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JP-7855393-B2 - Liquid dispensing module

JP7855393B2JP 7855393 B2JP7855393 B2JP 7855393B2JP-7855393-B2

Inventors

  • 岩崎 絢子
  • 中川 喜幸

Assignees

  • キヤノン株式会社

Dates

Publication Date
20260508
Application Date
20220418

Claims (20)

  1. A discharge port located in part of the pressure chamber, An energy generating element is provided at a position opposite the discharge port of the first substrate which forms part of the pressure chamber, and which provides energy for discharge to the liquid in the pressure chamber. A through-channel that penetrates the first substrate and is connected to the pressure chamber by the first opening, A liquid delivery channel connected to a second opening different from the first opening of the aforementioned through-channel, A liquid delivery mechanism provided in the liquid delivery channel, which imparts energy to the liquid in the liquid delivery channel to supply the liquid to the pressure chamber via the through-channel, A first electrical wiring electrically connected to the energy generating element, Equipped with, A liquid discharge module provided with a plurality of pressure chambers and a plurality of energy generating elements, The liquid delivery mechanism is provided on the second substrate which is laminated with the first substrate. Each of the multiple through-flow channels is provided corresponding to each of the multiple pressure chambers, The liquid discharge module is characterized in that the first electrical wiring is routed between adjacent through-flow channels.
  2. The liquid discharge module according to claim 1, characterized in that the discharge ports are formed in an orifice plate laminated on the first substrate, provided in each of the plurality of pressure chambers, and the discharge ports form a row of discharge ports.
  3. The liquid discharge module according to claim 1, characterized in that the pressure chamber is connected to a discharge channel that discharges the liquid supplied from the through-channel into a common channel.
  4. The liquid discharge module according to claim 3, characterized in that the common channel is connected to the liquid delivery channel, and the liquid supplied from the common channel to the liquid delivery channel is supplied to the discharge channel via the through channel and the pressure chamber.
  5. The liquid discharge module according to claim 3, characterized in that the liquid delivery channel and the discharge channel are equipped with filters capable of capturing foreign matter and air bubbles contained in the liquid.
  6. The liquid dispensing module according to claim 2, characterized by having multiple discharge ports of different diameters.
  7. The liquid dispensing module according to claim 6, comprising a first discharge port and a second discharge port having a larger diameter than the first discharge port, wherein the first discharge port and the second discharge port are arranged alternately in the row of discharge ports.
  8. The liquid discharge module according to claim 7, characterized in that the width of the first pressure chamber corresponding to the first discharge port is narrower than the width of the second pressure chamber corresponding to the second discharge port.
  9. The liquid discharge module according to claim 8, characterized in that the first liquid delivery mechanism for supplying energy to the liquid supplied to the first pressure chamber is larger in size than the second liquid delivery mechanism for supplying energy to the liquid supplied to the second pressure chamber.
  10. The liquid discharge module according to claim 8, characterized in that the width of the first liquid supply channel for supplying liquid to the first pressure chamber is wider than the width of the second liquid supply channel for supplying liquid to the second pressure chamber.
  11. The liquid discharge module according to claim 1, characterized in that the liquid supply channel supplies liquid to a plurality of pressure chambers.
  12. The liquid discharge module according to claim 11, characterized in that the plurality of energy generating elements are connected to a common first electrical wiring.
  13. The liquid discharge module according to claim 1, characterized in that the width of the first opening is narrower than the width of the second opening.
  14. The liquid discharge module according to claim 13, characterized in that the through-channel is formed from the first substrate and the third substrate.
  15. The system further comprises a second electrical wiring connected to the aforementioned liquid delivery mechanism, The liquid discharge module according to claim 1, characterized in that the liquid delivery mechanism is an electrothermal conversion element.
  16. The liquid discharge module according to claim 15, characterized in that it has an electrical connection via between the first substrate and the second substrate, and the energy generating element and the liquid delivery mechanism are electrically connected between the substrates.
  17. The liquid discharge module according to claim 1, characterized in that the energy generating element and the first electrical wiring are connected by a plug formed by multiple wiring layers.
  18. The liquid discharge module according to claim 15, characterized in that the liquid delivery mechanism and the second electrical wiring are connected by a plug formed by multiple wiring layers.
  19. The liquid dispensing module according to claim 15, characterized in that the first electrical wiring and the second electrical wiring are electrically connected to an external connection terminal that can be connected to an external device.
  20. The liquid discharge module according to claim 1, characterized in that the energy generating element is an electrothermal conversion element.

