JP-7855621-B2 - Cleanroom system and control method

Inventors

• 福田 紘之
• 宮鍋 晴彦

Assignees

• 株式会社大気社

Dates

Publication Date

20260508

Application Date

20240116

Claims (11)

1. An air conditioner that conditioned the air discharged from the cleanroom through an air intake installed in the cleanroom, and supplied the conditioned air to the cleanroom through an air supply installed in the cleanroom, A unit that determines the amount of air to be supplied to the cleanroom from the air conditioner based on the cleanliness level of the cleanroom, In a cleanroom system equipped with, A unit for acquiring the temperature of the air blown into the air intake by the air conditioner , If the air temperature acquired by the acquisition unit is below the first temperature threshold, the control unit controls the air conditioner so that the airflow rate determined by the airflow rate determination unit increases . A cleanroom system characterized by having the following features .
2. The control unit, If the air temperature acquired by the acquisition unit is greater than or equal to a second temperature threshold which is greater than the first temperature threshold, the air conditioner is controlled to reduce the airflow rate . The cleanroom system according to feature 1 .
3. The control unit acquires at least one of the current date information and the current time information, and modifies at least one of the first temperature threshold and the second temperature threshold according to at least one of the current date information and the current time information. The cleanroom system according to feature 2 .
4. An air conditioner that conditioned the air discharged from the cleanroom through an air intake installed in the cleanroom, and supplied the conditioned air to the cleanroom through an air supply installed in the cleanroom, A unit that determines the amount of air to be supplied to the cleanroom from the air conditioner based on the cleanliness level of the cleanroom, In a cleanroom system equipped with, An acquisition unit that acquires the humidity of the air blown into the air intake by the air conditioner , If the humidity of the air acquired by the acquisition unit is equal to or greater than the second humidity threshold, the control unit controls the air conditioner so that the airflow rate determined by the airflow rate determination unit increases . A cleanroom system characterized by having the following features .
5. The control unit, If the humidity of the air acquired by the acquisition unit is less than the first humidity threshold which is less than the second humidity threshold, the air conditioner is controlled to reduce the airflow rate . The cleanroom system according to feature 4 .
6. The control unit acquires at least one of the current date information and the current time information, and modifies at least one of the first humidity threshold and the second humidity threshold according to at least one of the current date information and the current time information. The cleanroom system according to claim 5 , characterized in that it is the same as described in claim 5.
7. The control unit, The indoor operating status, which represents the operating status inside the cleanroom, is obtained. The airflow rate determination unit determines the airflow rate according to the air temperature and the operating conditions of the room. A cleanroom system according to any one of claims 1 to 3 .
8. The control unit, By increasing the frequency of the inverter frequency signal output to the motor of the air conditioner , the amount of air blown is increased. By reducing the frequency of the inverter frequency signal output to the motor of the air conditioner , the amount of air blown can be reduced. A cleanroom system according to any one of claims 1 to 6 .
9. The airflow rate determination unit determines the airflow rate according to the cleanliness of multiple locations within the cleanroom. A cleanroom system according to any one of claims 1 to 6 .
10. A control method for a cleanroom, comprising an air conditioner that conditioned the air discharged from the cleanroom through an air intake installed in the cleanroom, and supplied the conditioned air to the cleanroom through an air supply installed in the cleanroom, Based on the cleanliness of the cleanroom, the amount of air supplied to the cleanroom from the air conditioner is determined. The temperature of the air blown into the air intake by the air conditioner is obtained. If the acquired air temperature is below a first temperature threshold, the air conditioner is controlled to increase the determined airflow rate. Control method.
11. A control method for a cleanroom, comprising an air conditioner that conditioned the air discharged from the cleanroom through an air intake installed in the cleanroom, and supplied the conditioned air to the cleanroom through an air supply installed in the cleanroom, Based on the cleanliness of the cleanroom, the amount of air supplied to the cleanroom from the air conditioner is determined. The humidity of the air blown into the air intake by the air conditioner is obtained. If the acquired humidity of the air is equal to or greater than the second humidity threshold, the air conditioner is controlled to increase the determined airflow rate. Control method.

