as Z (one direction perpendicular to both the first direction X and the second direction Y). The configurations in each figure are schematically represented for illustrative purposes; for example, the size of each component and the size comparisons between components may differ from those shown in the figures. (First embodiment: Apparatus for producing fine particles 1) An example of the microparticle manufacturing apparatus 1 in this embodiment will be described with reference to the drawings. The microparticles produced by the microparticle manufacturing apparatus 1 are used in electronic devices such as power generation elements, as well as in fields such as medicine and food. The microparticles may include metal microparticles, or they may include microparticles containing both metal and non-metal atoms. The microparticles can be used, for example, in the energy field, such as power generation elements, and in the electronic device field, such as conductive components. In addition to the above, the microparticles can be used in fields such as medicine (e.g., pharmaceuticals or cosmetics), materials (e.g., as part of composite materials), and food. In particular, by performing any surface treatment (e.g., forming a coating) on the surface of the microparticles, microparticles with added functions can be produced, and their application to a wide range of uses is expected. The microparticle manufacturing apparatus 1, as shown in Figure 1(a), is a device that produces microparticles or a solution 7 (colloidal solution 72) in which microparticles are suspended, by irradiating a solution 7 (precursor solution 71) containing a precursor with a metal atom with a femtosecond pulsed laser 30a. In the following description, when simply referred to as "microparticles," it refers to the microparticles manufactured by the microparticle manufacturing apparatus 1. Also, when simply referred to as "laser," it refers to the femtosecond pulsed laser. The microparticle manufacturing apparatus 1 comprises, for example, a microparticle generation cell 2 and an irradiation unit 3. The microparticle manufacturing apparatus 1 may further include, for example, an input unit 4, an analysis unit 5, and a recovery unit 6. The microp