JP-2026075544-A - Substrate and liquid dispensing head for liquid dispensing head

JP2026075544AJP 2026075544 AJP2026075544 AJP 2026075544AJP-2026075544-A

Abstract

[Problem] To provide an electrically reliable liquid dispensing head. [Solution] A substrate for a liquid dispensing head, comprising a dispensing element used for dispensing liquid, and an electrode pad electrically connected to the dispensing element via wiring and provided on the wiring, wherein at least a portion of the side surface of the electrode pad is covered with an inorganic film. [Selection Diagram] Figure 9

Inventors

米本太地
寺崎敦則
竹内創太

Assignees

キヤノン株式会社

Dates

Publication Date: 20260508
Application Date: 20241022

Claims (16)

Discharge element used for dispensing liquid, The discharge element is electrically connected via wiring, and an electrode pad is provided on the wiring, A substrate for a liquid dispensing head having, A substrate for a liquid dispensing head, wherein at least a portion of the side surface of the electrode pad is covered with an inorganic film.
The electrode pad comprises Au, as described in claim 1, for a substrate for a liquid dispensing head.
The inorganic film comprises a metal oxide, as described in claim 1, for a substrate for a liquid dispensing head.
The inorganic film comprises at least one compound selected from the group consisting of TaO, TiO, SiOC, HfO, and ZrO, as described in claim 1, for use as a substrate for a liquid discharge head.
The substrate for a liquid dispensing head according to claim 1, wherein the composition of the inorganic film is a silicon-containing compound.
The inorganic film comprises at least one compound selected from the group consisting of SiOC, SiC, and SiCN, as described in claim 1, for a liquid dispensing head substrate.
The substrate for a liquid discharge head according to claim 1, wherein the inorganic film has a multilayer structure including a first layer in contact with the side surface of the electrode pad and a second layer exposed on the opposite side of the first layer.
The substrate for a liquid discharge head according to claim 7, wherein the first layer is TaO and the second layer is SiC.
The substrate for the liquid discharge head has wiring that electrically connects the discharge element and the electrode pad, The electrode pad is electrically connected to the wiring via a diffusion prevention layer. The substrate for a liquid discharge head according to claim 1, wherein the inorganic film covers at least a portion of the side surface of the diffusion prevention layer.
The substrate for a liquid discharge head according to claim 1, wherein the discharge element is a piezoelectric element.
Having a pad row in which multiple electrode pads are arranged, The substrate for a liquid discharge head according to claim 1, wherein in the pad row, the inorganic film is not connected between adjacent electrode pads.
The aforementioned substrate for the liquid dispensing head is A second substrate having the electrode pads on the first surface, A wiring is provided on the first surface for electrically connecting the discharge element and the electrode pad, A first substrate bonded to the first surface via an adhesive, It has, and further, A substrate for a liquid discharge head according to claim 1, wherein a spacer is provided between the first substrate and the second substrate at a position that does not overlap with the wiring when viewed from a direction perpendicular to the first surface.
Discharge element used for dispensing liquid, An electrode pad electrically connected to the discharge element, A substrate for a liquid dispensing head having, A second substrate having the electrode pads on the first surface, A wiring is provided on the first surface for electrically connecting the discharge element and the electrode pad, A first substrate bonded to the first surface via an adhesive, It has, and further, A spacer is provided between the first substrate and the second substrate, in a position that does not overlap with the wiring when viewed from a direction perpendicular to the first surface. A substrate for a liquid dispensing head, wherein at least a portion of the side surface of the spacer is covered with an inorganic film.
The spacer comprises Au, as described in claim 13, for a substrate for a liquid discharge head.
A substrate for a liquid discharge head according to any one of claims 1 to 14, A wiring board having wiring that is electrically connected to the electrode pads, A sealant covering the connection between the electrode pad and the wiring, A liquid dispensing head having a liquid dispensing head.
The liquid dispensing head according to claim 15, wherein the connecting portion is formed by NCP bonding, and the sealing agent is a non-conductive resin.

