JP-2026514463-A - Tapered anti-reflective coating maintains image sharpness in waveguide combiners.

Abstract

Embodiments of the disclosure provided herein include waveguide combiners. More specifically, embodiments described herein provide waveguide combiners having waveguide layers and coatings having tapered portions disposed thereon. Waveguides include one or more grids, one or more grids include a plurality of grid structures disposed on a waveguide substrate, the grid structures include waveguide material, and the plurality of grid structures include outer grid structures on the outer edges of one or more grids. Waveguide layers are disposed on the waveguide substrate between the outer grid structures and the edges of the waveguide substrate, the waveguide layers include waveguide material, and coatings are disposed on the waveguide layers, and the coatings have tapered portions tapered from at least one of the outer grid structures to a planar portion of the coating. [Selection Diagram] Figure 1B

Inventors

• シャーストリー， クナル
• ワン， エヴァン
• ロレンツォ， シモン
• セル， デーヴィッド アレクサンダー
• メッサー， ケヴィン
• バルガヴァ， サマース

Assignees

• アプライド マテリアルズ インコーポレイテッド

Dates

Publication Date

20260511

Application Date

20240618

Priority Date

20230706

Claims (20)

1. Waveguide, One or more grids, comprising multiple grid structures arranged on a waveguide substrate, The lattice structure includes a waveguide material, The plurality of grid structures include an outer grid structure at the outer edge of one or more of the grids. One or more grids, A waveguide layer disposed on the waveguide substrate between the external grid structure and the edge of the waveguide substrate, comprising the waveguide layer containing the waveguide material, A coating disposed on the waveguide layer, the coating having a tapered portion that tapers from at least one of the external grid structures to the planar portion of the coating, Waveguides, including
2. The waveguide according to claim 1, wherein the coating is disposed on the waveguide substrate between the external grid structure and the edge of the waveguide substrate.
3. The waveguide according to claim 1, wherein one or more of the grids are one of the input coupling region, intermediate region, or output coupling region.
4. The waveguide according to claim 1, wherein the waveguide layer and the grid structure have the same thickness.
5. The waveguide according to claim 1, wherein the coating has a refractive index of less than 2.0.
6. The waveguide according to claim 1, wherein the coating includes the coating refractive index, the waveguide layer includes the waveguide layer refractive index, and the coating refractive index is smaller than the waveguide layer refractive index.
7. The waveguide according to claim 1, wherein the coating includes a planar portion adjacent to the outer tapered edge of the tapered portion.
8. Waveguide, One or more grids comprising a plurality of grid structures arranged on a waveguide substrate, wherein the plurality of grid structures include waveguides, and the outer edge of the one or more grids includes an outer grid structure, A waveguide layer having waveguide material, disposed on the waveguide substrate between the outer grid structure and the edge of the waveguide substrate, A coating disposed on the waveguide layer, having a coating refractive index smaller than the refractive index of the waveguide layer, and having a tapered portion that is tapered from at least one of the external lattice structures to a planar portion of the coating adjacent to the outer tapered edge of the tapered portion, Waveguides, including
9. The waveguide according to claim 8, wherein one or more of the grids are one of the input coupling region, intermediate region, or output coupling region.
10. The waveguide according to claim 8, wherein the coating has a thickness between approximately 10 nanometers and approximately 800 nanometers.
11. The waveguide according to claim 8, wherein the refractive index of the coating is less than 2.0.
12. The waveguide according to claim 8, wherein the waveguide layer and the grid structure have the same thickness.
13. The waveguide according to claim 8, wherein the distance between the inner tapered edge and the outer tapered edge of the coating is approximately 1 micrometer to approximately 2000 micrometers.
14. Waveguide, One or more grids comprising a plurality of grid structures arranged on a waveguide substrate, wherein the plurality of grid structures comprises a waveguide material and an outer grid structure at the outer edge of the one or more grids, A waveguide layer disposed on the waveguide substrate between the outer grid structure and the edge of the waveguide substrate, comprising the waveguide material and having the same thickness as the plurality of grid structures, A coating disposed on the waveguide layer, the coating having a tapered portion that tapers from at least one of the external grid structures to the planar portion of the coating, Waveguides, including
15. The waveguide according to claim 14, wherein one or more of the grids are one of the input coupling region, intermediate region, or output coupling region.
16. The waveguide according to claim 14, wherein the coating includes the coating refractive index, the waveguide layer includes the waveguide layer refractive index, and the coating refractive index is smaller than the waveguide layer refractive index.
17. The waveguide according to claim 16, wherein the refractive index of the coating is less than 2.0.
18. The waveguide according to claim 14, wherein the coating has a thickness between approximately 10 nanometers and approximately 800 nanometers.
19. The waveguide according to claim 14, wherein the tapered portion includes an outer tapered edge adjacent to the planar portion of the coating and an inner tapered edge adjacent to the external grid structure.
20. The waveguide according to claim 20, wherein the distance between the inner tapered edge and the outer tapered edge of the coating is approximately 1 micrometer to approximately 2000 micrometers.

