JP-2026514464-A - Stepped grid structure for incoupling

Abstract

A waveguide combiner is provided. The waveguide combiner includes a waveguide combiner substrate. The waveguide combiner provides a plurality of staircase structures arranged on the substrate. Each staircase structure includes a plurality of steps. Each step has the same step width. The plurality of steps has a trim width from the first step to the last step. The plurality of steps includes an upper step having an upper width. [Selection Diagram] Figure 1C

Inventors

• ワン， エヴァン
• リウ， インナン
• ロレンツォ， サイモン
• セル， デーヴィッド アレクサンダー

Assignees

• アプライド マテリアルズ インコーポレイテッド

Dates

Publication Date

20260511

Application Date

20240822

Priority Date

20230825

Claims (20)

1. Waveguide combiner, circuit board and Multiple staircase structures arranged on the aforementioned substrate, Each staircase structure is equipped with, Multiple staircases, each having the same staircase width and a trim width from the first staircase to the last staircase, It comprises an upper step having an upper width, Waveguide combiner.
2. The waveguide combiner according to claim 1, wherein each of the plurality of stair structures includes a stair surface.
3. The waveguide combiner according to claim 2, wherein the stepped surface has facet normals for each step parallel to the stepped surface of the substrate.
4. The waveguide combiner according to claim 3, wherein the stepped surface has a stepped angle defined by the stepped surface and the facet normal.
5. The waveguide combiner according to claim 4, wherein the stair angles of two of the aforementioned stair structures are different.
6. The waveguide combiner according to claim 4, wherein the stair angles of two of the aforementioned stair structures are the same.
7. The waveguide combiner according to claim 6, wherein two of the aforementioned stair structures have different depths.
8. A waveguide combiner according to claim 1, wherein each staircase has the same stair height.
9. The waveguide combiner according to claim 1, wherein the plurality of stepped structures include oxides, carbides, or nitrides of silicon, aluminum, zirconium, tin, tantalum, zirconium, barium, titanium, hafnium, lithium, lanthanum, cadmium, niobium, or combinations thereof.
10. The waveguide combiner according to claim 1, wherein the substrate comprises an amorphous dielectric, a non-amorphous dielectric, a crystalline dielectric, a polymer, or a combination thereof.
11. The waveguide combiner according to claim 1, wherein the substrate includes silicon (Si), silicon dioxide ( SiO₂ ), germanium (Ge), silicon germanium (SiGe), sapphire, or a combination thereof.
12. The waveguide combiner according to claim 1, wherein the substrate is configured to transmit wavelengths from 100 to 3000 nanometers.
13. The waveguide combiner according to claim 1, wherein each of the multiple stair structures has a refractive index of approximately 1.5 to approximately 4.0.
14. The waveguide combiner according to claim 1, wherein each of the multiple stair structures has a refractive index of approximately 2.65 to approximately 4.0.
15. Waveguide combiner, circuit board and Multiple staircase structures arranged on the aforementioned substrate, Each staircase structure is equipped with, Multiple staircases, each having the same staircase width and a trim width from the first staircase to the last staircase, An intermediate step having an intermediate width, It comprises an upper step having an upper width, Waveguide combiner.
16. The waveguide combiner according to claim 15, wherein the intermediate stage is positioned between the final step and the upper stage.
17. The waveguide combiner according to claim 15, wherein the substrate is configured to transmit wavelengths from 100 to 3000 nanometers.
18. The waveguide combiner according to claim 15, wherein each of the multiple stair structures has a refractive index of approximately 1.5 to approximately 4.0.
19. A method for forming a waveguide combiner, Depositing a photoresist layer on a patterned hard mask placed on a device layer, The photoresist layer is exposed to generate multiple photoresist segments, Etching the device layer to generate the first step of a blazed grid having a step width, The process involves horizontally trimming the aforementioned plurality of photoresist segments, In order to generate an intermediate step having an intermediate width greater than the aforementioned step width, the process involves repeatedly etching the device layer and horizontally trimming the plurality of photoresist segments, Removing the plurality of photoresist segments and the patterned hard mask, Methods that include...
20. The method according to claim 19, further comprising placing an encapsulation layer on the device layer.