Description

This invention relates to a liquid dispensing module for dispensing liquid. Patent Document 1 discloses a configuration in which an energy generating element for discharging liquid, a liquid delivery mechanism for delivering the liquid to be discharged, and a circulation channel that fluidically connects the liquid delivery mechanism and the energy generating element are arranged on the same layer. Furthermore, Patent Document 2 discloses a liquid discharge module comprising an energy generating element for discharging liquid and a liquid delivery mechanism for delivering the liquid to be discharged, wherein the liquid delivery mechanism is positioned on the back of the energy generating element. Special table 2018-518386 publicationJapanese Patent Publication No. 2019-10762 This is an external perspective view showing the inkjet recording head.This is a magnified view of a portion of the recording element substrate.This diagram shows the flow direction of the circulation channel when resupplying ink to the pressure chamber.This is a magnified view of a portion of the recording element substrate.This is a magnified view of a portion of the recording element substrate.This is a cross-sectional view showing the channel structure of the recording element substrate. (First embodiment) A first embodiment of the present invention will be described below with reference to the drawings. Figure 1 is an external perspective view showing an inkjet recording head (hereinafter also simply referred to as a recording head) 100 that can be used as a liquid ejection module in this embodiment. The recording head 100 is composed of multiple recording element substrates 4, each containing multiple recording elements arranged in the Y direction. Figure 1 shows a full-line type recording head 100, where the recording element substrates 4 are arranged in the Y direction over a distance corresponding to the width of an A4 sheet of paper. Each of the recording element substrates 4 is connected to the electrical wiring board 102 via the flexible wiring board 101. The electrical wiring board 102 is equipped with a power supply terminal 103 for receiving power and a signal input terminal 104 for receiving ejection signals. The ink supply unit 105 has a circulation channel formed to supply liquid (hereinafter also referred to as ink) supplied from an ink tank (not shown) to each recording element substrate 4, and to recover ink that was not consumed during recording. Each recording element on the recording element substrate 4, based on the ejection signal input from the signal input terminal 104, uses power supplied from the power supply terminal 103 to eject ink supplied from the ink supply unit 105 in the Z direction shown in the diagram. Figure 2 is an enlarged view of a portion of the recording element substrate 4, showing the flow path configuration and wiring near the discharge port in this embodiment. Figures 2(a) and 2(b) are perspective views of the recording element substrate 4 viewed from the side facing the discharge port 2 (+Z direction), and Figure 2(c) is a cross-sectional view taken along IIc-IIc in Figure 2(a). Figure 2(a) shows the configuration from the orifice plate 12 to the first substrate 14, and Figure 2(b) shows the configuration from the first substrate 14 to the second substrate 16. The recording element substrate 4 is constructed by stacking a second substrate 16, a second flow channel member 15, a first substrate 14, a first flow channel member 13, and an orifice plate 12 in this order in the Z direction. Energy generating elements 1, which are electrothermal conversion elements, are arranged on the surface of the first substrate 14, and discharge ports 2 are formed at the positions of the orifice plate 12 corresponding to the energy generating elements 1. The discharge ports 2 also form a row of discharge ports corresponding to the row of energy generating elements 1. Between the orifice plate 12 and the first substrate 14, the first flow channel member 13 forms individual pressure chambers 3 for each discharge port 2 and energy generating element 1. The pressure chambers 3 are formed by providing partition walls between the multiple discharge ports 2 and energy generating elements 1 arranged in the Y direction. The energy generating element 1 imparts energy to the ink in the pressure chamber for ejection, and the energy-enhanced ink is ejected from the ejection port 2. In this embodiment, the case of an electrothermal conversion element as the energy generating element 1 is described, but a piezoelectric element such as a piezo element may also be used. Next, in this embodiment, the circulation channel 5 that supplies ink supplied from the supply channel 7 to the pressure chamber 3 and discharges it to the common channel 7 will be described. As shown in Figure 2(c), the second substrate 16, the second channel member 15, the first substrate 14, the first channel member 13, and the orifice plate 12 each for