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JP-7854700-B2 - Soft Actuator

JP7854700B2JP 7854700 B2JP7854700 B2JP 7854700B2JP-7854700-B2

Inventors

  • 関根 智仁
  • 時任 静士

Assignees

  • 国立大学法人山形大学

Dates

Publication Date
20260507
Application Date
20220125

Claims (2)

  1. A soft actuator comprising an electrode layer and an active layer between the electrode layers, The electrode layer includes a conductive material, The active layer comprises a crystalline dielectric polymer. The electrode layer comprises graphene oxide having hydrophilic functional groups, and the active layer comprises carbon nanotubes having hydrophilic functional groups. The electrode layer contains 0.0005 to 0.5% by mass of graphene oxide, and the active layer contains 0.01 to 0.1% by mass of carbon nanotubes. Soft actuator.
  2. The soft actuator according to claim 1 , having an area of 10 mm² or more.

Description

Applicable under Article 30, Paragraph 2 of the Patent Law. Website address: https://onlinelibrary.wiley.com/doi/full/10.1002/smsc.202100002 Website publication date: January 26, 2021 This invention relates to a soft actuator. Actuators are manufactured using MEMS (Inorganic Semiconductors) technology and motor drive (Non-Patent Document 1). Furthermore, soft actuators using organic materials have been proposed (Non-Patent Literature 2). Soft actuators are useful for applications in active braille and haptic devices. Xingdong Lv, et al., A novel MEMS electromagnetic actuator with large displacement, Sensors and Actuators A, 221 (2015) 22-28Philipp Rothemund, et al., A soft, bistable valve for autonomous control of soft actuators, Science Robotics, 3, (2018) 1-10 Figure 1 shows photographs of the external appearance of several soft actuators fabricated on a polyethylene naphthalate (PEN) substrate.Figure 2 shows an example illustrating a laser displacement meter for measuring the displacement of an actuator and the laser irradiation section of the actuator.Figure 3 is a schematic diagram illustrating a method for measuring the displacement of an actuator.Figure 4 shows the displacement measurements for the actuator fabricated in Comparative Example 1 when an electric field of 10 to 100 MV/m was applied at intervals of 10 MV/m.Figure 5 shows the displacement measurements taken for the actuator fabricated in Example 1 when an electric field of 10 to 100 MV/m was applied at intervals of 10 MV/m.Figure 6 shows the displacement measurements taken for the actuator fabricated in Example 2 when an electric field of 10 to 100 MV/m was applied at intervals of 10 MV/m.Figure 7 shows the displacement measurements for the actuator fabricated in Example 3 when an electric field of 10 to 100 MV/m was applied at intervals of 10 MV/m.Figure 8 shows the hysteresis curves of the electric field (MV/m) and residual polarization value (μC/ cm² ) measured for the actuators fabricated in Examples 1 to 3 and Comparative Example 1.Figure 9 is a graph showing the relationship between electric field quantity and displacement quantity measured for the actuators fabricated in Examples 1 to 3 and Comparative Example 1.Figure 10 is a graph showing the relationship between the displacement and the residual polarization value measured for the actuators fabricated in Examples 1 to 3 and Comparative Example 1.Figure 11 shows an intermolecular force microscope (AFM) image of the P(VDF-TrFE) dielectric film formed in Example 1.Figure 12 is an intermolecular force microscope (AFM) image of the dielectric film formed in Example 2 by mixing single-walled carbon nanotubes with P (VDF-TrFE).Figure 13 shows an intermolecular force microscope (AFM) image of the PEDOT:PSS electrode film formed in Example 2.Figure 14 shows an intermolecular force microscope (AFM) image of the electrode film formed in Example 1 by mixing graphene oxide with PEDOT:PSS.Figure 15 is an optical microscope image of the P(VDF-TrFE) dielectric film formed in Example 1.Figure 16 is an optical microscope image of the dielectric film formed in Example 2 by mixing single-walled carbon nanotubes with P (VDF-TrFE).Figure 17 is an optical microscope image of the PEDOT:PSS electrode film formed in Example 2.Figure 18 is an optical microscope image of the electrode film formed in Example 1 by mixing graphene oxide with PEDOT:PSS.Figure 19 is a graph showing the relationship between the applied frequency and the measured frequency for the actuators fabricated in Example 1 and Comparative Example 1.Figure 20 is a graph showing the relationship between applied frequency and displacement for actuators fabricated in Example 1 and Comparative Example 1.Figure 21 is a cross-sectional SEM image of the actuator fabricated in Example 3.Figure 22 is a schematic cross-sectional view of an example of a soft actuator having a capacitor structure including electrode layers and an active layer between the electrode layers. This disclosure relates to a soft actuator comprising an electrode layer and an active layer between the electrode layers, wherein the electrode layer comprises a conductive material, the active layer comprises a crystalline dielectric polymer, and at least one of the electrode layer and the active layer comprises carbon particles having hydrophilic functional groups. This soft actuator possesses flexibility because its main component, the active layer (driving layer), is primarily composed of a crystalline dielectric polymer. By incorporating carbon particles with hydrophilic functional groups into at least one of the electrode layer (primarily composed of a conductive material) and the active layer (primarily composed of a crystalline dielectric polymer), a soft actuator operating at higher speeds and with higher power than conventional actuators can be obtained. Furthermore, this soft actuator can be manufactured using a coating process and is easily scaled up to large areas. This