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JP-2026076243-A - Shape inspection device, height image processing method, and height image processing program

JP2026076243AJP 2026076243 AJP2026076243 AJP 2026076243AJP-2026076243-A

Abstract

[Problem] To provide a shape inspection device, an inspection device, a height image processing method, and a height image processing program that can accurately inspect an object to be measured. [Solution] As the object to be measured S moves relative to the Y-axis, the profile data generation unit 201 sequentially generates multiple profile data. The height image generation unit 202 extracts feature points from each of the profile data and moves each of the profile data in a plane intersecting the Y-axis so that the extracted feature points are aligned in a line in the direction corresponding to the Y-axis. The height image generation unit 202 then corrects the height image by arranging the moved profile data Pd in the direction corresponding to the Y-axis. [Selection Diagram] Figure 8

Inventors

  • 金山 薫
  • 跡路 隆

Assignees

  • 株式会社キーエンス

Dates

Publication Date
20260511
Application Date
20260121

Claims (12)

  1. A shape inspection apparatus comprising: a light projection unit that irradiates a slit light having an extension in the X-axis direction, or a spot light scanned in the X-axis direction, onto a measurement target that moves relative to it in the Y-axis direction intersecting the X-axis; a light receiving unit that receives reflected light from each position in the X-axis direction and outputs a light receiving signal indicating the amount of light received; a profile data generation unit that generates profile data of the measurement target in a plane intersecting the Y-axis direction based on the light receiving signal; and an inspection unit that inspects the shape of the measurement target based on the profile data generated by the profile data generation unit, A height image generation unit sequentially acquires profile data of the object to be measured that moves relative to it in the Y-axis direction, and generates a height image of the object to be measured based on the sequentially acquired plurality of profile data, The system includes a setting unit that accepts the setting of a region from which to be used as an alignment reference and from which to extract feature points based on the shape of the profile data, based on each of the profile data generated by the profile data generation unit, The height image generation unit further, For each of the profile data generated by the profile data generation unit, Apply at least one extraction method of peak, bottom, mean, or edge to the profile data included in the region from which feature points set in the setting unit are extracted, and extract feature points that will serve as alignment criteria from the profile data included in the region from which feature points set in the setting unit are extracted. An offset amount is calculated to correct the relative positional misalignment between each profile data so that the extracted feature points are aligned in a line in the direction corresponding to the Y-axis. According to the calculated offset amount, while maintaining the overall shape of the profile data, the entire profile data is integrally offset in the X-axis direction or Z-axis direction within a plane intersecting the Y-axis. A shape inspection device characterized by correcting the height image by arranging the offset profile data in a direction corresponding to the Y-axis.
  2. A shape inspection apparatus according to claim 1, The height image generation unit, The positions of the feature points are aligned in the direction corresponding to the Y-axis, and each of the profile data is moved in such a way that the positional misalignment between each of the profile data generated by the profile data generation unit is reduced. A shape inspection device characterized by correcting the height image by arranging the moved profile data in a direction corresponding to the Y-axis.
  3. A shape inspection apparatus according to claim 1 or 2, The height image generation unit, Based on the height of the feature points extracted from each of the aforementioned profile data, a reference height is calculated. A shape inspection apparatus characterized by moving each of the aforementioned profile data in the Z-axis direction that intersects the X-axis direction and the Y-axis direction according to the difference between the height of the feature point and the reference height, and arranging the moved profile data in the direction corresponding to the Y-axis, thereby correcting the height image so that the heights of each feature point extracted from each of the aforementioned profile data are aligned in the direction corresponding to the Y-axis.
  4. A shape inspection apparatus according to any one of claims 1 to 3, The height image generation unit, Based on the X positions of the feature points extracted from each of the aforementioned profile data, a reference X position is calculated. A shape inspection apparatus characterized by moving each of the aforementioned profile data in the X-axis direction according to the difference between the X position of the feature point and the reference X position, and arranging the moved profile data in the direction corresponding to the Y axis, thereby correcting the height image so that the X positions of each feature point extracted from each of the aforementioned profile data are aligned in a line in the direction corresponding to the Y axis.
  5. A shape inspection apparatus according to claim 4, The setting unit accepts the setting of a first region and a second region as regions from which the feature points are extracted. The height image generation unit, with respect to each of the profile data, The extraction method is applied to the profile data contained in the first region to extract a first auxiliary feature point from the profile data contained in the first region, and the extraction method is applied to the profile data contained in the second region to extract a second auxiliary feature point from the profile data contained in the second region. Based on the first auxiliary feature point and the second auxiliary feature point, the feature point is calculated. Based on the X positions of the multiple feature points calculated from each of the aforementioned profile data, a reference X position is calculated. A shape inspection apparatus characterized by moving each of the aforementioned profile data in the X-axis direction according to the difference between the X position of the feature point and the reference X position, and arranging the moved profile data in the direction corresponding to the Y axis, thereby correcting the height image so that the X positions of the feature points are aligned in a line in the direction corresponding to the Y axis.
