JP-2026075242-A - Cleanroom system

JP2026075242AJP 2026075242 AJP2026075242 AJP 2026075242AJP-2026075242-A

Abstract

[Problem] To provide a cleanroom system that can effectively utilize the space where air circulates. [Solution] A first ventilation unit 51 is provided in the floor 20 or the space below the floor 20. The first ventilation unit 51 is a ventilation unit 50 including a fan and a filter, which forms an upward airflow in the first space 11 through the opening 40. A second ventilation unit 52 is provided in the ceiling 30 or the space above the ceiling 30. The second ventilation unit 52 is a ventilation unit 50 which forms a downward airflow in the second space 12 through the opening 40. An air circulation path is formed in the underfloor space, the first space 11, the space above the ceiling, and the second space 12. [Selection Diagram] Figure 1

Inventors

石野貴広
柳原茂

Assignees

東洋熱工業株式会社

Dates

Publication Date: 20260508
Application Date: 20241022

Claims (10)

A cleanroom system applicable to a cleanroom equipped with a floor and ceiling, The aforementioned cleanroom is It includes the first space and the second space defined by the floor and ceiling, respectively. The first space and the second space are in communication with the space above the ceiling, which is the space above at least a portion of the ceiling, and the space below the floor, which is the space below at least a portion of the floor, via openings. A first air blowing unit is provided in the floor or the space below the floor, which includes a fan and a filter and forms an upward airflow into the first space through the opening. In the ceiling or the space above the ceiling, there is a second ventilation unit which forms an airflow from top to bottom into the second space through the opening. A cleanroom system that forms an air circulation path in the underfloor space, the first space, the ceiling space, and the second space.
The cleanroom system according to claim 1, wherein the air discharged from the second blowing unit and flowing through the second space has a lateral component directed from the second space toward the first space.
The cleanroom system according to claim 2, wherein the amount of air supplied by the second blower unit is greater than the amount of air supplied by the first blower unit.
The cleanroom system according to claim 2, wherein the second air supply unit, installed in a portion of the second space adjacent to the first space, supplies air to the second space in a direction having the lateral component.
A partition is provided at the boundary between the first space and the second space, projecting downward from the ceiling and extending in the direction of the boundary. The cleanroom system according to claim 1, wherein the first space and the second space are in communication with each other in the region below the partition.
The aforementioned blower unit blows air along the vertical direction. The cleanroom system according to claim 1, wherein the amount of air discharged by the air blowing unit provided adjacent to the boundary between the first space and the second space is greater than the amount of air discharged by the other air blowing units.
The cleanroom system according to claim 1, wherein the ceiling defining the first space is located above the ceiling defining the second space.
The first underfloor space, which is the space below the floor that defines the first space, is in communication with the second underfloor space, which is the space below the floor that defines the second space. The first ceiling space, which is the space above the ceiling that defines the first space, is in communication with the second ceiling space, which is the space above the ceiling that defines the second space. The first space and the second space are separated by a partition wall. A bypass structure having an internal space is formed outside the first space and the second space, The cleanroom system according to claim 1, wherein the second underfloor space and the first ceiling space are in communication via the internal space without passing through the first underfloor space and the second ceiling space.
Between the first underfloor space and the second underfloor space, a cooling device capable of cooling air, specifically a first cooling device capable of cooling air passing from the second underfloor space to the first underfloor space, is installed. Between the first ceiling space and the second ceiling space, a second cooling device is installed which is capable of cooling the air passing from the first ceiling space to the second ceiling space. The bypass structure is directly connected to the second underfloor space and the first ceiling space, The cleanroom system according to claim 8, wherein when air flows between the second underfloor space and the first ceiling space via the internal space, the air does not pass through the cooling device.
The first space and the second space are separated by a partition wall. An outside air intake is installed in the cleanroom that is connected to the outside of the cleanroom and supplies air from the outside, and supplies air to the first ceiling space or the second ceiling space. The aforementioned outside air intake, which supplies air to the second underfloor space or the first underfloor space, is installed in the cleanroom. An exhaust port that discharges air to the outside through the aforementioned outside, and a first exhaust port that discharges air to the outside from the first space, is installed in the cleanroom. The cleanroom is equipped with the aforementioned exhaust port, which discharges air from the second space to the outside. If the amount of air discharged from the second blower unit is greater than the amount of air discharged from the first blower unit, The amount of air supplied from the first outside air intake is greater than the amount of air discharged from the first exhaust port, and The amount of air discharged from the second exhaust port is greater than the amount of air supplied from the second outside air intake. If the amount of air discharged from the first blower unit is greater than the amount of air discharged from the second blower unit, The amount of air supplied from the first outside air intake is less than the amount of air discharged from the first exhaust port, The cleanroom according to claim 1, wherein the amount of air discharged from the second exhaust port is less than the amount of air supplied from the second outside air intake.

