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JP-7855558-B2 - Information processing device, information processing method, and information processing program

JP7855558B2JP 7855558 B2JP7855558 B2JP 7855558B2JP-7855558-B2

Inventors

  • 松岡 敬
  • 宮地 祐樹
  • 江波戸 明彦

Assignees

  • 株式会社東芝

Dates

Publication Date
20260508
Application Date
20230919

Claims (7)

  1. When sweep excitation is performed on a structure containing multiple parts, the frequency of the first peak included in the first transfer function waveform, which represents the relationship between the amplitude intensity and frequency of the output vibration generated in the parts contained in the structure , is identified as the resonant frequency of each of the multiple parts, using the information of each of the parts. When the structure is subjected to an input vibration of the resonant frequency for a predetermined excitation duration, the frequency and half-width of a second peak included in a second transfer function waveform representing the relationship between the amplitude intensity and frequency of the output vibration generated in at least some of the components included in the structure are used to determine which component the frequency of the second peak belongs to, using the component information of each of the plurality of components. Based on this, the vibration propagation path that propagates through the structure when the input vibration of the resonant frequency is applied to the structure is calculated. Processing unit, Equipped with , The aforementioned processing unit, The vibration propagation path is calculated based on the second transfer function waveform calculated according to the vibration acceleration detected by the vibration detector installed on the component. The component whose resonant frequency is the frequency of the second peak with a smaller half-width is assumed to have a shorter vibration propagation distance from the vibration detector that detected the vibration acceleration used to calculate the second transfer function waveform. The propagation path is calculated as the vibration propagation path by sequentially connecting the component whose resonant frequency is the frequency of the second peak with a smaller half-width and the other component whose resonant frequency is the frequency of the second peak with a larger half-width. Information processing device.
  2. The aforementioned vibration duration is The number of second peaks included in the second transfer function waveform measured when the input vibration of the resonant frequency is applied to the structure is greater than or equal to the time it takes for the input vibration excitation time to increase and begin to saturate. The information processing apparatus according to claim 1.
  3. The aforementioned processing unit, Based on the multiple types of second transfer function waveforms detected by each of the multiple vibration detectors installed on different components, the vibration propagation path is calculated. The information processing apparatus according to claim 1.
  4. The aforementioned processing unit, The vibration propagation path is calculated based on the second peak included in the second transfer function waveform when an input vibration of the resonant frequency with an amplitude intensity less than the intensity that would affect the function of the components constituting the structure is applied to the structure for the duration of the excitation. The information processing apparatus according to claim 1.
  5. The aforementioned processing unit, The vibration propagation path is calculated based on the second peak included in each of the multiple types of second transfer function waveforms when each of the input vibrations of the resonant frequency having different amplitude intensities less than the aforementioned intensity is applied for the excitation duration. The information processing apparatus according to claim 4 .
  6. An information processing method performed by an information processing device, When sweep excitation is performed on a structure containing multiple parts, the frequency of the first peak included in the first transfer function waveform, which represents the relationship between the amplitude intensity and frequency of the output vibration generated in the parts contained in the structure , is identified as the resonant frequency of each of the multiple parts, using the information of each of the parts. When the structure is subjected to an input vibration of the resonant frequency for a predetermined excitation duration, the frequency and half-width of the second peak included in the second transfer function waveform, which represents the relationship between the amplitude intensity and frequency of the output vibration generated in at least some of the components included in the structure, are used to identify which component the frequency of the second peak belongs to, using the component information of each of the plurality of components. Then, the vibration propagation path that propagates through the structure when the input vibration of the resonant frequency is applied to the structure is calculated . The vibration propagation path is calculated based on the second transfer function waveform calculated according to the vibration acceleration detected by the vibration detector installed on the component. The component whose resonant frequency is the frequency of the second peak with a smaller half-width is assumed to have a shorter vibration propagation distance from the vibration detector that detected the vibration acceleration used to calculate the second transfer function waveform. The propagation path is calculated as the vibration propagation path by sequentially connecting the component whose resonant frequency is the frequency of the second peak with a smaller half-width and the other component whose resonant frequency is the frequency of the second peak with a larger half-width. Information processing methods.
  7. On the computer, When sweep excitation is performed on a structure containing multiple parts, the frequency of the first peak included in the first transfer function waveform, which represents the relationship between the amplitude intensity and frequency of the output vibration generated in the parts contained in the structure , is identified as the resonant frequency of which part, using the information of each of the multiple parts. When the structure is subjected to an input vibration of the resonant frequency for a predetermined excitation duration, the frequency and half-width of the second peak included in the second transfer function waveform, which represents the relationship between the amplitude intensity and frequency of the output vibration generated in at least some of the components included in the structure, are used to identify which component the frequency of the second peak belongs to, using the component information of each of the plurality of components. Then, the vibration propagation path that propagates through the structure when the input vibration of the resonant frequency is applied to the structure is calculated . The vibration propagation path is calculated based on the second transfer function waveform calculated according to the vibration acceleration detected by the vibration detector installed on the component. The component whose resonant frequency is the frequency of the second peak with a smaller half-width is assumed to have a shorter vibration propagation distance from the vibration detector that detected the vibration acceleration used to calculate the second transfer function waveform, and the propagation path is calculated as the vibration propagation path by sequentially connecting the component whose resonant frequency is the frequency of the second peak with a smaller half-width and the other component whose resonant frequency is the frequency of the second peak with a larger half-width. Information processing program.

