JP-7855361-B2 - Industrial robot hands and industrial robots

Inventors

• 栗林 保
• 青木 雅裕

Assignees

• ニデックインスツルメンツ株式会社

Dates

Publication Date

20260508

Application Date

20220217

Claims (5)

1. In the hand of an industrial robot that transports objects, The system comprises a mounting section on which the object to be transported is mounted, a hand base which constitutes the base end portion of the hand and to which the base end of the mounting section is fixed, and a holding mechanism for holding the object to be transported mounted on the mounting section at a fixed horizontal position. The holding mechanism comprises: an end-face contact member having a contact surface against which the end face of the object to be conveyed abuts and attached to the tip side of the mounting portion; a pressing member having a pressing portion that contacts the end face of the object to be conveyed and presses the end face of the object to be conveyed against the contact surface and held by the hand base; a drive source housed inside the hand base and rotating the pressing member relative to the hand base with the vertical direction as the axis of rotation; a bearing that rotatably supports the pressing member; and a sealing member for preventing liquid from entering the inside of the hand base. The pressing member comprises a pivot shaft which serves as the rotation center of the pressing member, and a first lever portion which extends from the pivot shaft radially outward from the pivot shaft. The first lever portion is located outside the hand base, The tip of the first lever portion is connected to the pressing portion, The bearing rotatably supports the pivot shaft, The seal member is positioned on the outer circumference of the pivot shaft and is in close contact with the outer surface of the pivot shaft, characterized in that the seal member is positioned on the outer circumference of the pivot shaft.
2. The hand according to claim 1, characterized in that the pressing portion is a roller rotatably held by the first lever portion.
3. The pressing member includes a second lever portion that extends from the pivot shaft toward the radially outward direction of the pivot shaft, The second lever portion is located inside the hand base portion. The hand according to claim 1 or 2, characterized in that the tip of the second lever portion is connected to the drive source.
4. The hand according to claim 3, characterized in that the shape of the pressing member when viewed from above or below is L-shaped.
5. An industrial robot comprising a hand according to any one of claims 1 to 4, an arm to which the hand is connected, and a main body to which the arm is connected.

Description

This invention relates to a hand for an industrial robot used in industrial robots that transport objects. Furthermore, this invention relates to an industrial robot equipped with such a hand. Conventionally, horizontal articulated industrial robots for transporting semiconductor wafers are known (see, for example, Patent Document 1). The industrial robot described in Patent Document 1 comprises a hand on which a semiconductor wafer is mounted, an arm rotatably connected to the tip of the hand, and a main body rotatably connected to the base of the arm. The hand includes a mounting section on which the semiconductor wafer is mounted, a hand base constituting the base end portion of the hand, and a holding mechanism for holding the semiconductor wafer mounted on the mounting section at a fixed horizontal position. The base end of the mounting section is fixed to the hand base. The hand base is rotatably connected to the tip of the arm. In the industrial robot described in Patent Document 1, the holding mechanism comprises an end-face contact member having a contact surface against which the end face of a semiconductor wafer abuts, a pressing member that contacts the end face of the semiconductor wafer and presses the end face of the semiconductor wafer against the contact surface of the end-face contact member, and an air cylinder that moves the pressing member linearly. The air cylinder is housed inside a hollow hand base. The base end of the pressing member is connected to the air cylinder and is housed inside the hand base. The tip portion of the pressing member is located outside the hand base, allowing the tip of the pressing member to contact the end face of the semiconductor wafer. An opening is formed in the hand base through which the pressing member is inserted. Japanese Patent Publication No. 2015-36186 This is a plan view of an industrial robot according to an embodiment of the present invention.This is an enlarged view illustrating the configuration of section E in Figure 1.This is a cross-sectional view illustrating the configuration of the F-F section in Figure 2. The embodiments of the present invention will be described below with reference to the drawings. (Outline configuration of an industrial robot) Figure 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention. The industrial robot 1 (hereinafter referred to as "Robot 1") in this embodiment is a horizontal articulated robot for transporting semiconductor wafers 2 (hereinafter referred to as "wafer 2"), which are the objects to be transported. The wafer 2 is formed in a disc shape. Robot 1 is used by being incorporated into a semiconductor manufacturing system. In this embodiment, a predetermined process using a liquid is performed on the wafer 2, and Robot 1 transports the processed wafer 2. Robot 1 comprises a hand 3 on which a wafer 2 is mounted, an arm 4 rotatably connected to the tip of the hand 3 and capable of horizontal movement, and a main body 5 to which the base end of the arm 4 is rotatably connected. The arm 4 consists of an arm portion 7 whose base end is rotatably connected to the main body 5, an arm portion 8 whose base end is rotatably connected to the tip of the arm portion 7, and an arm portion 9 whose base end is rotatably connected to the tip of the arm portion 8. Arms 7-9 rotate with the vertical direction as the axis of rotation. The main body 5 includes a columnar member to which the base end of arm 7 is rotatably connected, and a lifting mechanism that raises and lowers the columnar member together with arm 4. The base end of arm 7 is rotatably connected to the upper end of the columnar member. The main body 5, arm 7, arm 8, and arm 9 are arranged in this order from bottom to top in the vertical direction. Furthermore, the robot 1 includes an arm drive mechanism that rotates arm 7 and 8 to extend and retract a portion of arm 4 (composed of arm 7 and arm 8), an arm drive mechanism that rotates arm 9, and a hand drive mechanism that rotates hand 3. The hand 3 is formed to have a roughly Y-shape when viewed from above, and its tip is forked. The hand 3 is rotatably connected to the tip of the arm 9. Furthermore, the hand 3 is positioned above the arm 9. The hand 3 rotates with the vertical direction as its axis of rotation. The hand 3 comprises a mounting section 11 on which the wafer 2 is mounted, a hand base 12 forming the base end of the hand 3, and a holding mechanism 13 for holding the wafer 2 mounted on the mounting section 11 in a fixed horizontal position. The hand base 12 is rotatably connected to the tip of the arm 9. The base end of the mounting section 11 is fixed to the hand base 12. The mounting section 11 is formed in a flat plate shape. The mounting section 11 is positioned so that its thickness direction and vertical direction coincide. The hand base 12 is formed in a flat, block shape with a thin vertical thickness. The hand base 12 is hollow. The holding mecha