Description

This invention relates to a substrate for a liquid dispensing head and a liquid dispensing head. The liquid ejection head of a liquid ejection device uses ejection energy generated by passing electricity through an energy element to vibrate a liquid such as ink, and then uses the resulting pressure to eject the liquid from the nozzle to perform recording operations, etc. In liquid ejection heads, the electrical connection between the terminals on the liquid ejection substrate (which has an ejection port) and the wiring section of the wiring board is sealed with a resin-based sealant. However, if the sealing with the sealant is insufficient, ink may penetrate the electrical connection and corrode the terminal. Therefore, various measures are taken in liquid ejection heads to prevent corrosion of the electrical connection. For example, Patent Document 1 discloses a configuration in which the sides of the terminal are covered with a resin material to prevent corrosion of the terminal's sides by the ink. In Patent Document 1, covering the sides of the terminal with a resin material makes it difficult for the terminal and the sealant to separate. Japanese Patent Publication No. 2008-207543 A perspective view showing an example of a liquid dispensing device.A perspective view showing an example of a liquid dispensing head.A perspective view showing an example of a liquid dispensing unit.An exploded perspective view showing an example of a liquid dispensing unit.A plan view of the discharge tip in the first embodiment.An enlarged plan view of the discharge tip in the first embodiment.A cross-sectional view of the discharge tip in the first embodiment.A cross-sectional view of the electrode pad in the first embodiment.A cross-sectional view of the discharge tip connected to the wiring in the first embodiment.A cross-sectional view of the discharge tip connected to the wiring in the first embodiment.A diagram showing part of the manufacturing process of the discharge tip in the first embodiment.A cross-sectional view of the electrode pad in the second embodiment.A diagram showing part of the manufacturing process for the discharge tip in the third embodiment.Cross-sectional view of the electrode pad in Example 2. The embodiments for carrying out the present invention will be described with reference to the drawings. Components having the same function will be given the same reference numerals, and repetition of the description may be omitted. In the following, an example of applying the present invention to a liquid ejection head provided in a liquid ejection device of an inkjet printer will be described. However, the present invention is not limited to the embodiments shown below, and other embodiments, additions, modifications, and deletions can be made within the scope that a person skilled in the art can conceive. Any embodiment is included within the scope of the present invention as long as it achieves the function and effect of the present invention. The components described below are merely illustrative and are not intended to limit the scope of the present invention to them alone. While the present invention is explained using a specific example involving a liquid ejection recording head, it is not limited to these embodiments, and various modifications and changes are possible within the scope of its essence. <First Embodiment> (Configuration of the liquid dispensing device) Figure 1 is a schematic perspective view illustrating the general configuration of a liquid dispensing device 1000 according to one embodiment to which the present disclosure can be applied. The liquid dispensing device 1000 of this embodiment is a one-pass type that records an image on the recording medium 200 in a single movement of the recording medium 200, and has discharge ports arranged to discharge liquid corresponding to the entire width of the recording medium 200. The liquid dispensing device 1000 is equipped, for example, with a liquid dispensing head 100 of the present invention that can be attached or detached. The recording medium 200 is transported by the transport unit 300 in the direction of arrow A, and recording is performed by the liquid ejection head 100. The liquid ejection head 100 is a liquid ejection head (described later) in which a liquid ejection unit 21 having an ejection tip 20 capable of ejecting liquid is positioned on a support member. The liquid ejection head 100 is positioned within the liquid ejection device 1000 by a reference member. Figure 1 shows a liquid ejection device 1000 equipped with a total of eight liquid ejection heads 100 (100Ka, 100Kb, 100Ya, 100Yb, 100Ma, 100Mb, 100Ca, 100Cb), each capable of ejecting four colors of ink: black, yellow, magenta, and cyan, with two heads for each color. In this specification, the direction parallel to and opposite to the transport direction A of the recording medium 200 is defined as the Y direction, the direction from the liquid discharge head 100 towa