Description

Embodiments of the present invention relate to an information processing apparatus, an information processing method, and an information processing program. A technique for identifying vibration sources in structures composed of multiple parts has been disclosed. For example, by inputting vibrations into a structure to forcibly excite it, and then analyzing the vibrations generated by the excitation to identify the resonant frequency, the component with that resonant frequency can be identified as the vibration source. Japanese Patent Publication No. 2023-16097Japanese Patent Publication No. 2001-337011 A schematic diagram of an information processing system.Diagram illustrating sweep excitation.Schematic diagram of the first transfer function waveform.An explanatory diagram of excitation caused by input vibration at the resonant frequency.An explanatory diagram of excitation caused by input vibration at the resonant frequency.Schematic diagram of the second transfer function waveform.Diagram illustrating the vibration propagation path.A flowchart illustrating the flow of information processing.Hardware configuration diagram. The information processing apparatus, information processing method, and information processing program of the embodiment will be described in detail below with reference to the attached drawings. Figure 1 is a schematic diagram showing an example of the information processing system 1 of this embodiment. The information processing system 1 comprises an information processing device 10, a vibration exciter 30, and an accelerometer 32. The information processing device 10 performs information processing such as calculating the vibration propagation path of the structure 20. The structure 20 is the object being measured, whose vibration propagation path is calculated by the information processing device 10. The structure 20 is composed of multiple components 22. The structure 20 is a device or structure, etc., that includes multiple components 22, and at least some of these components 22 are physically connected to each other, either directly or via support members 24, etc. Examples of structures 20 include, but are not limited to, an electron beam lithography apparatus for drawing circuit patterns of LSIs (Large-Scale Integration) using laser irradiation, an exposure apparatus for exposing and transferring the image of a mask pattern onto a photosensitive substrate, a vehicle, and the like. If the structure 20 is an exposure apparatus, the components 22 constituting the structure 20 include a laser irradiation mechanism, a lens barrel holding optical components such as lenses, a table holding a mask and photosensitive substrate, a stage device for moving the table, a housing, etc. If the structure 20 is a vehicle, the components 22 constituting the structure 20 include the vehicle's chassis, undercarriage components, drivetrain components, panel components, etc. Methods for attaching each component 22 included in the structure 20 include fastening methods using screws, bolts and nuts, rivets, etc., as well as attachment methods using welding, adhesive, fitting, etc. Figure 1 illustrates an example where the structure 20 includes components 22A to 22I. These components 22A to 22I are physically connected to each other, either directly or via support members 24, etc. Therefore, components 22A to 22I are connected via support members 24 or other components 22 in a way that allows vibration transmission. The structure 20 is equipped with a vibration exciter 30 and an accelerometer 32. The vibrator 30 is a device for vibrating the structure 20. The vibrator 30 and the information processing device 10 are communicated together. The vibrator 30 applies input vibrations to the structure 20 with a frequency and amplitude intensity controlled by the information processing device 10. Figure 1 shows an example of how the vibrator 30 applies input vibrations to the structure 20 by stimulating an excitation position P, which is positioned in contact with a portion of the structure 20. However, a speaker may be used as the vibrator 30, and input vibrations may be applied to the structure 20 non-contactually using sound waves. In this embodiment, an example is shown of how the vibrator 30 applies input vibrations to the structure 20 by stimulating an excitation position P. The accelerometer 32 is an example of a vibration detector. The accelerometer 32 is a device that measures vibration acceleration generated in the structure 20. The accelerometer 32 and the information processing device 10 are communicated together. The accelerometer 32 is positioned in contact with at least some of the components 22 that make up the structure 20, and detects the vibration acceleration generated in the component 22, transmitting it sequentially to the information processing device 10. Figure 1 shows an example configuration in which the accelerometer 32 is positioned in contact with component 22A among the multiple c