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JP-7854873-B2 - Optical module

JP7854873B2JP 7854873 B2JP7854873 B2JP 7854873B2JP-7854873-B2

Inventors

  • 井出 智行

Assignees

  • 浜松ホトニクス株式会社

Dates

Publication Date
20260507
Application Date
20220623

Claims (15)

  1. A mirror unit having a mirror device including a movable mirror section equipped with a coil, A magnet section having an upper surface, a lower surface, and a side surface extending from the upper surface to the lower surface, which generates a magnetic field acting on the movable mirror section, The package comprises a package having a recess for housing the magnet portion, The aforementioned magnet section includes a first magnet and a second magnet arranged along a first direction, The recess has a base wall portion extending along a first direction to which the upper surface of the magnet portion is fixed, and a side wall portion extending along a second direction intersecting the first direction and facing the side surface of the magnet portion. In the second direction, if the side where the magnet is located relative to the base wall is considered the lower side, and the side opposite to the lower side is considered the upper side, then the recess has an opening defined by the side wall and opening to the lower side. The mirror unit is positioned on a second surface of the base wall opposite to the first surface on which the magnet is fixed. The second upper surface of the second magnet is located below the first upper surface of the first magnet. The optical module is such that the magnet portion is fixed to the base wall by a first adhesive material which is disposed at least between the first surface of the base wall and the second upper surface of the second magnet.
  2. The aforementioned magnet portion further includes a third magnet positioned on the opposite side of the first magnet from the second magnet in the first direction, The optical module according to claim 1, wherein the first magnet, the second magnet and the third magnet are arranged in a Halbach arrangement, the first magnet has magnetic poles aligned along a first direction, and each of the second magnet and the third magnet has magnetic poles aligned along a second direction.
  3. The optical module according to claim 1 or 2, wherein a gap is formed between the magnet portion and the side wall portion.
  4. The optical module according to claim 3, wherein the gap, when viewed from the second direction, has a first portion extending along one direction and a second portion extending along a direction intersecting the direction of extension of the first portion.
  5. The side wall portion has a first side wall portion and a second side wall portion facing the first side wall portion. The gap is formed between the magnet portion and the first side wall portion. The optical module according to claim 3, wherein the thickness of the second sidewall portion is greater than the thickness of the first sidewall portion.
  6. The optical module according to claim 2, wherein a gap is formed between the magnetic portion and the side wall portion facing the magnetic portion in the first direction.
  7. The optical module according to claim 1 or 2, wherein the magnetic portion has two edges that form a corner when viewed from the second direction, and at least one of the two edges is separated from the side wall portion.
  8. The optical module according to claim 1 or 2, wherein a groove extending along the second direction is formed in the side wall portion at a position corresponding to the corner portion of the magnet portion.
  9. The mirror unit is fixed to the second surface of the base wall portion by a second adhesive, The optical module according to claim 1 or 2, wherein a fillet is formed by the second adhesive at the boundary between the side surface of the mirror unit and the second surface of the base wall.
  10. The mirror unit is fixed to the second surface of the base wall portion by a second adhesive, The optical module according to claim 1 or 2, wherein the thickness of the second adhesive between the mirror unit and the second surface of the base wall is 10 μm or more and 30 μm or less.
  11. The mirror unit further comprises wires for electrically connecting it to the outside, The mirror unit is fixed to the second surface of the base wall portion in a predetermined bonding area by an adhesive, The optical module according to claim 1 or 2, wherein the wire is connected to the mirror unit at a position that overlaps with the adhesive area when viewed from the second direction.
  12. The optical module according to claim 1 or 2, wherein the region on the second surface of the base wall portion where the mirror unit is arranged is formed flat.
  13. The optical module according to claim 1 or 2, wherein, when viewed from the second direction, the outer edge of the mirror unit is located inward relative to the outer edge of the magnet portion.
  14. The optical module according to claim 1 or 2, wherein the side wall portion protrudes downward from the bottom surface of the magnet portion.
  15. The optical module according to claim 1 or 2, wherein the width of the second magnet in the first direction is wider than the width of the first magnet in the first direction.

