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JP-2026075597-A - Multi-layer insulated piping for gas transport

JP2026075597AJP 2026075597 AJP2026075597 AJP 2026075597AJP-2026075597-A

Abstract

[Problem] To provide a multi-layer insulated pipe that reduces the accumulation of particles or process by-products, unreacted precursors, and reactive gases on the pipe walls, as well as the occurrence of blockage of the transported gas, thereby reducing the energy consumption of the pipe's heat retention. [Solution] The multi-layer insulated piping for transporting the first gas includes inner and outer piping. The first gas is transported in the inner piping along the exhaust direction. The inner piping has multiple through-holes. The inner piping is installed inside the outer piping. The outer piping includes an intake pipe. The second gas is heated or cooled beforehand and then injected into the outer piping from the intake pipe. The second gas is non-reactive to the first gas. The first pressure of the first gas is less than the second pressure of the second gas. [Selection Diagram] Figure 1

Inventors

  • 殷▲ユー▼▲トン▼

Assignees

  • 殷▲ユー▼▲トン▼

Dates

Publication Date
20260508
Application Date
20250916
Priority Date
20241022

Claims (10)

  1. A multi-layer insulated piping for transporting the first gas, Including internal and external piping, The first gas is transported along the exhaust direction within the internal piping, and the internal piping has a plurality of through holes. Multilayer insulated piping characterized in that the internal piping is installed within the external piping, the external piping includes an intake pipe, a second gas is selectively injected from the intake pipe into a first intermediate layer between the external piping and the internal piping, the second gas is nonreactive to the first gas, and when the second gas is injected from the intake pipe into the first intermediate layer between the external piping and the internal piping, the second gas is heated or cooled first before being injected from the intake pipe into the first intermediate layer between the external piping and the internal piping, and the first pressure of the first gas is less than the second pressure of the second gas.
  2. Further comprising an insulating layer and a heating element, The internal and external piping are installed within the insulation layer, the intake pipe extends outside the insulation layer, and the second intermediate layer between the insulation layer and the external piping is evacuated by vacuum. The multilayer insulated piping according to claim 1, characterized in that it is mounted on the outer circumference of the outer piping and the heating member is used to heat the outer piping.
  3. The multilayer insulated piping according to claim 2, further comprising a plurality of insulating support members arranged at intervals on the outer circumference of the outer piping, separating the inner circumference of the insulating layer from the heating element.
  4. The multi-layer insulated piping according to claim 1, characterized in that the average diameter range of the plurality of through holes is 1 micrometer to 10 millimeters.
  5. The multi-layer insulated piping according to claim 1, characterized in that the distribution density range of the plurality of through-holes is 0.001 to 1000 holes per centimeter of piping length.
  6. A multi-layer insulated piping for transporting the first gas, Including flexible metal hose piping and external piping, The first gas is transported along the exhaust direction within the flexible metal hose piping, and the flexible metal hose piping has a plurality of slits. Multilayer insulated piping characterized in that the flexible metal hose piping is installed inside the outer piping, the outer piping includes an intake pipe, a second gas is selectively injected from the intake pipe into a first intermediate layer between the outer piping and the flexible metal hose piping, the second gas is nonreactive to the first gas, and when the second gas is injected from the intake pipe into the first intermediate layer between the outer piping and the flexible metal hose piping, the second gas is heated or cooled first before being injected from the intake pipe into the first intermediate layer between the outer piping and the flexible metal hose piping, and the first pressure of the first gas is less than the second pressure of the second gas.
  7. Further comprising an insulating layer and a heating element, The flexible metal hose piping and the outer piping are installed within the insulation layer, the intake pipe extends outside the insulation layer, and the second intermediate layer between the insulation layer and the outer piping is evacuated by vacuum. The multilayer insulated piping according to claim 6, characterized in that it is mounted on the outer circumference of the outer piping and the heating member is used to heat the outer piping.
  8. The multilayer insulated piping according to claim 7, further comprising a plurality of insulating support members arranged at intervals on the outer circumference of the outer piping, separating the inner circumference of the insulating layer from the heating element.
  9. The multilayer insulated piping according to claim 6, characterized in that the average spacing range of the plurality of slits is 0.1 micrometers to 5000 micrometers.
  10. The multilayer insulated piping according to claim 6, characterized in that the distribution density range of the plurality of slits is 0.001 to 100 slits per centimeter of piping length.

