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JP-7855594-B2 - Channel-type scan nozzle for scanning material surfaces

JP7855594B2JP 7855594 B2JP7855594 B2JP 7855594B2JP-7855594-B2

Inventors

  • マース，ボー エイ

Assignees

  • エレメンタル・サイエンティフィック・インコーポレイテッド

Dates

Publication Date
20260508
Application Date
20220106
Priority Date
20210115

Claims (8)

  1. A nozzle for scanning the surface of a material using a fluid, A nozzle body having an internal region having a fluid port configured to receive fluid into the nozzle and a vacuum port configured to connect to a vacuum source, configured to be coupled to a positionable nozzle arm support for positioning the nozzle relative to a material surface, The nozzle body is coupled to a nozzle hood having an outer wall and an inner wall, A first fluid channel and a second fluid channel are defined between the outer wall and the inner wall, which are in fluid communication with the fluid port. The inner wall forms a boundary with at least a portion of the internal region such that, when the direction away from the material surface is considered upward, the vacuum port is positioned outside and above the first fluid channel and the second fluid channel, respectively . The outlet of the fluid port is located between the outer wall and the inner wall such that, while a vacuum is being applied to the vacuum port by the vacuum source, fluid is introduced from the fluid port into at least a portion of the first fluid channel and the second fluid channel, and the fluid is guided along the material surface within at least a portion of the first fluid channel and the second fluid channel . The nozzle is configured to remove the fluid from the material surface through the nozzle via at least one of the fluid port and a second fluid port located adjacent to the fluid port within the nozzle hood. nozzle.
  2. The inner wall has an opening in the region of the nozzle hood opposite the fluid port, which provides access for fluid to the internal region. The nozzle according to claim 1 .
  3. At least one of the first fluid channel and the second fluid channel has a constricted portion in the region of the nozzle hood opposite the fluid port. The nozzle according to claim 1 .
  4. The inner wall has an opening in the region of the nozzle hood opposite the fluid port, providing access for fluid to the internal region. The nozzle according to claim 3 .
  5. At least one of the first fluid channel or the second fluid channel defines a region adjacent to the fluid port. The region adjacent to the fluid port has a larger area than the remaining portion of at least one of the first fluid channel or the second fluid channel. The nozzle according to claim 1 .
  6. A method for scanning the surface of a material using a molded nozzle, The aforementioned nozzle is A nozzle body having an internal region having a fluid port configured to receive fluid into the nozzle and a vacuum port configured to connect to a vacuum source, configured to be coupled to a positionable nozzle arm support for positioning the nozzle relative to a material surface, The nozzle body is coupled to a nozzle hood having an outer wall and an inner wall, A first fluid channel and a second fluid channel are defined between the outer wall and the inner wall, which are in fluid communication with the fluid port. The inner wall forms a boundary with at least a portion of the internal region such that, when the direction away from the material surface is considered upward, the vacuum port is positioned outside and above the first fluid channel and the second fluid channel, respectively . The outlet of the fluid port is located between the outer wall and the inner wall such that, while a vacuum is applied to the vacuum port by the vacuum source, fluid is introduced from the fluid port into at least a portion of the first fluid channel and the second fluid channel, and the fluid is guided along the material surface within at least a portion of the first fluid channel and the second fluid channel. The aforementioned method, The steps include introducing a scanning fluid to the surface of the material through the nozzle, The steps include guiding the scan fluid along the surface of the material through the nozzle such that at least a portion of the scan fluid is held in the first fluid channel and the second fluid channel, The steps include: merging the scan fluid from the first fluid channel and the scan fluid from the second fluid channel in a region of the nozzle hood different from the fluid port; The steps include removing the scan fluid from the surface of the material through the nozzle via at least one of the fluid port and a second fluid port located adjacent to the fluid port within the nozzle hood , Equipped with, method.
  7. The inner wall has an opening in the region of the nozzle hood opposite the fluid port, which provides access for fluid to the internal region. The method according to claim 6 .
  8. At least one of the first fluid channel and the second fluid channel has a constricted portion in the region of the nozzle hood opposite the fluid port. The method according to claim 6 .

