JP-7855342-B2 - Organic vapor jet printing system

Inventors

• ケント・クオン・グェン
• スリラム・クリシュナスワミ
• ダニエル・トート
• ジェフ・ホーソーン
• ウィリアム・イー・クイン

Assignees

• ユニバーサル ディスプレイ コーポレイション

Dates

Publication Date

20260508

Application Date

20211215

Priority Date

20211213

Claims (9)

1. An organic vapor jet printing (OVJP) deposition system, One or more OVJP print bars and; Float table and; Includes one or more sensors, Each of the one or more OVJP print bars includes one or more OVJP print dies. The aforementioned float table is One or more substrate grippers are configured to hold a substrate having a first active surface and to adjust the position of the substrate on the float table with a movement of at least 2°. The system includes one or more control devices arranged to provide control to the one or more substrate grippers, The one or more sensors are configured to measure the alignment of the substrate on the float table with the one or more OVJP print bars. The float table is movable in the region extending below the one or more OVJP print bars. The float table and one or more of the OVJP print bars are rotatable relative to each other. The OVJP deposition system is characterized in that the substrate is movable on the float table independently of the movement of the float table below the one or more OVJP print bars.
2. Furthermore, the OVJP deposition system according to claim 1, comprising a height control subsystem, wherein the height control subsystem is configured to control the relative distance between the one or more OVJP print bars above the float table.
3. The OVJP deposition system according to claim 1, wherein the float table includes a pressure-volume (PV) float table.
4. The OVJP deposition system according to claim 1, wherein the movement of the one or more substrate grippers is controlled by the float table such that the movement of the one or more substrate grippers is at least partially determined by the movement of the float table.
5. The OVJP deposition system according to claim 1, wherein the one or more sensors include an alignment camera, and the alignment camera is configured to align the substrate with the one or more OVJP print bars.
6. The OVJP deposition system according to claim 1, wherein the one or more OVJP print bars include a plurality of OVJP print bars, and at least one of the plurality of OVJP print bars overlaps with at least one other of the plurality of OVJP print bars printing on the same area of the substrate.
7. The OVJP deposition system according to claim 1, wherein the substrate does not come into contact with any physical surface other than the one or more substrate grippers during processing by the OVJP deposition system.
8. The OVJP deposition system according to claim 1, wherein the float table provides cooling to the substrate.
9. A method for operating the OVJP sedimentation system, To obtain a circuit board; The substrate is placed on a float table, and the position of the substrate is fixed using one or more grippers; The position of the substrate on the float table is adjusted via the one or more grippers; Moving the float table and the substrate to a position in the OVJP deposition system where the substrate is positioned below the print bar of the OVJP deposition system; The float table and the print bar rotate relative to each other or both such that the print bar is positioned perpendicular or parallel to the substrate, or at any desired angle with respect to the direction of movement of the substrate ; Discharging the deposition material from the print bar onto the substrate; A method characterized by moving the float table to a position in the OVJP deposition system where the substrate is not below the print bar of the OVJP deposition system.

Description

Cross-reference of related applications This application claims the benefit of priority of U.S. Patent Application No. 63/126,475 filed December 16, 2020, the entirety of which is incorporated herein by reference. This invention relates to a device and technology for fabricating organic light-emitting devices such as organic light-emitting diodes, and to a device and technology including the same. Organic optoelectronic devices are becoming increasingly desirable for many reasons. Because many of the materials used to fabricate such devices are relatively inexpensive, organic optoelectronic devices have the potential to offer a cost advantage over inorganic devices. In addition, due to the inherent properties of organic materials, such as flexibility, they can be well-suited for specific applications, such as fabrication on flexible substrates. Examples of organic optoelectronic devices include organic light-emitting diodes/devices (OLEDs), organic phototransistors, organic photocells, and organic photodetectors. For OLEDs, organic materials can offer performance advantages over conventional materials. For example, the wavelength emitted by the organic light-emitting layer can usually be easily adjusted with appropriate dopants. OLEDs utilize a thin organic film that emits light when a voltage is applied to the entire device. OLEDs are becoming an increasingly interesting technology for use in applications such as flat panel displays, lighting, and backlighting. Several OLED materials and configurations are described in Patent Documents 1-3, the entirety of which is incorporated herein by reference. One application of phosphorescent molecules is in full-color displays. Industry standards for such displays require pixels adapted to emit specific colors, referred to as "saturated" colors. In particular, these standards require saturated red, green, and blue pixels. Alternatively, OLEDs can be designed to emit white light. Conventional liquid crystal displays, with their white backlight emission filtered using absorption filters, produce red, green, and blue light. Similar techniques can be used with OLEDs. White OLEDs can be either single-layer EML devices or multilayer structures. Color can be measured using CIE coordinates, which are well-known in the art. As used herein, the term “organic” includes polymeric and low-molecular-weight organic materials that can be used to fabricate organic optoelectronic devices. “Low-molecular-weight” refers to any organic material that is not a polymer, and “low-molecular-weight” can actually be quite large. Low-molecular-weight may include repeating units in some contexts. For example, using long-chain alkyl groups as substituents does not exclude molecules from the “low-molecular-weight” class. Low-molecular-weight may be incorporated into polymers, for example, as pendant groups on a polymer backbone, or as part of said backbone. Low-molecular-weight may also serve as the core portion of a dendrimer, which consists of a series of chemical shells constructed on a core portion. The core portion of the dendrimer may be a fluorescent or phosphorescent low-molecular-weight emitter. Dendrimers may be “low-molecular-weight,” and all dendrimers currently used in the field of OLEDs are considered to be low-molecular-weight. In this specification, "top" refers to the part furthest from the substrate, while "bottom" refers to the part closest to the substrate. When a first layer is described as being "located on top of" a second layer, the first layer is located further from the substrate. Unless it is specified that the first layer is "in contact with" the second layer, other layers may exist between the first and second layers. For example, a cathode may be described as being "located on top of" an anode, even if various organic layers are present in between. As used herein, "solution processable" means that it can be dissolved, dispersed, or transported in a liquid medium, either in solution or suspension form, and/or deposited from said medium. A ligand may be referred to as "photoactive" if it is considered to directly contribute to the photoactive properties of the light-emitting material. A ligand may be referred to as "auxiliary" if it is not considered to contribute to the photoactive properties of the light-emitting material; however, auxiliary ligands can alter the properties of photoactive ligands. As used herein, as will be generally understood by those skilled in the art, the first “highest occupied molecular orbital” (HOMO) or “lowest empty molecular orbital” (LUMO) energy level is “greater” or “higher” than the second HOMO or LUMO energy level, if the first energy level is close to the vacuum energy level. Since the ionization potential (IP) is measured as a negative energy relative to the vacuum level, a higher HOMO energy level corresponds to an IP with a smaller absolute value (less negative IP). Similarly, a higher LUMO energy level corresponds to an electron a