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JP-2026075438-A - Sample processing apparatus and sample processing method

JP2026075438AJP 2026075438 AJP2026075438 AJP 2026075438AJP-2026075438-A

Abstract

[Problem] To provide a sample processing apparatus that can reduce the amount of shavings scattered inside the sample chamber. [Solution] The sample processing apparatus 100 is a sample processing apparatus that processes a sample S placed in a sample chamber 12 by irradiating the sample S with a processing beam, and includes a laser device 30 as a processing beam source for irradiating the sample S with a processing beam, a sample holder 50 for holding the sample S, a sample stage 40 on which the sample holder 50 is mounted, and a shield 60 placed in the sample chamber 12, wherein the sample holder 50 and the shield 60 constitute a container for housing the sample S, and the container is provided with a window portion for guiding the processing beam into the container. [Selection Diagram] Figure 1

Inventors

  • 井上 雅行
  • 村上 雄大

Assignees

  • 日本電子株式会社

Dates

Publication Date
20260508
Application Date
20241022

Claims (14)

  1. A sample processing apparatus that processes a sample placed in a sample chamber by irradiating it with a processing beam, A processing beam source that irradiates the sample with the processing beam, A sample holder for holding the aforementioned sample, A sample stage on which the aforementioned sample holder is attached, A shield placed in the aforementioned sample chamber, Includes, The sample holder and the shield constitute a container for housing the sample. A sample processing apparatus comprising a container provided with a window portion for guiding the processing beam into the container.
  2. In claim 1, The observation beam source includes an observation beam source for irradiating the sample with an observation beam. The sample stage moves the sample holder between an observation position where the observation beam is irradiated onto the sample and a processing position where the processing beam is irradiated onto the sample. A sample processing apparatus, wherein the sample is placed in the container by moving the sample holder to the processing position.
  3. In claim 2, The shield is fixed to the processing position in the sample processing apparatus.
  4. In claim 1, The sample holder is provided with a protrusion, A sample processing apparatus, wherein the shield is provided with a recess into which the protrusion is inserted.
  5. In claim 4, The sample holder has a sample stage on which the sample is placed, The aforementioned protrusion surrounds the sample stage, which is part of the sample processing apparatus.
  6. In claim 4, A sample processing apparatus in which, when the sample holder and the shield constitute the container, the protrusion and the recess do not come into contact.
  7. In claim 1, The shield is provided with a protrusion, A sample processing apparatus, wherein the sample holder is provided with a recess into which the protrusion is inserted.
  8. In claim 1, The sample holder has a tilting mechanism for tilting the sample, and is a sample processing apparatus.
  9. In claim 8, A sample processing apparatus in which the height of the container is variable.
  10. In claim 9, The shield has a lid portion that forms the upper part of the container, The aforementioned lid is a movable sample processing device.
  11. In any one of claims 1 to 10, The aforementioned processing beam is laser light, The aforementioned window portion is a sample processing device through which the laser light is transmitted.
  12. In claim 11, The aforementioned window section is a replaceable sample processing device.
  13. In any one of claims 1 to 10, The window portion is a through-hole that penetrates the container, in the sample processing apparatus.
  14. The process involves attaching a sample holder to the sample stage located in the sample chamber of the sample processing apparatus, A step of observing the sample using an observation beam and determining the processing area of the sample, The steps include: placing the sample in a container comprising a shield and a sample holder; The process involves guiding a processing beam into the container through a window provided in the container, and processing the sample contained in the container with the processing beam. A sample processing method, including the following.

Description

This invention relates to a sample processing apparatus and a sample processing method. In analytical instruments such as scanning electron microscopes and transmission electron microscopes, the sample to be observed or analyzed is processed into a shape suitable for observation or analysis using a sample processing device. Examples of such sample processing devices include cross-section polishers (registered trademark) using ion beams, focused ion beam devices using focused ion beams, and laser processing devices using laser light. In sample processing equipment, shavings generated during processing can have adverse effects. For example, Patent Document 1 discloses a processing apparatus that uses a laser beam to process a sample in a vacuum chamber, and in which a protective screen is provided between the sample and the objective lens to protect the objective lens from fragments generated during processing. Japanese Patent Publication No. 2013-214513 A schematic perspective view showing the sample processing apparatus according to this embodiment.A schematic plan view showing the sample processing apparatus according to this embodiment.A schematic perspective view showing the sample holder and shield.A schematic perspective view showing the sample holder and shield.A schematic perspective view showing the sample holder and shield.A schematic perspective view of the shield.A schematic perspective view of the shield.A schematic perspective view of the container.A flowchart illustrating an example of a measurement method, including a sample processing method using a sample processing device.A diagram illustrating each step of a measurement method, including a sample processing method using a sample processing device.A diagram illustrating each step of a measurement method, including a sample processing method using a sample processing device.A schematic perspective view showing modified samples of the sample holder and shield.A schematic perspective view showing a modified version of the shield.A schematic perspective view showing a modified version of the shield.A schematic perspective view showing a modified version of the shield.A schematic perspective view showing a modified version of the shield.A schematic perspective view showing modified samples of the sample holder and shield.A schematic perspective view showing modified samples of the sample holder and shield.A schematic perspective view showing a modified version of the container.A schematic cross-sectional view showing the connection between the sample holder and the shield.A diagram illustrating variations in the container.A diagram illustrating variations in the container.A diagram illustrating variations in the container.A diagram illustrating variations in the container.A schematic perspective view showing modified samples of the sample holder and shield.A schematic perspective view showing modified samples of the sample holder and shield. The following describes preferred embodiments of the present invention in detail with reference to the drawings. The embodiments described below are not intended to unduly limit the scope of the present invention as described in the claims. Furthermore, not all of the configurations described below are necessarily essential components of the present invention. 1. Sample Processing Apparatus First, a sample processing apparatus according to one embodiment of the present invention will be described with reference to the drawings. Figure 1 is a schematic perspective view showing the sample processing apparatus 100 according to this embodiment. Note that in Figure 1, a part of the housing 10 is not shown. Figure 2 is a schematic plan view showing the sample processing apparatus 100 according to this embodiment. Figures 1 and 2 show three mutually orthogonal axes: the X axis, the Y axis, and the Z axis. As shown in Figures 1 and 2, the sample processing apparatus 100 includes a housing 10 having a sample chamber 12, a scanning electron microscope (SEM) tube 20 as an observation beam source, a laser device 30 as a processing beam source, a sample stage 40, a sample holder 50, a shield 60, a backscattered electron diffraction detector (EBSD detector) 70, and an energy-dispersive X-ray spectrometer (EDS detector) 80. The housing 10 has a sample chamber 12 in which a sample S is housed. The housing 10 is fitted with a SEM tube 20, a laser device 30, an EBSD detector 70, and an EDS detector 80. The SEM tube 20 is mounted on the side of the housing 10 facing the +Z direction. A connection port 16a is provided on the side of the housing 10 facing the +X direction, and a connection port 16b is provided on the side facing the +Y direction. The laser device 30 is mounted on the connection port 16a. The EBSD detector 70 is mounted on the connection port 16b. The housing 10 also has a connection port 16c, to which the EDS detector 80 is mounted. The sample chamber 12 houses the sample S to be processed and observed. The sam