Description

[0001] Embodiments of this disclosure generally relate to waveguide combiners. More specifically, embodiments described herein provide waveguide combiners having a waveguide layer and a coating having a tapered portion disposed thereon. Description of Related Technologies [0002] Virtual reality is generally considered to be a computer-generated simulated environment in which the user has an apparent physical presence. Virtual reality experiences can be generated and viewed in three dimensions using a head-mounted display (HMD), such as glasses or other wearable display devices, which have a near-eye display panel as a lens for displaying a virtual reality environment that replaces the actual environment. [0003] However, augmented reality enables a user to see the surrounding environment through the display lenses of glasses or other HMD devices, but also to see images of virtual objects that are generated for display and appear as part of the environment. Augmented reality can include any type of input, such as audio and haptic input, as well as virtual images, graphics, and video that enhance or extend the environment experienced by the user. The sharpness of virtual images may be affected by the environment. [0004] Therefore, a waveguide combiner having a waveguide layer and a coating having a tapered portion disposed thereon is required. [0005] The embodiments described herein generally relate to systems and methods used in waveguide combiners. More specifically, the embodiments described herein provide a waveguide combiner having a waveguide layer and a coating having a tapered portion disposed thereon. [0006] In one embodiment, a waveguide is provided. The waveguide includes one or more gratings, each including a plurality of grating structures disposed on a waveguide substrate, each including waveguide material, and each including an outer grating structure at the outer edge of one or more gratings. A waveguide layer is disposed on the waveguide substrate between the outer grating structures and the edges of the waveguide substrate, the waveguide layer including waveguide material, and a coating is disposed on the waveguide layer, the coating having tapered portions tapered from at least one of the outer grating structures to the planar portion of the coating. [0007] In another embodiment, a waveguide is provided. The waveguide is one or more grids comprising a plurality of grid structures disposed on a waveguide substrate, wherein the plurality of grid structures comprises one or more grids comprising an outer grid structure at the outer edge of one or more grids, a waveguide layer disposed on the waveguide substrate between the outer grid structure and the edge of the waveguide substrate, and a coating disposed on the waveguide layer, the coating having a tapered portion that is tapered from at least one of the outer grid structures to a planar portion of the coating adjacent to the outer tapered edge of the tapered portion. [0008] In yet another embodiment, a waveguide is provided. The waveguide includes one or more grids, each comprising a plurality of grid structures disposed on a waveguide substrate. The plurality of grid structures include a waveguide material and an outer grid structure at the outer edge of one or more grids. The waveguide also includes a waveguide layer disposed on the waveguide substrate between the outer grid structure and the edge of the waveguide substrate, and a coating disposed on the waveguide layer, the coating having a tapered portion tapered from at least one of the outer grid structures to a planar portion of the coating. The waveguide layer comprises a waveguide material having the same thickness as the plurality of grid structures. [0009] To enable a detailed understanding of the features of the Disclosure described above, a more specific description of the Disclosure, which has been briefly summarized above, can be obtained by reference to embodiments. Some of these embodiments are illustrated in the accompanying drawings. However, it should be noted that the accompanying drawings only illustrate exemplary embodiments of the Disclosure and should not be considered to limit the scope of the Disclosure, as other equally valid embodiments of the Disclosure are also permissible. A schematic top view of a waveguide combiner according to a certain embodiment is shown.A schematic cross-sectional view of a portion of the waveguide combiner shown in Figure 1A, according to a certain embodiment, is provided. [0012] For ease of understanding, the same reference numerals were used where possible to indicate identical elements common to multiple figures. It is assumed that elements and features of one embodiment may be usefully incorporated into other embodiments without further description. [0013] Embodiments of this specification generally relate to waveguide combiners for augmented reality. More specifically, this disclosure relates to a system and method for a waveguide