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JP-2026075728-A - Drive device, positioning device, processing device, device manufacturing method

JP2026075728AJP 2026075728 AJP2026075728 AJP 2026075728AJP-2026075728-A

Abstract

[Problem] To provide a drive device, etc., that can reduce the rotation of a slider due to a driving force along a predetermined driving direction. [Solution] The stage device 1 includes an X-slider 21 that can move linearly along a predetermined drive direction (X-axis direction), a first linear motor 120 that applies a driving force to the X-slider 21 along the drive direction, and a compensation force application unit 5 that can apply a compensation force to the X-slider 21 to reduce the pitching of the X-slider 21 caused by the driving force. The compensation force application unit 5 can apply a compensation force to the X-slider 21 that has a different line of action from the driving force. Multiple compensation force application units 5 can apply compensation forces in substantially the same direction at different positions on the same outer surface of the X-slider 21. [Selection Diagram] Figure 8

Inventors

  • 吉田 達矢
  • 室井 直人

Assignees

  • 住友重機械工業株式会社

Dates

Publication Date
20260511
Application Date
20241023

Claims (19)

  1. A slider that can move linearly along a predetermined driving direction, A drive unit that applies a driving force to the slider along the driving direction, A compensating force application unit capable of applying a compensating force to the slider to reduce the rotation of the slider caused by the aforementioned driving force, A drive device equipped with the following features.
  2. The drive device according to claim 1, wherein the compensating force application unit is capable of applying the compensating force, which has a different line of action from the driving force, to the slider.
  3. The drive device according to claim 2, wherein multiple compensation force application units are provided, allowing the compensation force to be applied at different positions on the slider.
  4. The drive device according to claim 3, wherein the multiple compensation force application units are capable of applying the compensation force in substantially the same direction at different positions on the same outer circumferential surface of the slider.
  5. The same outer surface of the slider is substantially rectangular, and a pair of opposing sides thereof extend along the driving direction. The compensating force application section is provided at least once in each of the four corner regions of the substantially rectangular shape. The drive device according to claim 4.
  6. The drive unit is a motor comprising a movable element provided on the same outer surface of the slider, and a stator extending linearly along the driving direction and applying the driving force to the movable element. The compensating force application unit is provided at least one on each side of the stator. The drive device according to claim 4.
  7. The same outer surface of the slider is the bottom surface or top surface of the slider. Multiple compensation force application units are capable of applying the compensation force to the bottom surface or top surface to reduce at least the pitching of the slider caused by the driving force applied to the bottom surface or top surface by the drive unit. The drive device according to any one of claims 4 to 6.
  8. The drive device according to any one of claims 2 to 6, wherein the compensating force application unit is provided on the side surface of the slider and is capable of applying the compensating force to the side surface to reduce at least the yawing of the slider caused by the driving force applied to the slider by the drive unit.
  9. The drive device according to claim 3, wherein the plurality of compensation force application units are capable of applying the compensation force on different outer surfaces of the slider.
  10. The drive device according to any one of claims 2 to 6, wherein the compensation force application unit is comprised of a voice coil motor capable of applying the compensation force, which has a different line of action from the driving force, to the slider.
  11. A rotation amount calculation unit that calculates the amount of rotation of the slider due to the driving force applied by the drive unit, A compensation force control unit that applies the compensation force to the compensation force application unit, which produces a compensating rotation amount of the same magnitude but in the opposite direction to the aforementioned rotation amount, A drive device according to any one of claims 1 to 6, comprising:
  12. A rotation amount measuring unit for measuring the amount of rotation of the slider, A compensation force control unit that applies the compensation force to the compensation force application unit, which produces a compensating rotation amount of the same magnitude but in the opposite direction to the aforementioned rotation amount, A drive device according to any one of claims 1 to 6, comprising:
  13. The vehicle is equipped with a guide that extends linearly along the aforementioned driving direction, The slider is movable along the drive direction while being guided by the guide. The drive device according to any one of claims 1 to 6.
  14. The drive device according to claim 13, comprising a gas levitation section that uses gas to levitate the slider from the guide.
  15. The drive device according to claim 14, further comprising an exhaust unit for discharging the gas supplied by the gas buoyancy unit to the outside of the chamber housing the drive device.
  16. The drive device according to claim 15, wherein the chamber is a vacuum chamber with a vacuum inside.
  17. A positioning device for positioning the slider using a drive device according to any one of claims 1 to 6.
  18. A processing apparatus for performing a predetermined process on an object to be processed, which is positioned on a slider positioned by the positioning device described in claim 17.
  19. A device manufacturing method comprising manufacturing a device through the processing performed by the processing apparatus described in claim 18.

