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JP-7855270-B2 - Method for manufacturing a display device

JP7855270B2JP 7855270 B2JP7855270 B2JP 7855270B2JP-7855270-B2

Inventors

  • 青木 逸
  • 西村 眞澄

Assignees

  • 株式会社Magnolia White

Dates

Publication Date
20260508
Application Date
20250117

Claims (3)

  1. Lower electrode and An organic layer placed on the lower electrode, A method for manufacturing a display device comprising an upper electrode disposed on the organic layer, The process of forming the organic layer comprises the steps of forming a first carrier adjustment layer and forming a light-emitting layer. In the step of forming the first carrier adjustment layer, the first material is deposited while the first deposition source is moved relative to the substrate to be processed, in a first direction, with respect to the substrate on which the lower electrode has already been formed. A method for manufacturing a display device, wherein in the step of forming the light-emitting layer, the second deposition source is moved relative to the substrate to be processed, on which the first carrier adjustment layer has already been formed, in a second direction intersecting the first direction, while the second material is deposited.
  2. The process of forming the aforementioned interior further includes the step of forming a second carrier conditioning layer. The method for manufacturing a display device according to claim 1, wherein in the step of forming the second carrier adjustment layer, the third material is deposited while the third deposition source is moved relative to the substrate to be processed, on which the light-emitting layer has already been formed, in the first direction.
  3. The first direction is the direction in which subpixels of different display colors are aligned. The method for manufacturing a display device according to claim 1, wherein the second direction is the direction in which subpixels of the same display color are aligned.

Description

Embodiments of the present invention relate to a method for manufacturing a display device. In recent years, display devices using organic light-emitting diodes (OLEDs) as display elements have been put into practical use. These display elements include an organic layer between the pixel electrodes and the common electrode. The organic layer contains not only a light-emitting layer but also functional layers such as hole transport layers and electron transport layers. Such organic layers are formed, for example, by vacuum deposition. For example, in the case of mask deposition, a fine mask with an aperture corresponding to each pixel is used. However, due to factors such as the processing accuracy of the fine mask and deformation of the aperture shape, the accuracy of the thin film formed by deposition may decrease. For example, when forming an organic layer with multiple functional layers stacked on top of each other, the edge faces of the organic layers may not be formed in the desired positions, potentially leading to a degradation in the performance of the display element. Japanese Patent Publication No. 2000-195677Japanese Patent Publication No. 2004-207217Japanese Patent Publication No. 2008-135325Japanese Patent Publication No. 2009-32673Japanese Patent Publication No. 2010-118191International Publication No. 2019/026511 Figure 1 shows an example configuration of a display device DSP according to this embodiment.Figure 2 shows an example of the configuration of the display element 20.Figure 3 is a plan view showing an example of the pixel PX shown in Figure 1.Figure 4 illustrates one method for controlling the radiation angle.Figure 5 illustrates other methods for controlling the radiation angle.Figure 6 illustrates other methods for controlling the radiation angle.Figure 7A shows the cross-sectional shape of layer LY along direction DR1.Figure 7B shows the cross-sectional shape of layer LY along direction DR2.Figure 8A shows another cross-sectional shape of layer LY along direction DR1.Figure 8B shows another cross-sectional shape of layer LY along direction DR2.Figure 9 is a plan view showing an example of a display element 20.Figure 10 is a cross-sectional view showing an example of a display element 20 along the line A-B shown in Figure 9.Figure 11 is a cross-sectional view showing an example of a display element 20 along the line C-D shown in Figure 9.Figure 12 is a diagram illustrating the manufacturing method of the display element 20 shown in Figure 11.Figure 13 is a diagram illustrating the manufacturing method of the display element 20 shown in Figure 11.Figure 14 is a plan view showing another example of the display element 20.Figure 15 is a cross-sectional view showing an example of a display element 20E along the line A-B shown in Figure 14.Figure 16 is a cross-sectional view showing an example of a display element 20 along the line C-D shown in Figure 14.Figure 17 is a diagram illustrating the manufacturing method of the multiple display elements 20 shown in Figure 16.Figure 18 is a diagram illustrating the manufacturing method of the multiple display elements 20 shown in Figure 16.Figure 19 is a diagram illustrating the manufacturing method of the multiple display elements 20 shown in Figure 16. Embodiments of the present invention will be described below with reference to the drawings. Furthermore, the disclosure is merely an example, and any modifications that a person skilled in the art could easily conceive while maintaining the spirit of the invention are naturally included within the scope of the present invention. In addition, the drawings may schematically represent the width, thickness, shape, etc. of each part compared to the actual embodiment in order to clarify the explanation, but these are merely examples and do not limit the interpretation of the present invention. In addition, in this specification and each drawing, the same reference numerals are used for components that perform the same or similar functions as those described above with respect to previously shown drawings, and redundant detailed explanations may be omitted as appropriate. Furthermore, the drawings will include mutually orthogonal X, Y, and Z axes as needed to facilitate understanding. The direction along the X-axis is referred to as the X-direction or first direction, the direction along the Y-axis as the Y-direction or second direction, and the direction along the Z-axis as the Z-direction or third direction. The plane defined by the X and Y axes is called the X-Y plane, the plane defined by the Y and Z axes is called the Y-Z plane, and the plane defined by the X and Z axes is called the X-Z plane. Viewing the X-Y plane is called a plan view. The display device DSP according to this embodiment is an organic electroluminescent display device equipped with organic light-emitting diodes (OLEDs) as display elements, and is mounted in televisions, personal computers, mobile terminals, mobile phones, etc.