JP-7854587-B2 - Stage equipment

Inventors

• 唐沢 幸治

Assignees

• 株式会社マシンエンジニアリング

Dates

Publication Date

20260507

Application Date

20220809

Claims (5)

1. A first stage body having a first concave arc portion, A first moving stage having a first convex arc portion corresponding to the first concave arc portion and being pivotable along the first concave arc portion, An operating unit provided on the first moving stage, which is pivotable about the center point of the arc of the first concave arc portion, To cause the first moving stage to swing by swinging the operating unit, the first stage body is provided with a first slide plate that is movable in a first horizontal direction, The first driven link provided on the first slide plate, A first rotating cam that transmits motion to move the first driven link in a first direction, It comprises a first drive source for rotating the aforementioned one-rotation cam, A stage device characterized in that the rotation axis of the first rotating cam and the drive rotation axis of the first drive source are provided in the vertical direction.
2. The stage apparatus according to claim 1, characterized by comprising a locking device that stops the oscillation of the first moving stage by restricting the movement of the first slide plate relative to the first stage body.
3. The first moving stage is, A second stage body having the first convex arc portion and a second concave arc portion provided in a direction perpendicular to the first concave arc portion in a plan view, The system includes a second moving stage having a second convex arc portion corresponding to the second concave arc portion, and being pivotable along the second concave arc portion, The operating part is pivotable about the center point of the second concave arc portion, A second slide plate is connected to the operating unit and is movable together with the first slide plate in the first direction for the purpose of swinging the second moving stage, and is movable in a second direction perpendicular to the first direction in the horizontal direction, The second driven link provided on the second slide plate, A second rotating cam that transmits motion to move the second driven link in the second direction, It comprises a second drive source that rotates the aforementioned two rotating cams, The stage device according to claim 1, characterized in that the rotation axis of the second rotating cam and the drive rotation axis of the second drive source are provided in the vertical direction.
4. The stage apparatus according to claim 3, characterized by comprising a locking device that stops the oscillation of the first moving stage and the second moving stage by restricting the movement of the first slide plate and the second slide plate relative to the first stage body.
5. The stage apparatus according to claim 3 or claim 4, wherein the curvature of the arcs of the first concave arc portion and the first convex arc portion is the same as the curvature of the arcs of the second concave arc portion and the second convex arc portion.

Description

Article 30, Paragraph 2 of the Patent Law applies. On March 24, 2022, Nichiden Co., Ltd. (Kuki City, Saitama Prefecture) sold the stage device related to the invention. This invention relates to a stage device used for processing and adjusting precision equipment, and for high-precision measurement. To process electronic component chips and circuit boards, or to adjust the optical axis of optical devices, it is necessary to move the product in a predetermined direction and inclination according to the work area of the product and the position of the work arm, and to perform high-precision position adjustments. To move and adjust the position of a product in this way, a device called a goniometer stage or swivel stage is known, which involves oscillating the table on which the product is placed. Conventionally, Patent Document 1 discloses a swivel stage device comprising: a main body having a concave arc surface; a stage having a convex arc surface corresponding to the concave arc surface and rotatably positioned along the concave arc surface with respect to the center of curvature of the convex arc surface; a feed screw device having a screw shaft and a nut, the nut being connected to the stage; and a bearing portion provided on the main body side, which rotatably supports the end of the screw shaft around its axis and also supports it so as to be swingable in the radial direction of the screw shaft. Japanese Patent Publication No. 2008-149426 This is a perspective view of a stage apparatus illustrating an embodiment of the present invention.This is a plan view of a stage apparatus illustrating an embodiment of the present invention.This is a side view of a stage apparatus illustrating an embodiment of the present invention.This is a side view showing a partially cutaway portion of a stage device illustrating an embodiment of the present invention.This is a front view showing a partially cutaway portion of a stage device illustrating an embodiment of the present invention.This is a partially cutaway front view of a stage apparatus illustrating an embodiment of the present invention during stage oscillation.This is a plan view of a second slide plate according to an embodiment of the present invention.This is a plan view of the lower base plate and the first cam according to an embodiment of the present invention.This is a plan view of the first slide plate and the second cam according to an embodiment of the present invention.This is a plan view showing the operation of the first cam according to an embodiment of the present invention.This figure illustrates the relationship between the strokes of the first cam and the second cam and the oscillation angles of the first moving stage and the second moving stage according to an embodiment of the present invention.This is a cross-sectional view of a locking device according to an embodiment of the present invention. Embodiments of the present invention will be described below with reference to the drawings. It goes without saying that the present invention is not limited to its embodiments. Figure 1 is a perspective view of the stage device showing an embodiment; Figure 2 is a plan view of the stage device showing an embodiment; Figure 3 is a side view of the stage device showing an embodiment; Figure 4 is a cutaway side view of the stage device showing an embodiment; Figure 5 is a cutaway front view of the stage device showing an embodiment; Figure 6 is a cutaway front view of the stage device showing an embodiment during stage oscillation; Figure 7 is a plan view of the second slide plate according to the embodiment; Figure 8 is a plan view of the lower base plate and first cam according to the embodiment; Figure 9 is a plan view of the first slide plate and second cam according to the embodiment; Figure 10 is a plan view showing the operation of the first cam according to the embodiment; Figure 11 is a diagram illustrating the relationship between the stroke of the first and second cams according to the embodiment and the oscillation angles of the first and second moving stages; and Figure 12 is a cross-sectional view of the locking device according to the embodiment. As shown in Figures 1 to 6, in this embodiment, the stage device 1 comprises a first stage body 2, a first moving stage 3, a first cam 4, a first slide plate 5, and a first drive source 6. Furthermore, the first moving stage 3 comprises the second stage main body 30 and the second moving stage 31. The stage device 1 further includes a second cam 7, a second slide plate 8, and a second drive source 9. The first stage body 2 includes a first concave arc portion 22. The first moving stage 3 includes a first convex arc portion 32 and a second concave arc portion 33 on the second stage body 30. The first moving stage 3 also includes a second convex arc portion 34 on the second moving stage 31. In this embodiment, the stage device 1 is configured such that the first sliding plate moves in a first hor