JP-2026076215-A - Observation support device
Abstract
[Problem] To provide an observation support device that can prevent the position of the observation position display image from being lost, even if the current magnification of the observation position display unit is significantly different from the magnification of the observation position display image. [Solution] The sample observation support device includes an observation position display unit that displays the positions of multiple captured images of a sample taken by a charged particle beam device in correspondence with an image display unit, a display processing unit that controls the observation position display unit, and a representative image selection processing unit that selects a representative image based on the multiple captured images. The display processing unit controls the representative image to a size that is easy to see and displays it on the observation position display unit in response to a change in the magnification of the image display unit. [Selection Diagram] Figure 2B
Inventors
- 陳 偉健
- 千葉 寛幸
- 三瀬 大海
Assignees
- 株式会社日立ハイテク
Dates
- Publication Date
- 20260511
- Application Date
- 20260115
Claims (5)
- A device for assisting in the observation of a sample, An observation position display unit that displays the positions of multiple images of a sample captured by a charged particle beam device, corresponding to the image display unit, A display processing unit that controls the observation position display unit, A representative image selection processing unit that selects a representative image based on the aforementioned plurality of captured images, Equipped with, The observation support device extracts a predetermined region and groups the captured images based on the predetermined region. An observation support device characterized by the following features.
- In the observation support device according to claim 1, The observation support device saves the predetermined area as a display layer. An observation support device characterized by the following features.
- In the observation support device according to claim 1, The observation support device is, The sample information output from a device other than the charged particle beam apparatus is saved as a display layer. The representative image selection processing unit selects the captured image captured at a position corresponding to the target area as the representative image, based on the results of image processing for a specific target area of the display layer. An observation support device characterized by the following features.
- In the observation support device according to claim 3, The observation support device further includes an image grouping processing unit that groups the captured images that are included within the range of the target area, The representative image selection processing unit selects a representative image from among the captured images grouped into the same group, based on the representative image selection conditions. An observation support device characterized by the following features.
- In the observation support device according to claim 3, The observation support device is, The result of image processing on the aforementioned target region, An imaging field mesh formed according to imaging conditions, Based on the overlap determination result, the group of imaging regions corresponding to the target region is determined. An observation support device characterized by the following features.
Description
This invention relates to an observation support device, and more particularly to one that supports observation using a charged particle beam device. A charged particle beam analyzer is a device that manipulates the surface of a sample with a finely focused charged particle beam in a vacuum, detects the signal emitted from the sample, and creates a two-dimensional profile image of the sample surface. Because observation is performed in a vacuum, the observed sample cannot be visually confirmed. To identify the observation position on the sample, an observation support function is known that displays an image taken at a lower magnification than the observation magnification, and indicates the observation position on the low-magnification image. Prior art in this field includes Patent Document 1. Patent Document 1 states that, "By superimposing multiple observation position display images with different magnifications on the observation position display unit based on the magnification and coordinates at the time the observation image was acquired, the observation position can be displayed even if the magnification of the observation image and the magnification of the image displaying the observation position differ significantly." International Public Release Brochure No. WO17/090100 This is an example of a schematic diagram of a charged particle beam apparatus according to Embodiment 1 of the present invention.This is an example of the observation position display screen for a charged particle beam apparatus according to Embodiment 1 of the present invention.This is an example of the observation position display screen for a charged particle beam apparatus according to Embodiment 1 of the present invention.This is an example of the observation position display screen for a charged particle beam apparatus according to Embodiment 1 of the present invention.This is an example of the observation position display screen for a charged particle beam apparatus according to Embodiment 1 of the present invention.This is an example of the observation position display screen for a charged particle beam apparatus according to Embodiment 1 of the present invention.This is an example of the observation position display screen for a charged particle beam apparatus according to Embodiment 1 of the present invention.This is an example of an observation position display screen for a charged particle beam apparatus according to Embodiment 2 of the present invention.This is an example of an observation position display screen for a charged particle beam apparatus according to Embodiment 2 of the present invention.This is an example of an observation position display screen for a charged particle beam apparatus according to Embodiment 2 of the present invention.This is an example of an observation position display screen for a charged particle beam apparatus according to Embodiment 2 of the present invention.This is an example of an observation position display screen for a charged particle beam apparatus according to Embodiment 2 of the present invention.This is an example of an observation position display screen for a charged particle beam apparatus according to Embodiment 2 of the present invention.This is an example of an observation position display screen for a charged particle beam apparatus according to Embodiment 2 of the present invention.This is an example of an observation position display screen for a charged particle beam apparatus according to Embodiment 2 of the present invention.This is an example of an observation position display screen for a charged particle beam apparatus according to Embodiment 3 of the present invention.This is an example of an observation position display screen for a charged particle beam apparatus according to Embodiment 3 of the present invention.This is an example of an observation position display screen for a charged particle beam apparatus according to Embodiment 3 of the present invention.This is an example of an observation position display screen for a charged particle beam apparatus according to Embodiment 3 of the present invention.This is an example of an observation position display screen for a charged particle beam apparatus according to Embodiment 3 of the present invention.This is an example of an observation position display screen for a charged particle beam apparatus according to Embodiment 3 of the present invention.This is an example of an observation position display screen for a charged particle beam apparatus according to Embodiment 3 of the present invention.This is an example of the observation position display screen for a charged particle beam apparatus according to Embodiment 4 of the present invention.This is an example of the observation position display screen for a charged particle beam apparatus according to Embodiment 4 of the present invention.This is the screen for setting the grouping conditions for captured images and the selection conditions for t