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JP-7854878-B2 - Optical equipment and laser processing heads

JP7854878B2JP 7854878 B2JP7854878 B2JP 7854878B2JP-7854878-B2

Inventors

  • 竹内 正明
  • 小山 勇太

Assignees

  • 古河電子株式会社

Dates

Publication Date
20260507
Application Date
20220704

Claims (15)

  1. A diffractive optical element into which a laser enters and exits , A first light-transmitting member provided on one side of the diffractive optical element, A metal holder for holding the diffractive optical element and the first light-transmitting member, The diffractive optical element comprises a second light-transmitting member provided on the other side, which is opposite to the one side of the diffractive optical element , The first light-transmitting member is at least part of a sealing structure that seals one surface of the diffractive optical element. An optical device in which one surface of the diffractive optical element is oriented in the direction from which the laser is incident or in the direction from which the laser is emitted .
  2. The holder has a holding portion formed therein for holding the diffractive optical element and the first light-transmitting member. The holding portion has a cylindrical inner diameter portion, a through hole having an inner diameter smaller than the inner diameter portion, and a stepped surface provided between the inner diameter portion and the through hole. The diffractive optical element is arranged in the inner diameter portion. The optical apparatus according to claim 1, further comprising a pressing portion for pressing the first light-transmitting member toward the stepped surface.
  3. A diffractive optical element into which a laser enters and exits , A first light-transmitting member provided on one side of the diffractive optical element, The device comprises a metal holder for holding the diffractive optical element and the first light-transmitting member, The holder has a holding portion formed therein for holding the diffractive optical element and the first light-transmitting member. The holding portion has a cylindrical inner diameter portion, a through hole having an inner diameter smaller than the inner diameter portion, and a stepped surface provided between the inner diameter portion and the through hole. The diffractive optical element is arranged in the inner diameter portion. The first light-transmitting member is further provided with a pressing portion that presses it toward the stepped surface, An optical device in which one surface of the diffractive optical element is oriented in the direction from which the laser is incident or in the direction from which the laser is emitted .
  4. The optical apparatus according to claim 2 or 3, wherein the pressing portion includes a cover portion arranged to cover the holding portion.
  5. The optical apparatus according to claim 4, wherein the pressing portion further includes an elastic member provided between the cover portion and the first light-transmitting member.
  6. The optical apparatus according to claim 5, wherein the pressing portion further includes a plate-shaped member provided between the elastic member and the first light-transmitting member.
  7. The optical apparatus according to any one of claims 1 to 3, wherein the first light-transmitting member includes an anti-reflective layer.
  8. The optical apparatus according to any one of claims 1 to 3, wherein the diffractive optical element has a disc-shaped form.
  9. The optical apparatus according to any one of claims 1 to 3, further comprising a first spacer provided between the diffractive optical element and the first light-transmitting member.
  10. The optical apparatus according to claim 9, wherein the first spacer is made of metal.
  11. The optical device according to claim 3 , further comprising a second light-transmitting member provided on the other side of the diffractive optical element, which is opposite to the one side of the diffractive optical element.
  12. The optical apparatus according to any one of claims 1, 2, and 11, wherein the second light-transmitting member includes an anti-reflective layer.
  13. The optical apparatus according to any one of claims 1, 2, and 11, further comprising a second spacer provided between the diffractive optical element and the second light-transmitting member.
  14. The optical apparatus according to claim 13, wherein the second spacer is made of metal.
  15. A laser processing head comprising the optical device described in any one of claims 1 to 3.

Description

This invention relates to an optical device. In conventional optical devices, technology relating to optical elements fixed to a holder is disclosed, for example, in Japanese Patent Publication No. 1988-74003 (Patent Document 1). Japanese Unexamined Patent Publication No. 63-74003 This is a perspective view of a laser processing head.This is a perspective view of the optical device after assembly.This is a cross-sectional view of the optical device before assembly.This is a cross-sectional view of the optical device after assembly.This is a plan view of the optical device after assembly. The embodiments of the present invention will be described below with reference to the drawings. In all drawings, similar components are denoted by the same reference numerals, and their descriptions are omitted where appropriate. [Embodiment] Figure 1 is a perspective view of the laser processing head 100. Figure 2 is a perspective view of the optical device 1 after assembly. In one embodiment, a fiber laser is attached to the laser processing head 100. In one embodiment, the laser processing head 100 does not have a light source. In one embodiment, the optical device 1 is fitted into the laser processing head 100 (part A in Figure 1). In one embodiment, the optical device 1 is a cartridge shape that can be removed from the laser processing head 100 (part A in Figure 1). Figure 3 is a cross-sectional view of the optical device 1 before assembly. Figure 4 is a cross-sectional view of the optical device 1 after assembly. Figure 5 is a plan view of the optical device 1 after assembly. The optical device 1 will be explained using Figures 3 to 5. The incident direction DR1 shown in Figures 3 and 4 indicates the incident direction of the laser beam emitted from the light source (not shown). As shown in Figure 3, the optical device 1 comprises a diffractive optical element 10, a first light-transmitting member 20, a holder 30, a pressing part 40, a first spacer 50, a second light-transmitting member 60, and a second spacer 70. (Diffractive optical element 10) In this embodiment, the diffractive optical element 10 is a DOE (Diffractive Optical Element). The diffractive optical element 10 is used for beam shaping, branching, etc., of a laser beam. By changing the type of diffractive optical element 10 during laser processing, the laser beam can be changed to various beam patterns. In this embodiment, the diffractive optical element 10 has a disc-shaped form. The diffractive optical element 10 includes one face 11 and another face 12. The two faces 11 and 12 face each other. In one aspect of this embodiment, the one face 11 faces the direction from which the laser is incident. The other face 12 faces the direction from which the laser is emitted (incident direction DR1). DR2 is the radial direction of the diffractive optical element 10. DR3 is the thickness direction of the diffractive optical element 10. The diffractive optical element 10 includes an anti-reflective layer 14. The anti-reflective layer 14 suppresses the reflection of the laser beam that strikes the diffractive optical element 10. The anti-reflective layer 14 is provided on one surface 11 and the other surface 12. (First light-transmitting member 20) In this embodiment, the first light-transmitting member 20 has a disc-like shape. The first light-transmitting member 20 is provided on one side 11 of the diffractive optical element 10. In this embodiment, the first light-transmitting member 20 is, for example, a glass member. The first light-transmitting member 20 is at least part of a sealing structure that seals one side 11 of the diffractive optical element 10. The first light-transmitting member 20 is positioned to cover one side 11 of the diffractive optical element 10 so that it is not exposed to the atmosphere. The first light-transmitting member 20 is provided between the first spacer 50 and the pressing portion 40. The first light-transmitting member 20 includes an anti-reflective layer 22. The anti-reflective layer 22 suppresses the reflection of the laser beam that strikes the first light-transmitting member 20. In this embodiment, the anti-reflective layer 22 is provided on both sides of the first light-transmitting member 20. The first spacer 50 is provided between the diffractive optical element 10 and the first light-transmitting member 20. After the assembly of the optical device 1, the first spacer 50 is in contact with one surface 11 of the diffractive optical element 10 and the first light-transmitting member 20. (First spacer 50) In this embodiment, the first spacer 50 has a disc-shaped form. The first spacer 50 has a through hole that penetrates in the thickness direction DR3. The first spacer 50 has an annular shape, that is, a shape along the edge of a circle. However, the first spacer 50 may have a shape along the edge of a polygon. In this embodiment, the first spacer 50 plays a role in preventing the diffractive optical element 10 and the firs