JP-2026514303-A - Non-contact transport alignment device and non-contact transport alignment method using the same

JP2026514303AJP 2026514303 AJP2026514303 AJP 2026514303AJP-2026514303-A

Abstract

The conveying alignment method for a non-contact conveying alignment device includes a conveying alignment movement unit that adjusts the exit position of a first product conveying device on which the products to be conveyed are placed and which moves the products in a straight line; a conveying position sensing unit that senses the entrance position of a second product conveying device that is located separately from the first product conveying device and receives the products moved in a straight line by the first product conveying device and moves them in a straight line; and an alignment control unit that controls the operation of the conveying alignment movement unit and adjusts the exit position of the first product conveying device in accordance with the entrance position of the second product conveying device sensed by the conveying position sensing unit.

Inventors

リュ，ソンウ
キム，ドクホ
キム，ヘヨプ
パク，ジュンモ
イ，フンギュ

Assignees

三星ディスプレイ株式會社

Dates

Publication Date: 20260508
Application Date: 20240430
Priority Date: 20230502

Claims (14)

A transport alignment moving unit adjusts the exit position of a first product transport device that moves the products to be transported in a straight line, where the products to be transported are placed. A transport position sensing unit that senses the entrance position of a second product transport device, which is positioned separately from the first product transport device and receives and linearly moves products that are linearly moved by the first product transport device, A non-contact conveying and aligning device, characterized by including an alignment control unit that controls the operation of the conveying and aligning moving unit and adjusts the exit position of the first product conveying device in accordance with the entrance position of the second product conveying device sensed by the conveying position sensing unit.
The aforementioned transport position sensing unit is When the transport direction of a product to be transported to the first product transport device, which is perpendicular to the second direction on a plane, is the first direction, the system includes a first entrance position sensing unit that senses the entrance position of the second product transport device in the second direction. The non-contact conveying and aligning device according to claim 1, characterized in that the conveying and aligning moving unit includes an aligning moving device that moves the first product conveying device on a plane in a direction different from the first direction and adjusts the exit position of the first product conveying device.
The transport position sensing unit further includes a linear movement direction sensing unit that senses the angle of the first product transport device with respect to the transport direction on a plane, The aforementioned transport and alignment moving unit is The base support section on which the first product transport device is located is located at the top, The non-contact conveying alignment device according to claim 2, further comprising an angle-adjusting planar moving part located below the base support part, which adjusts the angle of the base support part on the plane and adjusts the conveying direction angle of the first product conveying device.
The linear movement direction sensing unit is positioned at a distance from both sides of the first product conveying device and includes a first distance sensing unit and a second distance sensing unit for sensing the distance to the second product conveying device, as described in claim 3.
The non-contact conveying alignment device according to claim 3, characterized in that the angle-adjusting planar moving section includes a plurality of two-axis moving units that are movable in the first and second directions.
The transport position sensing unit includes a second entrance position sensing unit that senses the height of the first product transport equipment. The non-contact conveying and aligning device according to claim 2, characterized in that the conveying and aligning moving unit further includes a conveying lifting device for raising and lowering the first product conveying device.
The first entrance position sensing unit and the second entrance position sensing unit are, A sensor section of a camera substrate is located on either the first transport section, which includes the first product transport equipment, or the second transport section, which includes the second product transport equipment. The non-contact transport alignment device according to claim 6, further comprising a reference position display unit disposed on the other side of the first transport unit and the second transport unit, which displays a reference position confirmed via video from the sensor unit.
The system further includes a transport travel unit that moves the first product transport device toward the second product transport device and sets the distance between the first product transport device and the second product transport device, The aforementioned transport and alignment moving unit is The non-contact conveying alignment device according to claim 1, further comprising a distance adjustment device that moves the first product conveying device back and forth in the same direction as the conveying direction of the product, and readjusts the distance between the first product conveying device and the second product conveying device set by the conveying travel unit.
In a non-contact transport alignment method in which a product is moved in a straight line from a first product transport device to a second product transport device, which are spaced apart from each other, the exit of the first product transport device and the entrance of the second product transport device are aligned, A position sensing step to confirm the position of the second product transport device, A non-contact transport alignment method, characterized by including a transport position alignment step after the position sensing step, which involves adjusting the position of the first product transport device to align it in a straight line with the second product transport device.
The position sensing step is, A first position sensing process that senses the position of the second product conveying device relative to the second direction when the first direction is different from the second direction which is the linear movement direction of the product, The process includes a second position sensing process for sensing the position of a second product conveying device in a third direction different from the first direction, The aforementioned transport position alignment step is, The non-contact conveying alignment method according to claim 9, characterized in that it includes a step of moving the first product conveying device in a second or third direction.
The first position sensing process and the second position sensing process are as follows: The non-contact transport alignment method according to claim 10, characterized in that the sensor portion of the camera base located on the first product transport device side confirms the position indicator hole of the target bracket located on the second product transport device side, and senses the position of the second product transport device in the second direction and the position in the third direction.
The position sensing step further includes a transport direction sensing step of sensing the angle of the first product transport device with respect to the transport direction on a plane, The transport position alignment step includes a transport direction changing process that changes the angle with respect to the transport direction on the plane of the first product transport equipment, The non-contact conveying alignment method according to claim 10, characterized in that the conveying direction changing process selectively operates a plurality of two-axis moving units that are movable in a first direction and a second direction on a base support portion located on the upper surface of the first product conveying device, thereby changing the angle with respect to the conveying direction on the plane of the first product conveying device.
The transport direction sensing process is as follows: The non-contact conveying alignment method according to claim 12, characterized in that a first distance sensing unit and a second distance sensing unit, positioned at a distance from both sides of the first product conveying device, measure the distance between the second product conveying devices and sense the angle of the first product conveying device on the plane.
Prior to the position sensing step, the method further includes a transport equipment moving step in which the first product transport equipment is moved to the transport travel section and positioned at a transport location separated from the second product transport equipment, The aforementioned transport position alignment step is, The non-contact conveying alignment method according to claim 9, further comprising a distance readjustment step of moving the first product conveying device, which is located at a conveying position separated from the second product conveying device, back and forth in the same direction as the conveying direction of the product, and readjusting the distance between the second product conveying devices.