Description

This disclosure relates to drive systems, etc. Patent Document 1 discloses an XY stage device capable of driving the stage in the XY biaxial direction using an X linear motor and a Y linear motor. Japanese Patent Application Publication No. 10-125767 This is a schematic perspective view showing the stage apparatus according to the first embodiment.This is a schematic perspective view showing the details of the first linear motor.This is a schematic cross-sectional view showing the first gas buoyancy section, which facilitates the X-axis drive of the X-slider by the first drive shaft using buoyant gas.This is a schematic cross-sectional view showing the second gas buoyancy section, which facilitates the Y-axis drive of the Y-slider by the second drive shaft using buoyant gas.Undesirable rotations that can occur in a slider are schematically illustrated using the X slider as an example.The mechanism by which undesirable rotation of a slider occurs, and the concept of a compensatory force application unit to reduce it, are schematically illustrated with an example of yawing around the Z axis that can occur in an X-slider.A schematic diagram shows the compensation force application section provided on the ZX plane of the X slider.A schematic diagram of the stage apparatus according to the second embodiment is shown.A schematic diagram of the stage apparatus according to the second embodiment is shown.A schematic diagram of the stage apparatus according to the second embodiment is shown.Figure 8 schematically shows the details of the voice coil motor.This is a schematic functional block diagram of the stage equipment. The following describes in detail the forms for implementing this disclosure (hereinafter also referred to as embodiments) with reference to the drawings. In the description and/or drawings, identical or equivalent components, members, processes, etc., are denoted by the same reference numerals, and redundant descriptions are omitted. The scale and shape of the illustrated parts are set for convenience to simplify the description and are not intended to be interpreted restrictively unless otherwise specified. The embodiments are illustrative and do not limit the scope of this disclosure in any way. Not all features or combinations thereof presented in the embodiments are necessarily essential to this disclosure. For convenience, embodiments are presented by breaking them down into components for each function and/or group of functions that realize them. However, one component in an embodiment may actually be realized by a combination of multiple separate components, and multiple components in an embodiment may actually be realized by a single integrated component. Furthermore, multiple embodiments and variations may be disclosed in parallel, and any components of each embodiment and/or variation may be combined in any manner as long as they do not impair each other's functions. Figure 1 is a schematic perspective view showing a stage device 1 as a drive device or positioning device according to the first embodiment of this disclosure. In this embodiment, for convenience, a three-dimensional coordinate system or XYZ coordinate system formed by mutually orthogonal X, Y, and Z axes is set. The X-axis direction is the first driving direction in which the first drive shaft 100 (described later) drives the stage 2 or table as the driven object. The Y-axis direction is the second driving direction in which the second drive shaft 200 (described later) drives the stage 2 and the first drive shaft 100 integrally. The Z-axis direction is the third direction as the normal direction to the drive plane or XY plane formed by the X and Y axes. The XY plane is preferably a horizontal plane, in which case the Z-axis direction is vertical. Note that the X, Y, and Z axes do not necessarily have to be orthogonal to each other; they only need to intersect each other. In other words, the X-axis, Y-axis, and Z-axis directions do not need to be different from each other. The stage device 1 includes a first drive shaft 100 that drives the stage 2 in the X-axis direction by magnetism, and a second drive shaft 200 that drives the stage 2 and the first drive shaft 100 together in the Y-axis direction by magnetism. In this embodiment, a pair (i.e., two) substantially identical second drive shafts 200 are provided at both ends of the first drive shaft 100 extending in the X-axis direction. Hereafter, unless otherwise specified, the two second drive shafts 200 will not be distinguished and will be described collectively. One first drive shaft 100 and two second drive shafts 200 form a substantially H shape when viewed in the Z-axis direction or from above. The two second drive shafts 200 are fixedly mounted on the surface of a base plate 3 having an XY-plane or horizontal surface. One first drive shaft 100 is in a non-contact state, separated from the surface of the base plate 3 in the Z-axis direction, allowing it to move along