Description

This invention relates to an optical module. Patent Document 1 describes an optical module in which a mirror device having a movable mirror portion is arranged on a magnet portion. In this optical module, the magnet portion includes three magnets arranged laterally. Each of the three magnets has a different magnetic direction. The mirror device is positioned across these three magnets. Special table 2013-508785 publication This is a perspective view of the optical module according to the embodiment.This is a plan view of a mirror device.This is a cross-sectional view along the line III-III in Figure 1.This is a cross-sectional view along the line IV-IV in Figure 1.This is a cross-sectional view of the optical module.This is a cross-sectional view of the optical module according to the first modified example. Embodiments of the present invention will be described in detail below with reference to the drawings. In the following description, the same or equivalent elements will be denoted by the same reference numerals, and redundant explanations will be omitted. [Optical Module] As shown in Figures 1 to 4, the optical module 1 comprises a mirror unit 2, a magnet unit 3, and a package 4. The mirror unit 2 and the magnet unit 3 are fixed to the package 4. First, the mirror unit 2 will be described with reference to Figure 2. In this example, the mirror unit 2 consists only of a mirror device 10, but it may further include a base member to which the mirror device 10 is fixed, as will be described later. Hereafter, the X direction (first direction), Y direction (third direction), and Z direction (second direction) will be defined and described as shown in each figure. The X, Y, and Z directions are perpendicular to each other. In Figure 1, the mirror device 10 is shown in a simplified form. [Mirror device (mirror unit)] The mirror device 10 has a support portion 11 and a movable mirror portion 12 that can swing relative to the support portion 11. The movable mirror portion 12 has a movable portion 13, a pair of connecting portions 14, and a mirror 15. The support portion 11, the movable portion 13, and the pair of connecting portions 14 are integrally formed from, for example, an SOI (Silicon on Insulator) substrate. In other words, the mirror device 10 is a MEMS (Micro Electro Mechanical Systems) device formed using semiconductor materials. The support portion 11 is formed, for example, in the shape of a rectangular frame. The movable portion 13 is formed, for example, in the shape of a rectangular plate and is positioned inside the support portion 11 when viewed from the optical axis direction (surrounded by the support portion 11). The optical axis direction is perpendicular to the plane in which the support portion 11 and the movable mirror portion 12 are arranged, and in this example, it is perpendicular to the mirror 15. In this example, the optical axis direction is parallel to the Z direction. The movable portion 13 is connected to the support portion 11 by a pair of connecting portions 14 so that it can swing around axis A. Axis A is parallel to the Y direction in this example. The movable part 13 includes a first part 131 and a second part 132. The first part 131 is formed, for example, circularly when viewed from the optical axis direction. The second part 132 is formed, for example, rectangularly ring-shaped when viewed from the optical axis direction. The first part 131 is positioned inside the second part 132 (surrounded by the second part 132) when viewed from the optical axis direction, and is connected to the second part 132 via a plurality (two in this example) of connecting parts 133. A gap is formed between the first part 131 and the second part 132, except for the plurality of connecting parts 133. The connecting parts 133 are located, for example, in the center of two sides of the rectangular inner edge of the second part 132 that are parallel to axis A. The pair of connecting parts 14 are positioned on axis A in the gap between the support part 11 and the movable part 13, sandwiching the movable part 13. In this example, each connecting part 14 is formed in a rectangular plate shape and extends along axis A. Each connecting part 14 functions as a torsion bar. The mirror 15 is provided on the first portion 131 of the movable part 13. The mirror 15 is formed on one side of the surface of the first portion 131 in the optical axis direction. The mirror 15 is formed from a metallic material such as aluminum, an aluminum alloy, gold, or silver, and is shaped like a circular, elliptical, or rectangular film. The surface of the mirror 15 opposite to the movable part 13 constitutes a mirror surface 15a extending perpendicular to the optical axis direction. The center of the mirror 15 coincides with the center of the first portion 131 (the center of the mirror device 10) when viewed from the optical axis direction. In the mirror device 10, since the mirror 15 is provided on the first portion 131 conn