  6. A shape inspection apparatus according to any one of claims 1 to 4, The setting unit accepts the settings for the first region and the second region. The height image generation unit, with respect to each of the profile data, The approximate straight line of the profile data in the first region and the approximate straight line of the profile data in the second region are calculated. A shape inspection apparatus characterized by calculating the intersection points of the approximate straight line of the profile data in the first region and the approximate straight line of the profile data in the second region as feature points.
  7. A shape inspection apparatus according to claim 1 or 2, The setting unit accepts the setting of an X-correction reference region in a fixed coordinate system and a Z-correction reference region in a relative coordinate system based on the object to be measured, as the regions from which the feature points are extracted. The height image generation unit, For each of the profile data generated by the profile data generation unit, feature points in the X-axis direction are extracted from the X-correction reference region. Based on the X positions of the multiple feature points in the X-axis direction extracted from each of the aforementioned profile data, a reference X position is calculated. Each of the aforementioned profile data is moved in the X-axis direction according to the difference between the X position of the feature point in the X-axis direction and the reference X position, and the moved profile data is arranged in the direction corresponding to the Y-axis to generate an X-corrected height image in which the X positions of the feature points in the X-axis direction are aligned in a line in the direction corresponding to the Y-axis. For the X-corrected height image, the Z-correction reference region is set based on the position of the object to be measured included in the X-corrected height image. For each of the aforementioned profile data, feature points in the Z-axis direction that intersect the X-axis direction and the Y-axis direction are extracted from the Z-correction reference region. Based on the multiple feature points in the Z-axis direction extracted from each of the aforementioned profile data, the reference height is calculated. A shape inspection apparatus characterized by moving each of the aforementioned profile data in the Z-axis direction according to the difference between the height of the feature point in the Z-axis direction and the reference height, and arranging the moved profile data in the direction corresponding to the Y-axis, thereby generating a height image in which the heights of the feature points in the Z-axis direction are aligned in a line in the direction corresponding to the Y-axis.
  8. A shape inspection apparatus according to claim 1 or 2, The setting unit accepts the setting of a Z-correction reference region in a fixed coordinate system and an X-correction reference region in a relative coordinate system based on the object to be measured, as the regions from which the feature points are extracted. The height image generation unit, For each of the profile data generated by the profile data generation unit, feature points in the Z-axis direction that intersect the X-axis direction and the Y-axis direction are extracted from the Z-correction reference region. Based on the heights of the multiple feature points in the Z-axis direction extracted from each of the aforementioned profile data, a reference height is calculated. Each of the aforementioned profile data is moved in the Z-axis direction according to the difference between the height of the feature point in the Z-axis direction and the reference height, and the moved profile data is arranged in the direction corresponding to the Y-axis to generate a Z-corrected height image in which the heights of the feature points in the Z-axis direction are aligned in a line in the Y-axis direction. For the Z-corrected height image, the X-correction reference region is set based on the reference height. For each of the aforementioned profile data, feature points in the X-axis direction are extracted from the X-correction reference region. Based on the multiple feature points in the X-axis direction extracted from each of the aforementioned profile data, the reference X position is calculated. A shape inspection apparatus characterized by moving each of the aforementioned profile data in the X-axis direction according to the difference between the X position of the feature point in the X-axis direction and the reference X position, and arranging the moved profile data in a direction corresponding to the Y-axis, thereby generating a height image in which the X positions of the feature points in the X-axis direction are aligned in a line in the direction corresponding to the Y-axis.
  9. A shape inspection apparatus comprising: a light projection unit that irradiates a slit light having an extension in the X-axis direction, or a spot light scanned in the X-axis direction, onto a measurement target that moves relative to it in the Y-axis direction intersecting the X-axis; a light receiving unit that receives reflected light from each position in the X-axis direction and outputs a light receiving signal indicating the amount of light received; a profile data generation unit that generates profile data of the measurement target in a plane intersecting the Y-axis direction based on the light receiving signal; and an inspection unit that inspects the shape of the measurement target based on the profile data generated by the profile data generation unit, A height image generation unit sequentially acquires profile data of the object to be measured that moves relative to it in the Y-axis direction, and generates a height image of the object to be measured based on the sequentially acquired plurality of profile data, A display control unit that displays the height image for setting, generated by the height image generation unit, on the display unit, The display unit includes a setting unit that accepts the setting of a two-dimensional region extending in the direction corresponding to the Y-axis as a correction reference region on the height image for setting that is displayed on the display unit, The height image generation unit further, For each of the profile data generated by the profile data generation unit, the profile data included in the correction reference region is identified, and the slope value of the profile data is calculated. A shape inspection device characterized by correcting a height image by moving each of the profile data in a rotational direction within a plane intersecting the direction corresponding to the Y-axis, based on the difference between the calculated inclination value and a predetermined correction reference angle.
