JP-2026076017-A - Data creation device, data creation method, and data creation program

JP2026076017AJP 2026076017 AJP2026076017 AJP 2026076017AJP-2026076017-A

Abstract

[Problem] To improve the generation efficiency of optical pulses for laser processing that are formed using a spatial light modulator. [Solution] The data creation device 1 is a device for creating data to control an SLM 24 that shapes light pulses for laser processing, and comprises: a waveform setting unit 11 which sets information on a plurality of different time-intensity waveforms, each containing a plurality of light pulses; a spectrum design unit 12 which generates a plurality of sets of intensity spectral functions and phase spectral functions based on each of the plurality of time-intensity waveforms; a data generation unit 15 which creates a plurality of data based on each of the plurality of sets of intensity spectral functions and phase spectral functions; and a data determination unit 16 which calculates the generation efficiency of each of the plurality of time-intensity waveforms in the SLM 24 based on each of the plurality of data, and determines data to control the SLM 24 from the plurality of data based on the generation efficiency. [Selection Diagram] Figure 1

Inventors

新垣隆
渡辺向陽
重松恭平
川合一希

Assignees

浜松ホトニクス株式会社

Dates

Publication Date: 20260511
Application Date: 20241023

Claims (9)

A device for creating data to control a spatial light modulator that shapes light pulses for laser processing, A waveform setting unit sets information about multiple time-intensity waveforms, each containing multiple light pulses, which are all different from each other. A spectral design unit that generates each of a plurality of sets of intensity spectral functions and phase spectral functions based on each of the plurality of time-intensity waveforms, A data generation unit that creates each of a plurality of data based on each of the plurality of sets of the intensity spectral function and the phase spectral function, A data creation device comprising: a data determination unit that calculates the generation efficiency of each of the multiple time-intensity waveforms in the spatial light modulator based on each of the multiple data; and a data determination unit that determines data to control the spatial light modulator from among the multiple data based on the generation efficiency.
The data creation apparatus according to claim 1, wherein the data determination unit determines the data for controlling the spatial light modulator with the highest generation efficiency from among the plurality of data.
The data creation apparatus according to claim 1, wherein the minimum peak value of the plurality of light pulses is 80% or more of the maximum peak value of the plurality of light pulses.
The data creation apparatus according to claim 3, wherein the minimum peak value is a value between 80% and 95% of the maximum peak value.
The data creation apparatus according to claim 1, wherein the waveform setting unit sets information regarding the time-intensity waveform, which includes 50 or fewer light pulses.
The data creation apparatus according to claim 5, wherein the waveform setting unit sets information regarding the time-intensity waveform, which includes 20 or fewer light pulses.
The data creation apparatus according to claim 1, wherein the waveform setting unit sets information regarding the time-intensity waveform, which includes the plurality of optical pulses having a pulse interval of 10 fs or more and 100 ps or less.
A method for creating data to control a spatial light modulator that shapes light pulses for laser processing, A waveform setting step involves setting information about multiple time-intensity waveforms, each containing multiple light pulses, that are different from each other. A spectral design step that generates each of several sets of intensity spectral functions and phase spectral functions based on each of the aforementioned multiple time-intensity waveforms, A data generation step of creating each of the multiple data sets based on each of the multiple sets of intensity spectral functions and phase spectral functions, A data creation method comprising: a data determination step of calculating the generation efficiency of each of the multiple time-intensity waveforms in the spatial light modulator based on each of the multiple data; and determining data to control the spatial light modulator from the multiple data based on the generation efficiency.
A program that creates data to control a spatial light modulator that shapes light pulses for laser processing, A waveform setting step involves setting information about multiple time-intensity waveforms, each containing multiple light pulses, that are different from each other. A spectral design step that generates each of several sets of intensity spectral functions and phase spectral functions based on each of the aforementioned multiple time-intensity waveforms, A data generation step of creating each of the multiple data sets based on each of the multiple sets of intensity spectral functions and phase spectral functions, A data creation program comprising: a data determination step of calculating the generation efficiency of each of the multiple time-intensity waveforms in the spatial light modulator based on each of the multiple data; and determining data to control the spatial light modulator from the multiple data based on the generation efficiency.

