JP-7855625-B2 - Vacuum pump and vacuum pump components

JP7855625B2JP 7855625 B2JP7855625 B2JP 7855625B2JP-7855625-B2

Inventors

正司毅

Assignees

エドワーズ株式会社

Dates

Publication Date: 20260508
Application Date: 20240311

Claims (7)

It has rotor blades positioned on the rotor shaft and rotating together with the rotor shaft, A vacuum pump that exhausts gas by exhausting an exhaust element provided on the rotor blade due to the rotation of the rotor shaft, The rotor blade is made of multiple metal materials, and its constituent parts are manufactured by a fusion additive manufacturing method. A reinforcing material, which is a second metal material with higher strength than the first metal material that constitutes the main shape of the rotor blade, is arranged in an integrated configuration . The rotor blade comprises a cylindrical rotating body and a rotating turbine blade formed on the outer circumference of the rotating body, The vacuum pump is characterized in that the reinforcing material is arranged on the rotating body .
The vacuum pump according to claim 1, characterized in that the reinforcing material is arranged in an internal structure.
The vacuum pump according to claim 1 or 2, characterized in that the reinforcing material is arranged such that the second metal material is continuous in the circumferential direction of the rotating body .
The vacuum pump according to claim 1 or 2, characterized in that the reinforcing material is arranged such that the second metal material is continuous in the radial direction of the rotating body .
The vacuum pump according to claim 1 or 2, characterized in that the reinforcing material is arranged such that the second metal material is continuous with the rotor axis direction of the rotating body .
The vacuum pump according to claim 1 or 2, characterized in that the reinforcing members are arranged in a plurality in a concentric manner on the rotating body .
The rotor blades of the vacuum pump are configured as follows: A vacuum pump component comprising a cylindrical rotating body and rotating turbine blades formed on the outer circumference of the rotating body, It consists of multiple metal materials, and at least a portion of the constituent parts are manufactured by fused deposition modeling. At least the rotating body has a reinforcing material, which is a second metal material with higher strength than the first metal material that constitutes the main shape, arranged in an integrated structure . The vacuum pump component is characterized in that the reinforcing material is arranged on the rotating body .

Description

This invention relates to vacuum pumps, such as turbomolecular pumps, and vacuum pump components. Generally, turbomolecular pumps are known as a type of vacuum pump. These turbomolecular pumps are used, for example, for exhaust in manufacturing equipment for semiconductors and flat panels. In a turbomolecular pump, power is supplied to a motor inside the pump body, which rotates the impeller, thereby ejecting the gas molecules (process gases) drawn into the pump body and exhausting the gas. Furthermore, Patent Document 1, cited below, discloses that the rotor disk (66) or stator disk (68) can be manufactured by fused deposition modeling, 3D printing, or the like, and that it can be composed of two or more member layers. Japanese Patent Publication No. 2016-205391 This is a schematic diagram illustrating the configuration of a turbomolecular pump according to the first embodiment of the present invention.This is a circuit diagram of an amplifier.This is a time chart showing the control when the current command value is greater than the detected value.This is a timing chart showing the control when the current command value is smaller than the detected value.This is an explanatory diagram that schematically shows the reinforcing parts of the rotor blade using hatching.(a) is a schematic plan view showing the shape and arrangement of the reinforcing material according to the first embodiment, and (b) is a longitudinal cross-sectional side view showing an enlarged portion of the part along line A-A in (a).This is a schematic diagram illustrating a 3D printer.(a) is an explanatory diagram schematically showing the formation procedure of each layer, (b) is an explanatory diagram showing other formation procedures for each layer, and (c) is an explanatory diagram showing yet another formation procedure for each layer.Figures (a) to (c) are schematic longitudinal cross-sectional side views showing the shape and arrangement of reinforcing materials according to the second to fourth embodiments.(a) is a schematic plan view showing the shape and arrangement of the reinforcing material according to the fifth embodiment, and (b) is a longitudinal cross-sectional side view showing an enlarged portion along the line B-B in (a).(a) is a schematic plan view showing the shape and arrangement of the reinforcing material according to the sixth embodiment, and (b) is a longitudinal cross-sectional side view showing an enlarged portion of the part along the line C-C in (a).This is a schematic longitudinal cross-sectional side view showing a reinforcing member according to the seventh embodiment. <Basic configuration of the turbomolecular pump 100 according to the first embodiment> Figure 1 shows a longitudinal cross-sectional view of a turbomolecular pump 100 as a vacuum pump according to the first embodiment of the present invention. This turbomolecular pump 100 is connected to a vacuum chamber (not shown) of a target device, such as a semiconductor manufacturing apparatus. In Figure 1, the turbomolecular pump 100 has an intake port 101 formed at the upper end of a cylindrical outer casing 127. Inside the outer casing 127 is a rotating body 103, which has multiple rotating turbine blades 102 (102a, 102b, 102c, etc.) arranged radially and in multiple stages around its circumference for drawing in and exhausting gas. In the following, the multiple stages of rotating turbine blades (turbine blade sections) may be collectively referred to as "rotating turbine blade 102." Furthermore, when there is no need to distinguish between the rotating turbine blades (turbine blade sections) of each stage, they may also be collectively referred to as "rotating turbine blade 102." Additionally, if necessary, the rotating turbine blades (turbine blade sections) may be distinguished by stage and referred to as "rotating turbine blade 102a," "rotating turbine blade 102b," "rotating turbine blade 102c," etc. Each stage, like a typical turbomolecular pump, is composed of multiple blades (blade sections). The same applies to the fixed turbine blades 123 (123a, 123b, 123c, etc.) and fixed blade spacers 125 (125a, 125b, 125c, etc.), which will be described later. A rotor shaft 113 is attached to the center of the rotating body 103. This rotor shaft 113 is suspended in the air and its position is controlled, for example, by a five-axis controlled magnetic bearing. In this embodiment, the rotating body 103 has a rotor shaft 113, and the rotor shaft 113 and the rotor blades 114 are combined to form the rotating body 103. The details of the structure of the rotor blades 114 will be described later. The upper radial electromagnet 104 consists of four electromagnets arranged in pairs along the X and Y axes. Four upper radial sensors 107 are provided in close proximity to the upper radial electromagnet 104, each corresponding to one of the electromagnets. These upper radial sensors 107 utilize, for example, inductance sensors or eddy current sensors with cond