Description

This invention relates to a contactless transport alignment device and a contactless transport alignment method utilizing the same. More specifically, it relates to a contactless transport alignment device for aligning two contactless transport devices, such as magnetic levitation transport devices, when transporting products in a standing state using such devices, and a contactless transport alignment method utilizing the same. Generally, the deposition mask used for depositing thin films in display devices is loaded onto a carrier and then transported into the deposition chamber. Furthermore, to minimize transport efficiency and process space requirements, the evaporation mask can be transported from the stoker in a standing position rather than horizontally. Typically, the evaporation mask is transported on a conveyor belt from the stoker to a carrier transfer device, and then inserted into the evaporation chamber by the carrier transfer device. In other words, the carrier on which the deposition mask is mounted can be inserted into the deposition chamber via a carrier transport device. The aforementioned features of some embodiments and other features will become clearer from the following drawings and detailed description of the invention. This is a side view showing a contactless conveying alignment device according to one embodiment of the present invention. This is a front view illustrating the first product transport section of a contactless transport alignment device according to one embodiment of the present invention. This is a plan view showing the transport position sensing unit in a non-contact transport alignment device according to one embodiment of the present invention. This is a side view showing an example of application of a transport position sensing unit in a non-contact transport alignment device according to one embodiment of the present invention. This is a side view showing an example of application of a transport position sensing unit in a non-contact transport alignment device according to one embodiment of the present invention. This is a flowchart showing one embodiment of the non-contact transport alignment method according to the present invention. One embodiment of the present invention discloses a non-contact conveying and aligning device that includes a conveying and aligning moving unit that adjusts the exit position of a first product conveying device on which products to be conveyed are placed and which moves the products in a linear fashion; a conveying position sensing unit that senses the entrance position of a second product conveying device located separately from the first product conveying device and which receives and moves the products linearly moved by the first product conveying device; and an aligning control unit that controls the operation of the conveying and aligning moving unit and adjusts the exit position of the first product conveying device in accordance with the entrance position of the second product conveying device sensed by the conveying position sensing unit. In this embodiment, the transport position sensing unit includes a first entrance position sensing unit that senses the entrance position of the second product transport device in the second direction when the transport direction of the product being transported to the first product transport device, which is perpendicular to the second direction on a plane, is the first direction. The transport alignment movement unit may include an alignment movement device that moves the first product transport device from the plane in a direction different from the first direction and adjusts the exit position of the first product transport device. In this embodiment, the transport position sensing unit further includes a linear movement direction sensing unit that senses the angle of the first product transport device with respect to the transport direction on a plane, and the transport alignment movement unit may include a base support unit on which the first product transport device is positioned at the top, and an angle adjustment plane movement unit located below the base support unit, which adjusts the angle of the base support unit on a plane to adjust the angle of the first product transport device in the transport direction. In this embodiment, the linear movement direction sensing unit may include a first distance sensing unit and a second distance sensing unit, which are positioned at a distance from both sides of the first product conveying device and sense the distance between them and the second product conveying device. In this embodiment, the angle-adjusting planar movement unit may include a plurality of two-axis movement units that are movable in the first and second directions. In this embodiment, the transport position sensing unit includes a second entrance position sensing unit that senses the height of the first product transport equipment, and the transport alignment movement