Description

[Cross-reference to related applications] This application asserts a benefit under § 119(e) of U.S. Patent Act with respect to U.S. Provisional Application No. 63/137873, filed on 15 January 2021, titled "Channel-shaped Scanning Nozzle for Scanning Semiconductor Wafers." U.S. Provisional Application No. 63/137873 is incorporated herein by reference in its entirety. Inductively coupled plasma (ICP) spectroscopy is a commonly used analytical technique for measuring the concentrations and isotopic ratios of trace elements in liquid samples. ICP spectroscopy utilizes an electromagnetically generated, partially ionized argon plasma reaching temperatures of approximately 7000 K. When a sample is introduced into this plasma, the high temperature causes the sample atoms to ionize or emit light. Each chemical element produces a characteristic mass or emission spectrum; therefore, by measuring the emitted mass or light spectrum, the elemental composition of the original sample can be determined. A sample introduction system can be used to introduce a liquid sample into an ICP spectroscopic instrument (e.g., an inductively coupled plasma mass spectrometer (ICP/ICP-MS), an inductively coupled plasma atomic emission spectrometer (ICP-AES), etc.) for analysis. For example, the sample introduction system may transport a portion of the sample to a nebulizer, which converts the sample into a polydisperse aerosol suitable for ionization in the plasma by the ICP spectroscopic instrument. The aerosol generated by the nebulizer is separated in a spray chamber to remove relatively large aerosol particles. Upon exiting the spray chamber, the aerosol is introduced into the plasma by the plasma torch assembly of the ICP-MS or ICP-AES instrument for analysis. A system and method are disclosed for introducing one or more fluid flows from a nozzle having one or more molded channels to one or more material surfaces for scanning for a target chemical species, and for removing the fluid flow. In one embodiment, the nozzle of the Disclosure comprises, but is not limited to, a nozzle body that defines at least one fluid port for receiving fluid into the nozzle and is configured to be coupled to a positionable nozzle arm support for positioning the nozzle with respect to a material surface; and a nozzle hood that is coupled to the nozzle body and defines an elongated channel having at least a first fluid channel and a second fluid channel extending from the at least one fluid port, wherein the first and second fluid channels are configured to guide fluid along the material surface within at least a portion of each of the first and second fluid channels. In one embodiment, the nozzle of the present disclosure comprises a nozzle body, configured to be coupled to a positionable nozzle arm support for positioning the nozzle relative to a material surface, defining an internal region having a fluid port configured to receive fluid into the nozzle and a vacuum port configured to be coupled to a vacuum source; and a nozzle hood coupled to the nozzle body, having an outer wall and an inner wall, wherein a first fluid channel and a second fluid channel are defined between the outer wall and the inner wall, communicating fluid to the fluid port, the inner wall constitutes a boundary with at least a portion of the internal region, and the outlet of the fluid port is located between the outer wall and the inner wall to introduce fluid from the fluid port into at least a portion of each of the first fluid channel and the second fluid channel during vacuum application to the vacuum port by the vacuum source, and to guide the fluid along the material surface within at least a portion of each of the first fluid channel and the second fluid channel. In one embodiment, the method of the present disclosure, though not limiting, comprises a nozzle body having an internal region having a fluid port configured to receive fluid into the nozzle and a vacuum port configured to be coupled to a vacuum source, wherein the nozzle is configured to be coupled to a positionable nozzle arm support for positioning the nozzle relative to a material surface; and a nozzle hood having an outer wall and an inner wall, wherein a first fluid channel and a second fluid channel are defined between the outer wall and the inner wall, communicating fluid to the fluid port, the inner wall forming a boundary with at least a portion of the internal region, and the outlet of the fluid port allows fluid to flow from the fluid port to at least the first fluid channel and the second fluid channel during the application of vacuum to the vacuum port by the vacuum source. The nozzle is positioned between the outer wall and the inner wall to introduce fluid into a portion of the first fluid channel and the second fluid channel and guide the fluid along the surface of the material within at least a portion of each of them. The method comprises the steps of: introducing a scan fluid to the surface