JP-2026075817-A - Anomaly detection device and anomaly detection method for substrate support devices

JP2026075817AJP 2026075817 AJP2026075817 AJP 2026075817AJP-2026075817-A

Abstract

[Problem] To provide a technology that can detect abnormalities in the operation of a support member of a substrate support device. [Solution] The abnormality detection device 20 of the substrate support device 10 includes a sensor 80 configured to detect information regarding vibrations or sounds generated when a plurality of support members 40 move, and a control device 70 configured to detect abnormalities in the operation of the plurality of support members 40 based on the information detected by the sensor 80. [Selection Diagram] Figure 1

Inventors

宮▲崎▼ 充
遠藤穂積
和久井康平
松田道昭
横澤宏紀

Assignees

株式会社荏原製作所

Dates

Publication Date: 20260511
Application Date: 20241023

Claims (4)

An abnormality detection device for a substrate support device, The substrate support device is A base having multiple holes, A plurality of support members configured to support a substrate, each of the plurality of support members being inserted through each of the plurality of holes in the base, The system includes a drive device configured to move the plurality of support members vertically relative to the base, Each of the aforementioned plurality of support members is provided with a stopper at a location above the base. The plurality of support members are configured to move between a lower position in which the stopper contacts the upper surface of the base and an upper position in which the stopper is separated from the upper surface of the base and positioned above the upper surface, when driven by the drive device. The abnormality detection device is, A sensor configured to detect information regarding vibrations or sounds generated when the plurality of support members move, An abnormality detection device for a substrate support device, comprising: a control device configured to detect abnormalities in the operation of the plurality of support members based on the information detected by the sensor; and
The abnormality detection device for a substrate support device according to claim 1, wherein the information is related to vibrations or sounds generated when the plurality of support members move downward.
The control device detects abnormalities in the operation of the plurality of support members by comparing the information detected by the sensor with a preset standard, as described in claim 1 or 2.
A method for detecting abnormalities in a substrate support device, The substrate support device is A base having multiple holes, A plurality of support members configured to support a substrate, each of the plurality of support members being inserted through each of the plurality of holes in the base, The system includes a drive device configured to move the plurality of support members vertically relative to the base, Each of the aforementioned plurality of support members is provided with a stopper at a location above the base. The plurality of support members are configured to move between a lower position in which the stopper contacts the upper surface of the base and an upper position in which the stopper is separated from the upper surface of the base and positioned above the upper surface, when driven by the drive device. The aforementioned abnormality detection method is: To detect information regarding vibrations or sounds that occur when the plurality of support members move, A method for detecting abnormalities in a substrate support device, comprising detecting abnormalities in the operation of the plurality of support members based on the detected information.

Description

This invention relates to an abnormality detection device and an abnormality detection method for a substrate support device. Conventionally, a substrate support device for supporting a substrate is known to include a base having multiple holes, and multiple support members configured to support the substrate. Each of the multiple support members comprises multiple support members inserted through each of the multiple holes in the base, and a drive device configured to move the multiple support members vertically relative to the base (see, for example, Patent Documents 1 and 2). In such a substrate support device, each of the multiple support members is provided with a stopper at a location above the base. The multiple support members are configured to move between a "lower position" where the stopper contacts the upper surface of the base and an "upper position" where the stopper is separated from the upper surface of the base and located above the upper surface, when driven by the drive device. Japanese Patent Publication No. 2020-170800Japanese Patent Publication No. 2009-295751 This is a schematic diagram illustrating the configuration of a substrate processing apparatus according to the embodiment.This is a schematic diagram illustrating a state in which the support member according to the embodiment is located in an "upper position".This is a schematic diagram illustrating a view of multiple support members according to the embodiment from above.This is a flowchart illustrating an example of an anomaly detection method according to the embodiment.This is a schematic diagram illustrating an example of a case where an abnormality occurs in some of the support members of the plurality of support members according to the embodiment. (Embodiment) Embodiments of the present invention will be described below with reference to the drawings. The drawings are schematic in order to facilitate understanding of the features, and the dimensional ratios of each component may not be the same as those of the actual components. The drawings also show the X-Y-Z Cartesian coordinate system as needed. In this Cartesian coordinate system, the Z direction corresponds to upward, and the -Z direction corresponds to downward (the direction in which gravity acts). Figure 1 is a schematic diagram illustrating the configuration of the substrate processing apparatus 1 according to this embodiment. The substrate processing apparatus 1 according to this embodiment is capable of performing a predetermined treatment on a substrate Wf. The specific examples of the predetermined treatment are not particularly limited; for example, various treatments such as cleaning and drying can be used. In this embodiment, cleaning is used as an example of the predetermined treatment. In this case, the substrate processing apparatus 1 may be equipped with a cleaning nozzle 2 for discharging cleaning liquid toward the substrate Wf, as illustrated in Figure 1. With this configuration, the substrate Wf can be cleaned by the cleaning liquid discharged from the cleaning nozzle 2. Furthermore, in this case, the substrate processing apparatus 1 may be equipped with a cleaning tank 3 for recovering the cleaning liquid after cleaning. As illustrated in Figure 1, the substrate processing apparatus 1 includes a substrate support device 10 for supporting the substrate Wf. In the substrate processing apparatus 1, the substrate Wf is supported by the substrate support device 10, and a predetermined process is performed on the substrate Wf. In Figure 1, the cross-section of the substrate support device 10 is schematically shown. As illustrated in Figure 1, the substrate support device 10 comprises a base 30, a plurality of support members 40, a drive device 50, and a control device 70. The substrate support device 10 may also include an elastic member 60. Figure 1 illustrates the state where the support members 40 are located in the "lower position" described later. Figure 2 is a schematic diagram illustrating the state where the support members 40 are located in the "upper position" described later. Figure 3 is a schematic diagram illustrating the state where the plurality of support members 40 are viewed from above. Referring to Figure 1, the control device 70 according to this embodiment is configured, as an example, to control the substrate processing apparatus 1, the substrate support apparatus 10, and the abnormality detection apparatus 20, which will be described later, as a whole. However, the configuration of this embodiment is not limited to this. This embodiment can also be configured to include, for example, separate control devices for controlling the substrate processing apparatus 1, the substrate support apparatus 10, and the abnormality detection apparatus 20. The control device 70 is comprised of a computer. Specifically, the control device 70 (i.e., the computer) includes a processor 71 and a storage device 72 as a non-temporary storage medium. In