Description

This invention relates to a cleanroom system. Regarding cleanrooms requiring a certain high level of cleanliness, Patent Document 1 discloses a cleanroom system that efficiently removes dust from the room and creates an upward airflow within the room to suitably enhance the cleanliness of the cleanroom. In this cleanroom system, the air circulates through the vertical space inside and outside the room. Japanese Patent Publication No. 2023-12439 This is a schematic diagram showing an example of a cleanroom system according to the first embodiment of the present invention.Figures 2(a) and 2(b) are schematic diagrams showing other examples of the cleanroom system according to the first embodiment.This is a schematic diagram showing another example of a cleanroom system according to the first embodiment.Figures 4(a) and 4(b) are schematic diagrams showing other examples of the cleanroom system according to the first embodiment.This is a schematic diagram showing another example of a cleanroom system according to the first embodiment.This is a schematic diagram showing an example of a cleanroom system according to a second embodiment of the present invention.Figures 7(a) and 7(b) are schematic diagrams showing other examples of the cleanroom system according to the second embodiment.Figures 8(a) and 8(b) are schematic diagrams showing an example of a cleanroom system according to a third embodiment of the present invention.This is a schematic diagram illustrating an example of a cleanroom system as described in the modified example. The various components of the cleanroom system and cleanroom of the present invention do not need to be individually independent entities. It is permissible for multiple components to be formed as a single member, for one component to be formed from multiple members, for one component to be part of another component, for parts of one component to overlap with parts of another component, and so on. Embodiments of the present invention will be described below with reference to the drawings. In each drawing, corresponding components are denoted by the same reference numeral, and redundant explanations will be omitted as appropriate. Furthermore, in this invention, the term "plane" refers to a shape physically formed with the goal of creating a plane, and naturally, it does not need to be a geometrically perfect plane. <First Embodiment> (Cleanroom system) Figure 1 is a schematic diagram showing an example of a cleanroom system 100 according to the first embodiment of the present invention. The arrows in Figures 1 to 8(b) indicate the direction in which air flows (or can flow) (referred to as the flow direction). The thickness of the arrow represents the magnitude of the flow rate of the air that is flowing (or can flow). Flow rate refers to the mass of fluid flowing per unit time. In other words, flow rate is the mass flow rate. The greater the thickness of the arrow, the greater the mass flow rate of the air that is flowing (or can flow). First, an overview of the cleanroom system 100 of this embodiment will be described. The cleanroom system 100 of this embodiment is applied to a cleanroom 10 having a floor 20 and a ceiling 30. The cleanroom 10 includes a first space 11 and a second space 12. The first space 11 and the second space 12 are defined by a floor 20 and a ceiling 30, respectively. The first space 11 and the second space 12 are in communication with the space above the ceiling (the first space above the ceiling 15 or the second space above the ceiling 16, or both, described later) and the space below the floor (the first space below the floor 13 or the second space below the floor 14, or both, described later) via openings 40, respectively. The space above the ceiling is the space above at least a portion of the ceiling 30. The space below the floor is the space below at least a portion of the floor 20. A first air blowing unit 51 is provided in the floor 20 or the space below the floor 20. The first air blowing unit 51 is an air blowing unit 50 including a fan and a filter, which forms an upward airflow from bottom to top into the first space 11 through the opening 40. A second air supply unit 52 is provided in the ceiling 30 or the space above the ceiling 30. The second air supply unit 52 is an air supply unit 50 that forms an airflow from top to bottom into the second space 12 through the opening 40. Air circulation paths are formed in the underfloor space, the first space 11, the space above the ceiling, and the second space 12. By providing air supply units including filters in both the first space where air flows from bottom to top and the second space where air flows from top to bottom, it is possible to maintain a high level of cleanliness not only in the first space but also in the second space. Therefore, a larger portion of the space where air circulates can be effectively utilized as a cleanroom or a space with a similar level of cleanliness. More specifically, a