Description

This disclosure relates to a data creation device, a data creation method, and a data creation program. Conventionally, a technique for shaping optical pulses for laser processing using a spatial light modulator (SLM) is known. An SLM shapes the time waveform of an optical pulse by modulating its intensity spectrum and phase spectrum. By using a multi-pulse generated by modulating a single pulse with an SLM for laser processing, the processing efficiency of laser processing can be improved (see, for example, Non-Patent Documents 1 and 2). Du, Kun, et al., “Controllable photon energy deposition efficiency in laser processing of fused silica by temporally shaped femtosecond pulse: Experimental and theoretical study”, Optics and Laser Technology, 128 (2020):106265.Jiang, Lan, et al., "High-throughput rear-surface drilling of microchannels in glass based on electron dynamics control using femtosecondpulse trains." (2012): 2781. Figure 1 is a schematic diagram showing the configuration of a data creation device according to one embodiment of the present disclosure.Figure 2 shows the configuration of the optical system provided by the optical control device.Figure 3 shows the modulation plane of the SLM.Figure 4(a) shows, as an example, the spectral waveform (spectral phase and spectral intensity) of a single-pulse input light, and Figure 4(b) shows the time-intensity waveform of the same input light.Figure 5(a) shows, as an example, the spectral waveform (spectral phase and spectral intensity) of the output light when a rectangular wave-shaped phase spectral modulation is applied to an SLM, and Figure 5(b) shows the time-intensity waveform of the same output light.Figure 6 is a schematic diagram showing an example of the hardware configuration of a data creation device.Figure 7 shows examples of time-intensity waveforms set in the waveform setting unit.Figure 8 shows an example of the calculation procedure for a phase spectrum using the iterative Fourier method.Figure 9 is a flowchart showing the data creation method.Figure 10 shows the generation efficiency in the SLM corresponding to the time-intensity waveform set in the waveform setting unit, for each number of pulses.Figure 11(a) shows the spectral waveform corresponding to data point P1 in Figure 10 when there are 9 pulses, and Figure 11(b) shows the time intensity waveform corresponding to the spectral waveform.Figure 12(a) shows the spectral waveform corresponding to data point P2 in Figure 10 when there are 9 pulses, and Figure 12(b) shows the time intensity waveform corresponding to the spectral waveform.Figure 13(a) shows the spectral waveform of the output light as an alternative example, and Figure 13(b) shows the time-intensity waveform corresponding to the spectral waveform.Figure 14(a) shows the spectral waveform of the output light as an alternative example, and Figure 14(b) shows the time-intensity waveform corresponding to the spectral waveform. The following describes in detail, with reference to the drawings, embodiments of a data creation device, data creation method, and data creation program according to one aspect of this disclosure. Note that in each drawing, identical or corresponding elements are denoted by the same reference numerals, and redundant explanations may be omitted. Figure 1 is a schematic diagram showing the configuration of a data creation device 1 according to one embodiment of this disclosure. Figure 2 is a diagram showing the configuration of the optical system 20 included in the optical control device 2. The data creation device 1 constitutes, for example, a part of the optical control device 2. As shown in Figure 1, the data creation device 1 includes a waveform setting unit 11, a spectrum design unit 12, a data generation unit 15, and a data determination unit 16. The optical control device 2 also includes an optical system 20 and a light source 21. As shown in Figure 2, the optical system 20 includes a diffraction grating 22, a lens 23, an SLM 24, a lens 25, and a diffraction grating 26. The optical control device 2 generates output light Ld, which includes multiple optical pulses, from an input optical light La, which is a single optical pulse. The data creation device 1 creates data for the optical control device 2 to generate output light Ld from the input optical light La. The output light Ld is used for laser processing. The light source 21 outputs input light La, which is input to the optical system 20. The light source 21 is a laser light source such as a solid-state laser light source, gas laser light source, liquid laser light source, semiconductor laser light source, or fiber laser light source, and the input light La is, for example, coherent pulsed light. The optical system 20 has an SLM 24 and receives control signals SC from the data creation device 1 to control each pixel of the SLM 24. The optical system 20 converts the input light La from the light source 21 into output light Ld. The control signa