  10. A shape inspection apparatus comprising: a light projection unit that irradiates a slit light having an extension in the X-axis direction, or a spot light scanned in the X-axis direction, onto a measurement target that moves relative to it in the Y-axis direction intersecting the X-axis; a light receiving unit that receives reflected light from each position in the X-axis direction and outputs a light receiving signal indicating the amount of light received; a profile data generation unit that generates profile data of the measurement target in a plane intersecting the Y-axis direction based on the light receiving signal; and an inspection unit that inspects the shape of the measurement target based on the profile data generated by the profile data generation unit, A height image generation unit sequentially acquires profile data of the object to be measured that moves relative to it in the Y-axis direction, and generates a height image of the object to be measured based on the sequentially acquired plurality of profile data, The system includes a setting unit that accepts the setting of a region from which feature points based on the shape of the profile data are extracted, which will serve as the alignment standard, from each of the profile data generated by the profile data generation unit, The height image generation unit further, For each of the profile data generated by the profile data generation unit, Applying at least one extraction method—peak, bottom, average, or edge—to the profile data included in the region from which feature points are extracted as set in the setting unit, and extracting feature points that serve as alignment criteria as ideal feature points from the profile data included in the region from which feature points are extracted as set in the setting unit, An offset amount is calculated to correct the relative positional misalignment between each profile data so that the ideal feature points are aligned in a line in the direction corresponding to the Y-axis. According to the calculated offset amount, while maintaining the overall shape of the profile data, the entire profile data is integrally offset in the X-axis direction or Z-axis direction within a plane intersecting the Y-axis. A shape inspection device characterized by correcting the height image by arranging the offset profile data in a direction corresponding to the Y-axis.
  11. A height image processing method used when irradiating an object to be measured that is moving relative to the X-axis in a Y-axis direction intersecting the X-axis with a slit beam having an extension in the X-axis direction, or a spot beam scanned in the X-axis direction, sequentially generating profile data of the object to be measured in a plane intersecting the Y-axis direction based on a light reception signal indicating the amount of reflected light received from each position in the X-axis direction, and generating a height image of the object to be measured based on the sequentially generated profile data, wherein From each of the sequentially generated profile data mentioned above, the system accepts the setting of regions that will serve as alignment criteria and from which feature points based on the shape of the profile data will be extracted. For each of the sequentially generated profile data, Apply at least one extraction method of peak, bottom, mean, or edge to extract alignment criterion feature points from the profile data included in the region from which the set feature points are extracted. An offset amount is calculated to correct the relative positional misalignment between each profile data so that the extracted feature points are aligned in a line in the direction corresponding to the Y-axis. According to the calculated offset amount, while maintaining the overall shape of the profile data, the entire profile data is integrally offset in the X-axis direction or Z-axis direction within a plane intersecting the Y-axis. A height image processing method that corrects the height image by arranging the offset profile data in a direction corresponding to the Y-axis.
  12. A height image processing program for use in an optical displacement meter, comprising: a light projection unit that irradiates a slit light having an extension in the X-axis direction, or a spot light scanned in the X-axis direction, onto a measurement target that is moving relative to it in the Y-axis direction intersecting the X-axis; a light receiving unit that receives reflected light from each position in the X-axis direction and outputs a light receiving signal indicating the amount of light received; and a profile data generation unit that sequentially generates profile data of the measurement target in a plane intersecting the Y-axis direction based on the light receiving signal, From each of the sequentially generated profile data, a process is performed to accept the setting of regions that will serve as alignment criteria and from which feature points based on the shape of the profile data will be extracted. For each of the sequentially generated profile data, A process of applying at least one extraction method of peak, bottom, mean, and edge to extract alignment-based feature points from profile data included in the region from which the set feature points are extracted, A process to calculate an offset amount to correct the relative positional misalignment between each profile data so that the extracted feature points are aligned in a line in the direction corresponding to the Y-axis, The process involves offsetting the entire profile data in the X-axis or Z-axis direction within a plane intersecting the Y-axis, while maintaining the overall shape of the profile data, according to the calculated offset amount. A process to correct the height image by arranging the offset profile data in the direction corresponding to the Y-axis, A height image processing program that causes the optical displacement sensor to perform the following operation.