Description

This disclosure relates to a control device, a control method, a control program, and a cleanroom system. Patent Document 1 discloses a cleanroom system that reduces energy consumption in a cleanroom. Specifically, the cleanroom system disclosed in Patent Document 1 considers both the temperature and the cleanliness of the cleanroom, and only performs ventilation when necessary to satisfy either of these conditions. This allows the cleanroom system of Patent Document 1 to reduce energy consumption in the cleanroom compared to a system that constantly performs ventilation. Furthermore, the cleanroom system described in Patent Document 1 considers both the humidity and cleanliness of the cleanroom and only performs ventilation when necessary to satisfy either of these conditions. This allows the cleanroom system described in Patent Document 1 to reduce energy consumption in the cleanroom compared to a system that constantly performs ventilation. Japanese Patent Publication No. 2020-165557 This figure shows an example of a schematic configuration of the cleanroom system according to the first embodiment.This is a psychrometric diagram illustrating the control process of the first embodiment.This is a diagram illustrating the stepwise control of inverter frequency.This is a conceptual diagram illustrating inverter frequency control by a control device.This is a schematic block diagram of a coordinated control device or a computer that functions as a control device.This is a schematic block diagram showing an example of the functional configuration of the control device of the first embodiment.This figure shows an example of a control processing routine executed by the control device of the first embodiment.This figure shows an example of a schematic configuration of the cleanroom system according to the second embodiment.This is a psychrometric diagram illustrating the control process of the second embodiment.This is a schematic block diagram showing an example of the functional configuration of the control device of the second embodiment.This figure shows an example of a control processing routine executed by the control device of the second embodiment. The embodiments will be described in detail below with reference to the drawings. <Cleanroom system of the first embodiment> Figure 1 is a diagram showing a cleanroom system 10 of the first embodiment. As shown in Figure 1, the cleanroom system 10 of the first embodiment includes a particle counter 12 installed inside the cleanroom CR, a temperature sensor 14 installed inside the cleanroom CR, a water channel 16, a chilled water two-way valve 17, an air conditioner 18, a linkage control device 20, a discharge temperature sensor 21A, a control device 22A, and an inverter control panel 24. The particle counter 12 continuously measures the cleanliness level inside the cleanroom (CR). The particle counter 12 is an example of the cleanliness measurement unit described herein. The temperature sensor 14 continuously measures the temperature inside the cleanroom CR. The temperature sensor 14 is an example of a state measurement unit in this disclosure. Chilled water flows through channel 16. Channel 16 is connected to the cooling coil H of the air conditioner 18 (described later), and the chilled water flows from direction W1 to direction W2 as shown in Figure 1. The chilled water two-way valve 17 adjusts its opening degree according to the temperature inside the cleanroom CR measured by the temperature sensor 14, thereby controlling the amount of chilled water supplied to the cooling coil H of the air conditioner 18. When the temperature inside the cleanroom CR is high, the opening degree of the chilled water two-way valve 17 increases, and the amount of chilled water supplied to the cooling coil H of the air conditioner 18 increases. Conversely, when the temperature inside the cleanroom CR is low, the opening degree of the chilled water two-way valve 17 decreases, and the amount of chilled water supplied to the cooling coil H of the air conditioner 18 decreases. In this way, the temperature of the blown air is adjusted by adjusting the amount of chilled water supplied to the cooling coil H according to the temperature inside the cleanroom CR. The air conditioner 18 comprises a cooling coil H, a blower 19 equipped with a motor M, and an inverter control panel 24. The blower 19 of the air conditioner 18 supplies air to the cleanroom CR. Specifically, the rotational speed of the motor M in the air conditioner 18 changes according to the inverter frequency output from the inverter control panel 24 (described later), and the amount of air supplied from the blower 19 changes accordingly. Note that the blower 19 is an example of the air supply unit described herein. The linked control device 20 acquires the cleanliness level measured by the particle counter 12. The linked control device 20 then determines the airflow rate, which is the amount of air supplied to the cleanroo