Description

This invention relates to multi-layer insulated piping for gas transport, and more particularly to multi-layer insulated piping for gas transport that can control or maintain the temperature of the gas transported within the piping without being affected by the ambient temperature, significantly reduce energy consumption for temperature control, and prevent the formation of deposited particles, accumulation of process by-products, or blockage during the gas transport process. In the manufacturing processes of semiconductors and optoelectronic components, various thin-film deposition technologies are widely applied. These include chemical vapor deposition (CVD), atomic layer deposition (ALD), and physical vapor deposition (PVD), which uses plasma sputtering for deposition. Within these processes, the removal of precursors and reaction gases after surface reactions in chemical vapor deposition, and the removal of exhaust gases after physical vapor deposition, play crucial roles in process yield and production. These deposition processes are typically performed in a vacuum environment, with the equipment installed in a cleanroom environment. The exhaust system connects the equipment to the cleanroom via a facility-side exhaust system for exhaust gas treatment and discharge. Therefore, the exhaust system must effectively treat the process exhaust gases, which include incompletely reacted precursors and reactive gases, by-products generated during the process, process-generated particles, and corrosive gases. The exhaust system described above connects various process equipment (e.g., deposition equipment) to exhaust equipment (e.g., dry pumps) and waste gas treatment equipment using various piping systems. For example, piping from the process equipment to the dry pump, or from the dry pump to the waste gas treatment equipment. Gases transported through these pipes can cause the following problems: deposition of particles generated by the process, deposition of unreacted precursors and reactive gases, deposition of particles generated by process by-products, or deposition of particles due to corrosive gases. The aforementioned deposition or particle deposition causes particle contamination problems during the process, reducing yield. Furthermore, when a certain level of accumulation is reached, the equipment must be shut down and the piping replaced or cleaned, leading to process delays. To reduce particle or process by-product deposits in the gas transported through these pipes, conventional technology has adopted a method of covering these types of gas transport pipes with indirect heating elements. Specifically, the indirect heating elements used in the conventional technology include those in which an electric heating wire or a thermal resistance element is fixed onto a heat-resistant fiber woven fabric or in a silicone rubber piece, and then an insulating material is bonded to the outside of the covering surface. The structure is insulating material/heating wire/heat-resistant fiber outer fabric (covering surface) or silicone rubber/heating wire/silicone rubber. However, because these heating elements used in conventional technology are bonded onto heat-resistant fibers or silicone rubber to form indirect heating, the heating efficiency is reduced, and the indirect heating elements consume a considerable amount of energy when maintaining the temperature of the exhaust system. Furthermore, exhaust pipes installed using conventional indirect heating elements have their usage time limited by the aforementioned deposits or particle deposits, and there is still considerable room for improvement. Furthermore, the thermal insulation effect of indirect heating elements, where the other side of the heating element is fixed with heat-resistant fiber filling or a heat-insulating coating of silicone rubber or aerogel, is not optimal. There are also concerns about fiber breakage and powdering of the silicone rubber and aerogel, which can affect the cleanliness of the cleanroom itself. Furthermore, the piping used in the aforementioned exhaust system is basically rigid piping. However, the arrangement and assembly time for rigid piping is long, additional pipe fittings are required at all bends, and corresponding indirect heating elements are also needed to cover the outer perimeter. This is a partial cross-sectional view of a multilayer insulated pipe according to a first preferred specific embodiment of the present invention.This is a partial cross-sectional view of a multilayer insulated pipe according to a second preferred specific embodiment of the present invention.This diagram shows the power consumption measurement results as a function of time when a stable temperature of 180°C is maintained and room-temperature nitrogen gas at a flow rate of 100 SLM is added in an example and a comparative example of the present invention.This is a photograph of the inlet end of the comparative piping after 90 days of continuou