Description

[0001] Embodiments of this disclosure generally relate to waveguide combiners for augmented reality, virtual reality, and mixed reality. More specifically, embodiments described herein provide waveguide combiners having a stepped grid structure. [0002] Virtual reality is generally considered to be a computer-generated simulated environment in which the user has an apparent physical presence. Virtual reality experiences are generated in 3D and can be viewed with a head-mounted display (HMD) (for example, glasses or other wearable display devices having a near-eye display panel as a lens for displaying a virtual reality environment that replaces the actual environment). [0003] However, augmented reality allows a user to see the surrounding environment through the display lenses of glasses or other HMD devices, but also to see images of virtual objects that are generated for display and appear as part of the environment. Augmented reality may include any type of input (e.g., voice input and haptic input) and virtual images, graphics, and videos that enhance or extend the environment experienced by the user. However, it should be noted that conventional augmented reality devices utilize waveguides that include binary grids, which can reduce optical efficiency. [0004] Therefore, what is needed in the art is an improved waveguide combiner. [0005] In one embodiment, a waveguide combiner is provided. The waveguide combiner includes a waveguide combiner substrate. The waveguide combiner provides a plurality of etched staircase structures disposed on the substrate. Each staircase structure includes a plurality of steps. Each step has the same staircase width. The plurality of steps has a trim width from the first step to the last step. The plurality of steps includes an upper step having an upper width. [0006] In another embodiment, a waveguide combiner is provided. The waveguide combiner includes a waveguide combiner substrate. The waveguide combiner provides a plurality of etched staircase structures disposed on the substrate. Each staircase structure includes a plurality of steps. Each step has the same staircase width. The plurality of steps has a trim width from the first step to the last step. The plurality of steps includes intermediate steps having an intermediate width less than the trim width. The plurality of steps includes upper steps having an upper width. [0007] In another embodiment, a method for forming a waveguide combiner is provided. This method includes depositing a photoresist layer on a patterned hard mask placed on a device layer. The photoresist layer is exposed to generate a plurality of photoresist segments. The device layer is etched to generate a first step of a blazed grid having a step width. The plurality of photoresist segments are trimmed horizontally. The etching of the device layer and trimming of the plurality of photoresist segments are repeated horizontally to generate intermediate steps. The intermediate steps have an intermediate width greater than the step width. The plurality of photoresist segments and the patterned hard mask are removed. [0008] To enable a more detailed understanding of the features of this disclosure described above, a more detailed description of this disclosure, briefly summarized above, can be obtained by referring to embodiments, some of which are shown in the accompanying drawings. However, it should be noted that the accompanying drawings show only exemplary embodiments of this disclosure and should not be considered limiting the scope of this disclosure, as other equally valid embodiments are permitted. This is a perspective front view of a waveguide combiner according to an embodiment described herein.This is a schematic cross-sectional view of a waveguide combiner according to an embodiment described herein.This is a flowchart of a method for forming a waveguide combiner according to certain embodiments.This is a schematic cross-sectional view of a portion of the device material in a method for forming a waveguide combiner according to certain embodiments. [0013] For ease of understanding, where possible, the same reference numerals have been used to indicate identical elements common to the figures. It is assumed that elements and features of one embodiment may be usefully incorporated into other embodiments without further description. [0014] Embodiments of this disclosure generally relate to waveguide combiners for augmented reality, virtual reality, and mixed reality. The waveguide combiner includes an asymmetrical stepped structure that preferentially directs light to desired locations in the waveguide. The stepped structure includes a plurality of steps having trim widths from the first step to the last step, and an upper step having an upper width. In some embodiments, which can be combined with other embodiments, the upper width is greater than the trim width to allow precise control over the amount of light direction. In some embodiments,