Description

This invention relates to a technique for detecting the displacement of an object to be measured using a triangulation method, and more particularly to a shape inspection device, an processing device, a height image processing method, and a height image processing program for inspecting the shape of an object to be measured based on generated profile data. Optical displacement sensors using the light-section method are known as devices for measuring the profile of an object. In a typical optical displacement sensor using the light-section method, light is shone onto the moving object, and profile data representing the three-dimensional shape of the object can be generated based on the received light signal indicating the amount of reflected light reflected from the object's surface. By arranging multiple generated profile data in the direction of the object's movement, a height image of the object can be obtained. For example, when measuring the profile of an object moving horizontally using an optical displacement sensor, the object may also vibrate in the height or width directions. If the object vibrates in the height direction during measurement, the profile data will include a vibration component in the height direction. Similarly, if the object vibrates laterally during measurement, the profile data will include a vibration component in the lateral direction. Due to the inclusion of these vibration components, the height image may not accurately reflect the shape of the object being measured. Therefore, as disclosed in, for example, Patent Documents 1 and 2, inspection methods are known that suppress the influence of the vibration components by estimating and removing them through image processing. Japanese Patent Publication No. 2017-151066Japanese Patent Publication No. 2006-189315 This is a block diagram showing the configuration of a shape inspection device according to the first embodiment of the present invention.This is a perspective view of the imaging head and the object being measured.This figure shows the relationship between the light irradiation position on the surface of the object being measured and the light incident position at the light receiving unit.This figure shows the distribution of light received on the light-receiving surface of the light-receiving unit.This figure shows the light reception distribution in the pixel array in the X2 direction.This figure shows the detected peak position and peak brightness value.This figure shows three-dimensional data and luminance image data.Figure 1 is a block diagram showing the configuration of the processing unit.This is an image showing the ideal height of the object being measured.This is a height image when non-periodic vibrations are applied.This diagram explains the correction of profile data.This diagram explains the correction of profile data.This is a diagram illustrating a user interface.This is a diagram illustrating a user interface.This flowchart shows the processing performed by the control unit.This flowchart shows the processing performed by the control unit.This flowchart shows the processing performed by the control unit.This is a diagram illustrating a user interface.This is a diagram illustrating a user interface.This flowchart shows the processing performed by the control unit.This diagram illustrates the correction parameters.This diagram shows the set correction reference area.This is a diagram illustrating a user interface.This flowchart shows the processing performed by the control unit.This flowchart shows the processing performed by the control unit.This is a diagram showing tilt correction.This is a diagram illustrating a user interface.This is a diagram illustrating a user interface.This flowchart shows the processing performed by the control unit.This flowchart shows the processing performed by the control unit.This flowchart shows the processing performed by the control unit.This flowchart shows the processing performed by the control unit.This flowchart shows the processing performed by the control unit.This flowchart shows the processing performed by the control unit.This diagram explains tilt correction.This is a diagram explaining the estimation of the reference plane.This diagram illustrates the case where multiple correction reference regions are set.This is a block diagram showing the configuration of the processing apparatus in a second embodiment of the present invention. The embodiments of the present invention will be described in detail below with reference to the drawings. The following description of preferred embodiments is essentially illustrative and is not intended to limit the present invention, its applications, or its uses. [1] First Embodiment (1) Configuration of Shape Inspection Apparatus Hereinafter, a shape inspection apparatus, processing apparatus, height image processing method, and height image processing program according to embodiments of the present invention will be describe